{"paper":{"title":"Determination of the intrinsic mechanical quality factor in high-stress silicon nitride resonators","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["cond-mat.mes-hall"],"primary_cat":"physics.app-ph","authors_text":"Alexander Eichler, Antonius Armanious, Ariane Giesriegl, Christian L. Degen, Geena Benga, Nicola Cavalleri, Silvan Schmid, Vincent Dumont, Wei Wang","submitted_at":"2026-06-18T15:19:08Z","abstract_excerpt":"Recent advances in silicon nitride nanomechanical resonators have pushed mechanical quality factors to ultra-high values by combining stress-induced dissipation dilution with mode-shape engineering. Neither mechanism alters the intrinsic quality factor $Q_{\\mathrm{intr}}$. Targeting the intrinsic loss itself therefore remains an untapped route to even higher $Q$. Doing so first requires reliable quantification of $Q_{\\mathrm{intr}}$, which has proven challenging. Here we present a robust methodology that quantifies $Q_{\\mathrm{intr}}$ by combining automated mode identification with systematic "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2606.20354","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2606.20354/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}