{"as_of":"2026-08-10T20:21:00Z","caps":{"database_statements":6,"inbound":100,"outbound":100},"context_digest":"sha256:5b2900cbefc932b759002d884cda7011d0697104ac226b1d754110f7938b2df8","coverage":[{"denominator":66,"lane":"reference_resolution","note":"Typed states for the displayed outbound observations.","records_observed":66,"source":"paper_references, paper_reference_links","source_observed_at":"2026-08-06T17:24:49.026338Z","state":"measured"},{"denominator":66,"lane":"standing_notices","note":"One-hop event checks from named stored sources.","records_observed":66,"source":"scholarly_work_events, retraction_status_cache","source_observed_at":"2026-08-10T06:31:04.303077+00:00","state":"measured"},{"denominator":0,"lane":"inbound_itemization","note":"Pith citing papers itemized under the disclosed page cap.","records_observed":0,"source":"paper_references, paper_reference_links","source_observed_at":null,"state":"measured"},{"denominator":1,"lane":"external_citation_measurements","note":"A source-named dated measurement, never combined with another source.","records_observed":0,"source":"cited_works","source_observed_at":null,"state":"measured"}],"external_citation_measurements":[],"inbound":[],"links":{"evidence":"/evidence","html":"/paper/2507.10983/citation-record","integrity":"/paper/2507.10983/integrity","json":"/paper/2507.10983/citation-record.json","paper":"/paper/2507.10983"},"outbound":[{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.872410Z","title":"N., 2012","venue":null,"work_id":"f38a140b-444c-4059-8d8c-bcc1734b5b71","year":2012},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":1,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.740424Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:97713f53fcaae1bd370d875ea0caf9b0968329c6bfdf7bbb8acbb78ddc1a6743","observation_id":"326d39fb-7726-4fc1-90d4-12e4e6b1e12a","resolution":{"observed_at":"2026-08-06T17:24:49.876178Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.859762Z","title":"N., 2012, page 88, Chapter 3.1","venue":null,"work_id":"ecef2962-3783-4bf9-ba77-102e35370e42","year":2012},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":2,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.744587Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:52dbdebfdbd11187ab98f99fac6c665eb819ff7f760fb90dfc7fbdedd977e36b","observation_id":"df8d66cc-d8f4-4275-a6dc-3b0e743779fc","resolution":{"observed_at":"2026-08-06T17:24:49.864256Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.848621Z","title":"N., 2012, page 135, Chapter 3.3","venue":null,"work_id":"300d9937-aa64-4b7b-a9d5-5167b0b8561b","year":2012},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":3,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.748460Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:4791eb29dfdfa83664a02eb3e4e2a5df918328525a705eeb1f3c4d2b5c2ade98","observation_id":"84e2701a-e9bc-4d91-be34-9b18457c287c","resolution":{"observed_at":"2026-08-06T17:24:49.852922Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.836637Z","title":"Handbook of thin film deposition","venue":null,"work_id":"cd4e1eb5-7050-4a99-8bb0-eb252b6cf7c3","year":2018},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":4,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.752287Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:8fff3ff6f096bc9e5a185648a5abb673d1379ff270e06e9aa0e6906615f5ea87","observation_id":"7ba33ccd-1c44-4108-99f5-7f8b81687eac","resolution":{"observed_at":"2026-08-06T17:24:49.840586Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.825345Z","title":"F., Butler, S","venue":null,"work_id":"8d2fad38-e49d-4f94-a152-35b67872ba0f","year":null},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":5,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.757274Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:89e3f33c85968d043a16103763c352142ea5cc06cea04cad014cabaef176aeb4","observation_id":"080aa49e-9f05-4b03-8574-342ddddeb378","resolution":{"observed_at":"2026-08-06T17:24:49.828991Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.800959Z","title":"What is machine learning?","venue":null,"work_id":"0cbae9ce-ff0e-4a08-9994-e11ba3350051","year":2022},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":6,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.768160Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:20e5909dd1ae70b8167f850e4d780832239e0253a548ee9cd2b3e9eff14b9fc5","observation_id":"6cabeb66-3bc8-4bde-bb73-98dba779d362","resolution":{"observed_at":"2026-08-06T17:24:49.805196Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.788949Z","title":"D., 2019","venue":null,"work_id":"7adb9047-c84d-455f-986a-4c42cb96dcaa","year":2019},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":7,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.775852Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:702387b15924ebc090d03ad79c705227feb623dab9fcbb4af881d6b0379b4ef5","observation_id":"6acfda9b-b6b7-41a7-9b8f-be53fb544d19","resolution":{"observed_at":"2026-08-06T17:24:49.793615Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.776944Z","title":null,"venue":null,"work_id":"6be003d6-1539-4ba4-8652-a2747ab1cecc","year":2021},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":8,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.779924Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:5b13f18c92c0eaf8353d59110eacc4bc732c7e191535991886a710a2d72c0ea8","observation_id":"d8da95ea-dfa1-44b5-9797-a009c9a23531","resolution":{"observed_at":"2026-08-06T17:24:49.781244Z","resolver_source":"raw_fallback","status":"unresolved"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.765159Z","title":"Physics- informed