{"paper":{"title":"Delta-doped \\b{eta}-Ga2O3 thin films and \\b{eta}-(Al0.26Ga0.74)2O3/\\b{eta}-Ga2O3 heterostructures grown by metalorganic vapor-phase epitaxy","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cond-mat.mes-hall","physics.app-ph"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Arkka Bhattacharyya, Ashwin Rishinaramangalam, Daniel Feezell, Michael A. Scarpulla, Praneeth Ranga, Sriram Krishnamoorthy, Yu Kee Ooi","submitted_at":"2019-10-28T04:10:43Z","abstract_excerpt":"We report on silicon delta doping of metalorganic vapor-phase epitaxy-grown \\b{eta}-Ga2O3 thin films using silane precursor. Delta-doped \\b{eta}-Ga2O3 epitaxial films are characterized using capacitance-voltage profiling and secondary-ion mass spectroscopy. Electron sheet charge density in the range of 2.9e12 cm-2 to 8e12 cm-2 with a half width at half maximum ranging from 6.2 nm to 3.5 nm is measured. We also demonstrate a high density (6.4e12 cm-2) degenerate two-dimensional electron gas using a delta-doped \\b{eta}-(Al0.26Ga0.74)2O3/\\b{eta}-Ga2O3 heterostructure.The total charge could also i"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1910.12432","kind":"arxiv","version":2},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/1910.12432/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}