{"paper":{"title":"Pressure dependence of magnetron sputtering: 2D-RZ particle-in-cell and 1D fluid modeling","license":"http://creativecommons.org/licenses/by-nc-sa/4.0/","headline":"","cross_cats":[],"primary_cat":"physics.plasm-ph","authors_text":"2) ((1) University of Colorado Boulder, (2) Silvaco Inc.), Daniel Main (2), Gregory R. Werner (1), John R. Cary (1, Joseph G. Theis (1), Thomas G. Jenkins (2)","submitted_at":"2025-09-03T19:28:35Z","abstract_excerpt":"We reproduce the consistently-seen experimental voltage versus pressure (V-P) dependence of DC magnetron sputtering (DCMS) with 2D-RZ particle-in-cell (PIC) simulation. Informed by PIC simulation, we develop a steady-state, 1D-axial fluid model of the sheath and presheath that also reproduces this V-P dependence. The V-P dependence is the relationship between the steady-state voltage needed to maintain a constant discharge current and the neutral gas pressure. V-P dependence is fundamental to device performance, but has not previously been reproduced with simulation or satisfactorily explained"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2509.03664","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2509.03664/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}