machine learning","venue":null,"work_id":"90da348e-15fa-43de-b282-31961bc8fdd4","year":2021},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":9,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.783659Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:a6ca67c6f682bf7373cfabb261b2fd00cd43f890ee013430eb26263a114343cb","observation_id":"59bf0381-29ea-4b42-ad90-807fbdca7c7b","resolution":{"observed_at":"2026-08-06T17:24:49.769261Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.753599Z","title":"Physics-informed neural networks: A deep learning framework for solving forward and inverse problems in- volving nonlinear partial differential equations","venue":null,"work_id":"0753e305-4263-4c96-b2cc-456cd33bd74c","year":2019},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":10,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.788341Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:0cde131dd86ff86650f8ace710c169d1dd10e2b26aa114df43889485e08ad5ef","observation_id":"3bf8ee57-f969-4b7a-822d-58b32262e11b","resolution":{"observed_at":"2026-08-06T17:24:49.757887Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.742512Z","title":"Introduction to semiconductor manufactur- ing technology","venue":null,"work_id":"613c78a2-8710-4db5-8bfa-2c9fb3c747e8","year":2000},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":11,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.793226Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:449bb3f9d2e413278648bb21d3301d2f6fdf8f45f1dfe985a3541174caed2854","observation_id":"bd25bb3b-08ea-40f7-9803-f225697a1ffe","resolution":{"observed_at":"2026-08-06T17:24:49.747057Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.730946Z","title":"Moore’s law","venue":null,"work_id":"307363ce-fdb4-475f-ae16-bafc62876c6b","year":1965},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":12,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.798641Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:113e288988704b925641cdb892492a6ad22e2319da6ac37ef980017177fadf03","observation_id":"ea674ae3-4158-4ccb-aae8-7f55268c041b","resolution":{"observed_at":"2026-08-06T17:24:49.735196Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.719390Z","title":"Euv lithography","venue":null,"work_id":"8d4e0938-fa3c-4ff2-a890-1258fd3ffe64","year":2009},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":13,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.804440Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:c69d9bbf5ea58307641333ce978c2ad613ba381591129a1f382909248afd2075","observation_id":"d419c2ec-1bd2-4ea7-b990-03593878738b","resolution":{"observed_at":"2026-08-06T17:24:49.723856Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.707855Z","title":"Introduction to fin- fet: Formation process, strengths, and future exploration","venue":null,"work_id":"c3def982-3a0c-412e-8819-603014986169","year":2022},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":14,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.809966Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:4a7079b23a0d4c14044a07113198359dbfbcb9b0498798d245b053664fc9aaff","observation_id":"df0b2830-5798-4459-a294-6304b16855e4","resolution":{"observed_at":"2026-08-06T17:24:49.712521Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.696117Z","title":"Finfet ver- sus gate-all-around nanowire fet: Performance, scaling, and variability","venue":null,"work_id":"06273f7f-1991-479b-9338-55e742ac56da","year":2018},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":15,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.816757Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:e646dbd88713bc255afd5a70b17e7e725a312e35ccf8ebdfd65f78789f4462b7","observation_id":"1d538ad8-cd86-4a25-adb9-a1b2c7692141","resolution":{"observed_at":"2026-08-06T17:24:49.700170Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.684802Z","title":"High-k/metal gate innovations en- abling continued cmos scaling","venue":null,"work_id":"221b04e9-4cbd-463c-b3a4-fc38acadd91f","year":2011},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":16,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.842516Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:25bb1df61e159683d2a2faa02d3d0d84c6aaf488ee8c5b93be4fc499c2d5fee6","observation_id":"3051e1e4-ee15-4a9a-a8e1-903d87263355","resolution":{"observed_at":"2026-08-06T17:24:49.688856Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.671802Z","title":"Recent advances and trends in advanced packaging","venue":null,"work_id":"2995ca9d-6649-44f9-83c2-30183b2473f2","year":2022},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":17,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.860399Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:57355436c84636831accc59b4a2c45bc7966d71db281d5a3119d1a7fb494ce95","observation_id":"45bbbeaa-4d12-47d6-94fd-a1d797316adc","resolution":{"observed_at":"2026-08-06T17:24:49.676778Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.659732Z","title":"Chapter 12 - structure and prop- erties of