{"paper":{"title":"Broadband Millimeter-Wave Anti-Reflection Coatings on Silicon Using Pyramidal Sub-Wavelength Structures","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["astro-ph.CO"],"primary_cat":"astro-ph.IM","authors_text":"Hiroaki Imada, J\\\"urgen Koch, Karl Young, Oliver Suttmann, Qi Wen, Shaul Hanany, Tomotake Matsumura, Viktor Sch\\\"utz","submitted_at":"2017-02-06T19:11:52Z","abstract_excerpt":"We used two novel approaches to produce sub-wavelength structure (SWS) anti-reflection coatings (ARC) on silicon for the millimeter and sub-millimeter (MSM) wave band: picosecond laser ablation and dicing with beveled saws. We produced pyramidal structures with both techniques. The diced sample, machined on only one side, had pitch and height of 350 $\\mu$m and 972 $\\mu$m. The two laser ablated samples had pitch of 180 $\\mu$m and heights of 720 $\\mu$m and 580 $\\mu$m; only one of these samples was ablated on both sides. We present measurements of shape and optical performance as well as comparis"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1702.01768","kind":"arxiv","version":2},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}