{"paper":{"title":"Confocal Subsurface Backscattering Microscopy for Optical Identification of Nanoscale Threading Dislocations in SiC Substrates","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":[],"primary_cat":"physics.optics","authors_text":"Chao-Ming Fu, Chia-Shain Chuang, Chi-Tsu Yuan, Hsiu-Ming Hsu, Hsiu-Ying Huang, Irwan Saleh Kurniawan, Jia-Ren Wu, Russel Cruz Sevilla, Ruth Jeane Soebroto, Sheng-Hsiung Chang, Wen-Chung Li","submitted_at":"2026-06-03T08:45:10Z","abstract_excerpt":"High density threading dislocations in SiC wafers facilitate reverse leakage and degradation, yet commercial defect inspection systems based on surface profiling and PL dark-contrast miss nanoscale TDs because they lack resolvable surface signatures and band-edge PL is uniformly quenched by background dopants or compensating defects. Here, we develop confocal subsurface backscattering microscopy to nondestructively detect TDs, based on the synergy of confocal filtering induced dark field configuration and strain induced photoelastic mechanism. By simultaneously suppressing specular reflection "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2606.04607","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2606.04607/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}