films","venue":null,"work_id":"7b5a8232-e2bf-4f95-8874-ae861b8f65af","year":2006},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":18,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.863985Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:325e77eb5a8d505d0cbf641de961a30ba8ee4ea25f11aa9086086309ba0dae59","observation_id":"a385feb9-0e8d-4b9b-9385-d807c14065a8","resolution":{"observed_at":"2026-08-06T17:24:49.664336Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.648371Z","title":"E., 2000","venue":null,"work_id":"1201d35b-cd5b-413d-b819-e3a30a477990","year":2000},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":19,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.866871Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:7455f20f54e006a459ef9478145857d391610accc379a97c12ce7ec7cd891196","observation_id":"e7b77a75-eb4b-403a-8ef3-19a464a19c41","resolution":{"observed_at":"2026-08-06T17:24:49.651939Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.636092Z","title":"Chemical methods of thin film de- position: Chemical vapor deposition, atomic layer depo- sition, and related technologies","venue":null,"work_id":"40c177e2-d807-44d0-853f-5d9c256819d2","year":2003},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":20,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.869821Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:daf475cee0f462cd79cf9bdb1f6c2e45a2c34bcc72fef7a067926f994cc2f932","observation_id":"5068aa08-2ace-4133-b427-344981100d76","resolution":{"observed_at":"2026-08-06T17:24:49.640198Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.623335Z","title":"Atomic layer deposi- tion and other thin film deposition techniques: from princi- ples to film properties","venue":null,"work_id":"9388d576-eeb2-4679-b9ba-83488539cf71","year":2022},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":21,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.873324Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:21e484557b770d18ab346fe6fc8a8d82c284c550b872891ae6d366b0531445d3","observation_id":"54ccd40e-8782-4b28-82f9-c9c3c9c1665f","resolution":{"observed_at":"2026-08-06T17:24:49.627897Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.610206Z","title":"Chapter 3 - an overview of deep learning in big data, image, and signal processing in the modern digital age","venue":null,"work_id":"a60a6c6d-0321-446b-b568-b7d5cbbf046d","year":2021},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":22,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.876579Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:d4a68ca92f285c0b2b8b66e73a8f7e98ae474edb034094987495be18ec63cfd5","observation_id":"9a9f80de-9ea0-4ed1-acba-d4f64c4fe5cc","resolution":{"observed_at":"2026-08-06T17:24:49.614570Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.599561Z","title":"A comprehensive literature review of the applications of ai techniques through the lifecycle of indus- trial equipment","venue":null,"work_id":"2ce2506d-4f8f-4778-9fb0-32f6a56508ec","year":2023},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":23,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.880777Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:0de78640c2197cbdc7a9a030f74601730bb3723cd1696ba5ef21b644d3a73651","observation_id":"9df47f6b-eaf2-4a9c-ba96-758f77293c95","resolution":{"observed_at":"2026-08-06T17:24:49.603875Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.588715Z","title":"Artificial intelligence and machine learning approaches to energy demand-side response: A systematic review","venue":null,"work_id":"7e85ce46-8abd-4550-aede-5c4c1977a543","year":2020},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":24,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.884949Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:c3f2b0df688bfc56f3c1f50590206ba6343ae549d44f9fe6d54d2b0d50d6f98d","observation_id":"f9210478-148d-49ac-8539-48f0a807b945","resolution":{"observed_at":"2026-08-06T17:24:49.592780Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.577021Z","title":"Deepsem- net: Enhancing sem defect analysis in semiconductor manufacturing with a dual-branch cnn-transformer archi- tecture","venue":null,"work_id":"91c420f3-1ddb-4278-b32f-a60b57e23f54","year":2024},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":25,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.888549Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:dc982ac6d24148abf1455c9e5d22a538741c37214bb5864047f791f3e86f9f69","observation_id":"56823f20-447f-444d-a173-ecb5d9a759c5","resolution":{"observed_at":"2026-08-06T17:24:49.580469Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.565785Z","title":"Image-driven machine learning for automatic characterization of grain size and distribution in smart vanadium dioxide thin films","venue":null,"work_id":"b2334bfd-92c9-4f7e-9560-0a54ca16fef5","year":2024},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":26,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.891427Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:48ceea08e41af4be1f0b888278dd960a42e4a488b8fd5233f7769ae79581735a","observation_id":"e200259c-ff7e-4fdb-b689-267e4ad91dfe","resolution":{"observed_at":"2026-08-06T17:24:49.569730Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.555732Z","title":"Deep transfer wasserstein adversarial network for wafer map defect