{"paper":{"title":"Investigation of high pressure capacitively coupled plasmas produced by electrons energized in DC sheath at powered electrode","license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","headline":"","cross_cats":["physics.app-ph"],"primary_cat":"physics.plasm-ph","authors_text":"Anuravi Sharma, Arti Rawat, Ashish Ganguli, Ramesh Narayanan","submitted_at":"2026-08-02T06:18:35Z","abstract_excerpt":"A 13.56 MHz, capacitively coupled plasma is investigated experimentally to determine the power absorption mechanism across a wide pressure range ({\\approx} 5 - 600 mTorr) at {\\approx} 10 W. Axial profiles of plasma parameters are measured along with V_{DC}, the DC self-bias voltage on the powered electrode (PE), from which the DC sheath voltage drop, V_{s} is determined. Axial profiles of electron ohmic power absorption reveal that power deposition is highest in low-density regions and lowest in high-density regions, indicating that plasma formation is not driven by Ohmic heating. Probability "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2608.01030","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2608.01030/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}