recognition","venue":null,"work_id":"1c220d3c-c8ee-4a09-a758-057814f5dc55","year":2021},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":27,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.894319Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:aae3459c350f59ce4cec2f8e18c231a411312ba934d2467ed470b96088a34960","observation_id":"cd4f7316-7f1e-4410-937d-c852285e1149","resolution":{"observed_at":"2026-08-06T17:24:49.558999Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.545494Z","title":null,"venue":null,"work_id":"cc85a04b-cb9b-419e-b66a-c54acca57d86","year":null},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":28,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.897692Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:8484bb622739d20d3e3397d773fa3a3c1072048872cd08e4c795461cd2e91c64","observation_id":"fe9c432b-da5d-42d7-a2e7-03be2a9c5388","resolution":{"observed_at":"2026-08-06T17:24:49.548945Z","resolver_source":"raw_fallback","status":"unresolved"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.526876Z","title":"Humana Press, Totowa, NJ, pp","venue":null,"work_id":"9aa73d39-9f30-4e5f-867c-b8ca42722e2c","year":2009},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":29,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.904188Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:4653e92b69bae2d0a505cd1438304516c18b399c4dd5fae78537d7208ad328f8","observation_id":"1df7dbc5-d63b-43e1-b30e-9ca888f09cca","resolution":{"observed_at":"2026-08-06T17:24:49.530115Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.517663Z","title":"Machine learning-based model- ing and operation for ald of sio2 thin-films using data from a multiscale cfd simulation","venue":null,"work_id":"17ce16e0-d448-4a3f-a262-13fdf37fcff1","year":2019},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":30,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.907775Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:39bab1e8d28b6f3d22f8637b0ef6c71593008c0007c9f8a17d10b66944dd6a52","observation_id":"4390176b-b4db-48bf-9f84-a916e101d4ad","resolution":{"observed_at":"2026-08-06T17:24:49.520764Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.508308Z","title":null,"venue":null,"work_id":"a52d578b-f278-4bd1-8fb8-83cccc3e0ed3","year":null},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":31,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.911689Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:244ccaf4f68243e31bdd8fb5b9ab1795e1af599c305be5a94e8c34e230bec890","observation_id":"8ebdc118-cb94-4255-8da9-55c99aac9cd3","resolution":{"observed_at":"2026-08-06T17:24:49.511669Z","resolver_source":"raw_fallback","status":"unresolved"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.475126Z","title":null,"venue":null,"work_id":"24f8a32d-a2d9-4ebd-a5ef-ea8aa73bedc2","year":2023},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":33,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.922957Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:7c62a57ccd4b9dbbfdeac1bebb3c927c081b5980a2f16d4c52ace5ff5c84e0ef","observation_id":"a892a3cb-89a2-4c4b-9a62-39d5e2f1fef9","resolution":{"observed_at":"2026-08-06T17:24:49.478686Z","resolver_source":"raw_fallback","status":"unresolved"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.465000Z","title":"Deep reinforcement learning: A brief survey","venue":null,"work_id":"e080a8b0-3b12-49e0-9d95-f5a7b6f34b65","year":2017},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":34,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.926678Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:e0cbbd97dfef1c85d122b2fe1457e3a4ba684208fc3faac365c8c16691b6e848","observation_id":"4683a322-a880-48b2-a2c2-5ab832761bf4","resolution":{"observed_at":"2026-08-06T17:24:49.468505Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.454796Z","title":"Exploring machine learning for semiconductor process optimization: A sys- tematic review","venue":null,"work_id":"c97839ca-e60d-4c61-9297-46d4030097f2","year":2024},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":35,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.930142Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:752f22eb6c4dc68bf8b1b7dc4c092856705824f20af67d87d370977e9d2233f3","observation_id":"3c991e2f-74be-459d-b5ea-88788994119c","resolution":{"observed_at":"2026-08-06T17:24:49.458019Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.445023Z","title":"Artifi- cial neural network discrimination for parameter estimation and optimal product design of thin films manufactured by chemical vapor deposition","venue":null,"work_id":"3b1a3a2f-294a-49d1-bc9e-fb3802c79bc4","year":2020},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":36,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.933155Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:8061781c631c5ab85bc459c67b23e5f0b47d678043a2b9737d85b8696f896b5b","observation_id":"f1589db9-0bb3-4078-9852-1dd935212ce5","resolution":{"observed_at":"2026-08-06T17:24:49.448624Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.485734Z","title":null,"venue":null,"work_id":"5f32ba5f-cfe9-4e3b-8deb-28b7fde5740b","year":2024},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":37,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.936676Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:984c703cebb7c3f8e62b5ea756f87fdadef1912397fbdb1309dfa3f2fc63cb58","observation_id":"82a144d2-5b2e-4c92-8bd6-e00bb61ad8da","resolution":{"observed_at":"2026-08-06T17:24:49.489021Z","resolver_source":"raw_fallback","status":"unresolved"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.435268Z","title":"Optimizing the chemical vapor deposition process of 4h–sic epitaxial layer growth with machine-learning-assisted multiphysics simulations","venue":null,"work_id":"94a3abd2-4fd2-4e97-acd1-abe18b3beab9","year":2024},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":38,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.940673Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:e6c6053b485bea0db5f77fd7ce3b259cea9a10c51fccb7726c1326b47e5785e2","observation_id":"e4d8ec54-60d0-4b09-adf0-f90da41016e8","resolution":{"observed_at":"2026-08-06T17:24:49.438613Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.425120Z","title":"When magnetron sput- tering deposition meets machine learning: Application to process anomaly detection","venue":null,"work_id":"2a4234ac-a5ae-4740-9e38-dd71c460a9f6","year":2024},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":39,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.943849Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:7925fea8813dcf7afcb28e972292703fa06c5cb75ed85ba5fe0e83e5ca868c9e","observation_id":"bf3b1368-56df-4948-a3aa-a5a1e66d9066","resolution":{"observed_at":"2026-08-06T17:24:49.428434Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.412199Z","title":"A contextual sensor system for non-intrusive machine status and energy monitoring","venue":null,"work_id":"89cce1a3-1175-4301-8137-79f0f196ac51","year":2022},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":40,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.947012Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:cab638829885a85aad34c3b3a553ab4c8db2199cf7cf96e29dd7ad0aee7217b1","observation_id":"726ddccb-c6df-4c75-b2ef-91b5a080fdc5","resolution":{"observed_at":"2026-08-06T17:24:49.417775Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.402339Z","title":"Accelerating power flow calcu- lations in lv networks using physics-informed graph neural networks","venue":null,"work_id":"ca30d612-80c7-4c3b-b5c9-601ffd0a17c6","year":2024},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":41,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.950085Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:fbd4b7b47bbecf272e9c138c95948dcd857b4b22196ccda88f68745e54303809","observation_id":"4e2f9df8-4547-4903-9f05-6d105a36e591","resolution":{"observed_at":"2026-08-06T17:24:49.405663Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.392496Z","title":"Physical activation functions (pafs): An approach for more efficient induction of physics into physics-informed neural networks (pinns)","venue":null,"work_id":"ef048ad9-9ce0-4495-bb61-8fe8a7bd65d8","year":2024},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":42,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.953576Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:8d35f040503374f291fcb856ee65140a060914dba296875ea0263963221ed85c","observation_id":"0d1a3d2d-7ab7-45cc-b966-b8470321693c","resolution":{"observed_at":"2026-08-06T17:24:49.395948Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":{"arxiv_id":"2211.08064","last_updated":"2023-03-07T02:46:34Z","snapshot_observed_at":"2026-07-06T14:18:30.314936Z","submitted_at":"2022-11-15T11:34:30Z","title":"Physics-Informed Machine Learning: A Survey on Problems, Methods and Applications","version":2},"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":null,"pith_arxiv_id":"2211.08064","snapshot_observed_at":"2026-08-06T17:24:48.957034Z","title":"Physics-informed machine learning: A survey on problems, methods and applications","venue":null,"work_id":null,"year":2022},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":43,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.957034Z"},"links":{"cited_paper":"/paper/2211.08064","citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:3b9e03c6cc99da13d8b248cee1448eed8e41680721aad129cead0f857453a897","observation_id":"a798f3ac-c260-4cc7-9386-96ec12f64369","resolution":{"observed_at":"2026-08-06T17:24:48.957034Z","resolver_source":null,"status":"unresolved"},"standing_notice":{"events":[],"reason":"canonical_work_link_unavailable","source_receipts":[],"state":"unavailable"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.381043Z","title":"Scientific machine learning through physics–informed neural networks: Where we are and what’s next","venue":null,"work_id":"e701bd85-7aae-4465-9e2d-eafe5ded23cf","year":2022},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":44,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.960714Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:576ee7afe488f52879535742d9ea004b03f3c683c25c4e002d502ebcbd77870b","observation_id":"0dfde28b-beb9-405f-9eb7-9ad4c448a3df","resolution":{"observed_at":"2026-08-06T17:24:49.384718Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.371383Z","title":"Hidden fluid mechanics: Learning velocity and pressure fields from flow visualizations","venue":null,"work_id":"fe58b510-c1bd-4a0c-b6a8-b5038bf66d5d","year":2020},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":45,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.963500Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:c17eb77dd58e0d13d037fcdbee01e3defc588c03b7b2686ac943c07aa4cd40a4","observation_id":"419d546f-6c67-4856-bde8-4ecfcaa05b44","resolution":{"observed_at":"2026-08-06T17:24:49.374515Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.361808Z","title":"Physics-informed deep neural networks for learning parameters and consti- tutive relationships in subsurface flow problems","venue":null,"work_id":"0f5379ef-2c85-4935-b135-3c8f1b154d15","year":2020},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":46,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.966653Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:e0b464d52c7fb0b599df43a10f2453fc3dae43f70540610246c6c9336e43e7a9","observation_id":"ec88485a-663c-44af-b7fc-3b9b36fd241c","resolution":{"observed_at":"2026-08-06T17:24:49.365203Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.351811Z","title":null,"venue":null,"work_id":"11281473-3b8f-4e2c-b7e8-3c14279679a6","year":null},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":47,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.969585Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:a9b9e2840a9795fd183d59b3bf1a78a1f8d956e5a17572cca6f66fbd2ac66689","observation_id":"9b65ab4d-b1f7-4a01-966e-4eabca5273bd","resolution":{"observed_at":"2026-08-06T17:24:49.355281Z","resolver_source":"raw_fallback","status":"unresolved"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.330931Z","title":"Understand- ing and mitigating gradient flow pathologies in physics- informed neural networks","venue":null,"work_id":"51ba6bc6-4905-4ada-b47e-ebf6f2615299","year":2021},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":48,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.975300Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:f52245cba0a9ae4ba1b85f5c99df31750eae826f93c4707089542322a2d71157","observation_id":"62c5cef7-d566-4d73-bc58-95782f5fa91f","resolution":{"observed_at":"2026-08-06T17:24:49.334861Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.318932Z","title":"L., and Sbalzarini, I","venue":null,"work_id":"72a8e339-74a9-4467-903f-28a74288a4f1","year":null},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":49,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.978649Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:94063b0c2447224e64f0a44d06b072f90d03582b40c87aa5c5475f29af095795","observation_id":"b9067ee8-78db-4e49-a785-9e3d13508c17","resolution":{"observed_at":"2026-08-06T17:24:49.322746Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.305142Z","title":"Self- adaptive physics-informed neural networks","venue":null,"work_id":"8bbf4ae8-87da-4005-8fd4-7750cb5a9dee","year":2023},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":50,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.984469Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:eb99bce220c504d31e3f9810638039dc3e9d5f8d416099136bc8f4a6a507f612","observation_id":"82c0c2ca-54ef-42ee-90e0-5838a5cdad8c","resolution":{"observed_at":"2026-08-06T17:24:49.308751Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.294882Z","title":"A dual-dimer method for training physics-constrained neural networks with minimax architecture","venue":null,"work_id":"05ffe87b-837e-4792-836b-3d0cc33af5da","year":2021},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":51,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.987571Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:4e7e8df83b50ca77c6b09a78b2270e855f2a6577a2e085130d71c125edc6bfaa","observation_id":"506e3bd2-ee9d-47b0-b1d7-a21c0c0df6c3","resolution":{"observed_at":"2026-08-06T17:24:49.298104Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.284277Z","title":"The distribution of points in a cube and the approximate evaluation of integrals","venue":null,"work_id":"a99ce16e-6dbd-429e-8feb-6cbedafed7e8","year":1967},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":52,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.991250Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:e2d7ba5c208de31a8669fe2663476dc49c400bbfbbe9246d14df0aba19a2c01d","observation_id":"9b79f49d-66f9-4dc9-9789-9d914d203f28","resolution":{"observed_at":"2026-08-06T17:24:49.288344Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.273518Z","title":"On the efficiency of certain quasi-random sequences of points in evaluating multi- dimensional integrals","venue":null,"work_id":"7668bb2e-8d85-4dc1-846c-2531f34cfc92","year":1960},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":53,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.994775Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:fbaee1a605093a05443269de918545c848960bfc4a64ac2d0ef3b968e4291194","observation_id":"af08178e-aa5c-4bf5-b667-ae84d72f421b","resolution":{"observed_at":"2026-08-06T17:24:49.277158Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.262110Z","title":"Monte carlo methods for solv- ing multivariable problems","venue":null,"work_id":"1306233d-82c6-40ff-a129-304c1ed6cf55","year":1960},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":54,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.998649Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:557c969edda88934bb8548206a8280c8ef1c709a8b23af07cececad38660d82f","observation_id":"9b8b0e72-2ae7-4ceb-9b1d-ff19bd6a32af","resolution":{"observed_at":"2026-08-06T17:24:49.266275Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.250250Z","title":"A comparison of three methods for selecting values of input variables in the analysis of output from a computer code","venue":null,"work_id":"9e459e1f-444a-45db-8fae-a3c2a9c68a50","year":2000},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":55,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:49.001766Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:7cd503322ce51e4dfa280150dda2947c75435510bb5ad86fc0e323ea79fbbdc9","observation_id":"9bdcaa2e-4777-4c3e-8b95-e456c0bdcf58","resolution":{"observed_at":"2026-08-06T17:24:49.254397Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.234199Z","title":"Not all sam- ples are created equal: Deep learning with importance sam- pling","venue":null,"work_id":"d81097f7-f0fb-482b-aff1-c68498ee9495","year":2018},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":56,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:49.005377Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:4f5fe265daa16640b1372fcc37d9ea908ca6fba643595b5806b39e94c7ff3c1f","observation_id":"4e3758eb-e8df-410f-8818-74a984c8712f","resolution":{"observed_at":"2026-08-06T17:24:49.239951Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":{"arxiv_id":"1511.06481","last_updated":"2016-04-16T19:40:08Z","snapshot_observed_at":"2026-08-04T02:15:07.648409Z","submitted_at":"2015-11-20T03:09:43Z","title":"Variance Reduction in SGD by Distributed Importance Sampling","version":7},"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":null,"pith_arxiv_id":"1511.06481","snapshot_observed_at":"2026-08-06T17:24:49.009550Z","title":"Variance reduction in sgd by distributed importance sampling","venue":null,"work_id":null,"year":2015},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":57,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:49.009550Z"},"links":{"cited_paper":"/paper/1511.06481","citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:40e5eebf9b76bf2664bf5d415efbbf7878a509f02dfa5d120c1bf84e7ee50842","observation_id":"fcaf447d-cab9-4937-8243-2c61a9cb2b51","resolution":{"observed_at":"2026-08-06T17:24:49.009550Z","resolver_source":null,"status":"unresolved"},"standing_notice":{"events":[],"reason":"canonical_work_link_unavailable","source_receipts":[],"state":"unavailable"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.219337Z","title":"Efficient training of physics-informed neural networks via importance sampling","venue":null,"work_id":"ae984e7b-488d-46cf-aa34-5e2d40587552","year":2021},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":58,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:49.013391Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:a45ff1cfcd5fcf23c27fd837d6d19450cfc2b2656df6b4ae2d1e55c8c7e7f6bf","observation_id":"7864032a-e17c-4945-be59-fc77e74e6bdf","resolution":{"observed_at":"2026-08-06T17:24:49.222750Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":{"arxiv_id":"1706.00043","last_updated":"2017-09-13T12:54:33Z","snapshot_observed_at":"2026-08-03T17:24:12.244410Z","submitted_at":"2017-05-31T18:25:09Z","title":"Biased Importance Sampling for Deep Neural Network Training","version":2},"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":null,"pith_arxiv_id":"1706.00043","snapshot_observed_at":"2026-08-06T17:24:49.016554Z","title":"Biased impor- tance sampling for deep neural network training","venue":null,"work_id":null,"year":2017},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":59,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:49.016554Z"},"links":{"cited_paper":"/paper/1706.00043","citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:d7e415cba8b1ae3aaed167693fc5e7b4246a911a38e5eb7383a771ec0e4e015b","observation_id":"eed1af24-47b0-49a5-9f62-acc5d94e844f","resolution":{"observed_at":"2026-08-06T17:24:49.016554Z","resolver_source":null,"status":"unresolved"},"standing_notice":{"events":[],"reason":"canonical_work_link_unavailable","source_receipts":[],"state":"unavailable"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.209058Z","title":"Das-pinns: A deep adaptive sampling method for solving high-dimensional partial differential equations","venue":null,"work_id":"d4a935af-708c-4019-a9d2-4104685f2cbe","year":2023},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":60,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:49.019952Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:27866bb8dcd307ef0ea8eb4c217ace2e2d97238161cbaffc571a65ca502b057c","observation_id":"a1a5b040-59ea-40ae-aacc-fc814100421a","resolution":{"observed_at":"2026-08-06T17:24:49.212731Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.199058Z","title":"Generative ad- versarial networks: An overview","venue":null,"work_id":"de7e18d3-97fd-497e-9360-e46784235961","year":2018},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":61,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:49.022978Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:bab763711dafc5f1bfed32281e958f7476d71cf9ef4751109c6f52fe193d65cb","observation_id":"c728ec5b-6a21-46de-b0bf-87fa8e391197","resolution":{"observed_at":"2026-08-06T17:24:49.202619Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":{"arxiv_id":"2312.12477","last_updated":"2024-06-18T02:19:31Z","snapshot_observed_at":"2026-07-06T17:05:31.586924Z","submitted_at":"2023-12-19T13:26:14Z","title":"When Graph Neural Network Meets Causality: Opportunities, Methodologies and An Outlook","version":3},"cited_work":{"arxiv_id":"2312.12477","doi":null,"metadata_source":"pith","pith_arxiv_id":"2312.12477","snapshot_observed_at":"2026-08-06T17:24:49.057660Z","title":"When Graph Neural Network Meets Causality: Opportunities, Methodologies and An Outlook","venue":"cs.LG","work_id":"bf105793-df1c-4cee-b27c-42a4b06dfe02","year":2023},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":62,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:49.026338Z"},"links":{"cited_paper":"/paper/2312.12477","citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:7ce1cb58c85526dfd4000ec660a2d4f8fa26917e67b4b9040ff131ea95e323b8","observation_id":"7573598d-070f-4ea3-abe6-a8e224e055e0","resolution":{"observed_at":"2026-08-06T17:24:49.063277Z","resolver_source":"local_arxiv","status":"verified_exact"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.812833Z","title":"Automatic control in microelectronics manufactur- ing: Practices, challenges, and possibilities","venue":null,"work_id":"d1eb8083-7f9d-4fab-a857-61271130cb4a","year":null},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":2000,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.762982Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:739ebc89ba8036958ee1db2f629aa2456332a8b14c29a8e43ef81c155a5c41ea","observation_id":"7c120bcb-88e3-47b2-ba34-57f16cf1df45","resolution":{"observed_at":"2026-08-06T17:24:49.817637Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.496130Z","title":"Microscopic modeling and optimal operation of plasma enhanced atomic layer deposition","venue":null,"work_id":"2b9fcc5d-8b0b-4cbf-85d0-7900ed463383","year":null},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":2020,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.915325Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:c0618e9cfd0c5898b7fe2a6137d4f24796948ab7137e7759a45bb987a4c6b94a","observation_id":"49385967-42e8-40ba-b0a2-eb50048cf58e","resolution":{"observed_at":"2026-08-06T17:24:49.500589Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.342220Z","title":"Physics-informed neural networks with hard con- straints for inverse design","venue":null,"work_id":"3b27cc67-7a11-4788-b78e-4e7416674d32","year":null},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":2021,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.972383Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:7fb83d3166d756e933f072aabfa06aef7094250642fb7eb74a12cc8e25361c16","observation_id":"f8c56610-0115-45c3-8b91-46ba7e2cdc64","resolution":{"observed_at":"2026-08-06T17:24:49.345570Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":"2301.00000","doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.173689Z","title":"Inverse dirichlet weighting enables reliable train- ing of physics-informed neural networks","venue":null,"work_id":"79ee340c-67c2-4fb3-9cc7-5823d78c70ba","year":null},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":2023,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.981436Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:72f574b2e582a5cf035d60826d984bf13118c845c096b1eca718226803fc95b9","observation_id":"2a691b75-85d2-4da8-9d27-2869cfb5263b","resolution":{"observed_at":"2026-08-06T17:24:49.179692Z","resolver_source":"raw_fallback","status":"verified_exact"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}},{"citation":{"cited_paper":null,"cited_work":{"arxiv_id":null,"doi":null,"metadata_source":"raw_reference","pith_arxiv_id":null,"snapshot_observed_at":"2026-08-06T17:24:49.535862Z","title":"Opinion mining by convolutional neural networks for maximizing discoverability of nanomaterials","venue":null,"work_id":"e328b930-7d6d-4d2d-97b1-3c2856ce1ab9","year":null},"citing_paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review","version":1},"reference_index":2024,"source":"pdf_text","source_observed_at":"2026-08-06T17:24:48.900751Z"},"links":{"citing_paper":"/paper/2507.10983"},"observation_digest":"sha256:6b42481f1a841d68fbba974498f86a726f628efdc4bbd78137e652df4db3e393","observation_id":"648a4136-a8c4-4073-8bd0-ee81614680fb","resolution":{"observed_at":"2026-08-06T17:24:49.539602Z","resolver_source":"raw_fallback","status":"verified_fuzzy"},"standing_notice":{"events":[],"observation":"No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.","reason":null,"source_receipts":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"state":"measured"}}],"paper":{"arxiv_id":"2507.10983","last_updated":"2025-07-15T04:56:26Z","latest_version":1,"primary_category":"cs.LG","snapshot_observed_at":"2026-08-06T18:43:17.563631Z","submitted_at":"2025-07-15T04:56:26Z","title":"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review"},"reference_resolution":{"displayed":66,"state_counts":{"malformed_identifier":0,"metadata_mismatch":0,"parse_uncertain":0,"unresolved":9,"verified_exact":2,"verified_fuzzy":55},"total_outbound_references":66},"refusal":"A citation records a reference. It does not transfer a finding from one paper to another.","schema":"pith.paper-citation-record.v1","standing_sources":[{"observed_at":"2026-08-10T06:31:04.303077+00:00","source":"crossref"},{"observed_at":"2026-08-10T06:30:57.382061+00:00","source":"retraction_watch"}],"thesis":"As of 10 August 2026, this Paper Citation Record lists 66 of 66 outbound references and 0 inbound Pith citation observations for arXiv:2507.10983."}