{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2026:2ESRA3EPX57PQXH5RTTSGD5P5L","short_pith_number":"pith:2ESRA3EP","canonical_record":{"source":{"id":"2608.09508","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2026-08-10T12:13:37Z","cross_cats_sorted":["cond-mat.mtrl-sci"],"title_canon_sha256":"ea9eb7f7b11687349516103b421120a8056efe59c99a4f285a8a8e8b9d9d6c26","abstract_canon_sha256":"7bf40ec6c4310754dd575c02f13d3cdf65f733645050d0e0af0ff663ff6ca7b3"},"schema_version":"1.0"},"canonical_sha256":"d125106c8fbf7ef85cfd8ce7230fafead1819ec28d8391cd1cf134377b2dde68","source":{"kind":"arxiv","id":"2608.09508","version":1},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2608.09508","created_at":"2026-08-11T02:24:21Z"},{"alias_kind":"arxiv_version","alias_value":"2608.09508v1","created_at":"2026-08-11T02:24:21Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2608.09508","created_at":"2026-08-11T02:24:21Z"},{"alias_kind":"pith_short_12","alias_value":"2ESRA3EPX57P","created_at":"2026-08-11T02:24:21Z"},{"alias_kind":"pith_short_16","alias_value":"2ESRA3EPX57PQXH5","created_at":"2026-08-11T02:24:21Z"},{"alias_kind":"pith_short_8","alias_value":"2ESRA3EP","created_at":"2026-08-11T02:24:21Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2026:2ESRA3EPX57PQXH5RTTSGD5P5L","target":"record","payload":{"canonical_record":{"source":{"id":"2608.09508","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2026-08-10T12:13:37Z","cross_cats_sorted":["cond-mat.mtrl-sci"],"title_canon_sha256":"ea9eb7f7b11687349516103b421120a8056efe59c99a4f285a8a8e8b9d9d6c26","abstract_canon_sha256":"7bf40ec6c4310754dd575c02f13d3cdf65f733645050d0e0af0ff663ff6ca7b3"},"schema_version":"1.0"},"canonical_sha256":"d125106c8fbf7ef85cfd8ce7230fafead1819ec28d8391cd1cf134377b2dde68","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-08-11T02:24:21.966560Z","signature_b64":"UxhJPEH3ciOi/0BeKN/MozDLqOsvV3LsK8upzUXEE4N/wvsvi3jRi7yl089yJ5sziEr2ifCXqccVRnSYZDYsBA==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"d125106c8fbf7ef85cfd8ce7230fafead1819ec28d8391cd1cf134377b2dde68","last_reissued_at":"2026-08-11T02:24:21.965000Z","signature_status":"signed_v1","first_computed_at":"2026-08-11T02:24:21.965000Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"2608.09508","source_version":1,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-08-11T02:24:21Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"dXgZiy1UowpqUq9wj1fTHTVocG0YS95YQ4GVefOeHnRweL9ADNjoIzSjE9O9wPWJY3z+1aTZkUK3h2DXWqxiBQ==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-14T23:19:49.828091Z"},"content_sha256":"564114190435410ea27472e6f85a61090fd001caee66f890a93d5a9140598d7b","schema_version":"1.0","event_id":"sha256:564114190435410ea27472e6f85a61090fd001caee66f890a93d5a9140598d7b"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2026:2ESRA3EPX57PQXH5RTTSGD5P5L","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"200 mm Wafer-Scale Monolithic 3D Integration of Atomic Layer-Deposited Oxide Semiconductors","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cond-mat.mtrl-sci"],"primary_cat":"physics.app-ph","authors_text":"Chang Liu, Chang Niu, Haitong Li, Haiyan Wang, Jian-Yu Lin, Juanjuan Lu, Kisoo Nam, Linjia Long, Luqi Zheng, Peide D. Ye, Shuting Du, Zehao Lin","submitted_at":"2026-08-10T12:13:37Z","abstract_excerpt":"Monolithic 3D (M3D) integration offers a pathway to overcome the scaling limits of conventional silicon complementary metal-oxide-semiconductor (CMOS) technology by extending dense vertical stacking of multifunctional logic and memory devices. Here, we demonstrate wafer-scale M3D integration of three tiers of atomic-layer-deposited (ALD) indium oxide (InOx)-based devices (>100,000 fabricated), including ferroelectric, enhancement-mode, and depletion-mode field-effect transistors, on 200 mm silicon wafers. We achieve threshold voltage standard deviation as low as 0.04 V, average electron mobili"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2608.09508","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2608.09508/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-08-11T02:24:21Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"7Ag1Wg24rvo9V3BIAylHd9K/t5+G6eLEok6szYxk2/KQDZe/i1GmWoLFPG24pWSHKtdlVo/osuQBss8275yXCA==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-14T23:19:49.828394Z"},"content_sha256":"a291f12a151143adde9692c9ed576f8525ef1b11a59e3dfd37aa05ec46e3597b","schema_version":"1.0","event_id":"sha256:a291f12a151143adde9692c9ed576f8525ef1b11a59e3dfd37aa05ec46e3597b"},{"event_type":"integrity_finding","subject_pith_number":"pith:2026:2ESRA3EPX57PQXH5RTTSGD5P5L","target":"integrity","payload":{"note":"DOI in the printed bibliography is fragmented by whitespace or line breaks. A longer candidate (10.21203/rs.3.rs-5138544/v1) was visible in the surrounding text but could not be confirmed against doi.org as printed.","snippet":"Gong, X. et al. Reconfigurable 3D stacked oxide semiconductor devices for hybrid in-memory computing. Preprint at https://doi.org/10.21203/rs.3.rs -5138544/v1 (2024)","arxiv_id":"2608.09508","detector":"doi_compliance","evidence":{"ref_index":19,"verdict_class":"incontrovertible","resolved_title":null,"printed_excerpt":"10.21203/rs.3.rs","reconstructed_doi":"10.21203/rs.3.rs-5138544/v1"},"severity":"advisory","ref_index":19,"audited_at":"2026-08-11T16:18:24.278398Z","event_type":"pith.integrity.v1","detected_doi":"10.21203/rs.3.rs-5138544/v1","detector_url":"https://pith.science/pith-integrity-protocol#doi_compliance","external_url":null,"finding_type":"recoverable_identifier","evidence_hash":"e5dca1900770ba48715b524d02876ae5a5d4e8684fddef8ab8b978fe521442de","paper_version":1,"verdict_class":"incontrovertible","resolved_title":null,"detector_version":"1.1.0","detected_arxiv_id":null,"integrity_event_id":19035,"payload_sha256":"68f9c577dd1e738a3fa0568cdab883b79754b2e419b50b3bab7df97d2d95fb0e","signature_b64":"BwdP+Q1hdqe6iSQ6rebkoYsmxmOY9vv/7GaztLy2BhiC1AtVetCAs2K1KQVIYZYF1jh4hKQrnlGtIO1rcIAsCA==","signing_key_id":"pith-v1-2026-05"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-08-11T16:18:37Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"xrzYCk2yMem1DzY0/Wa6ivpx2XUwjulKiPXyV2knEnSUKdq73estlB/IZ9uqR7hjSThP7nr/664jdMpVY0B+AA==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-14T23:19:49.830621Z"},"content_sha256":"277852b896d21d14dd0a286d760c527d9ea00caa8f9224dfd80c5bf1a3d34c98","schema_version":"1.0","event_id":"sha256:277852b896d21d14dd0a286d760c527d9ea00caa8f9224dfd80c5bf1a3d34c98"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/2ESRA3EPX57PQXH5RTTSGD5P5L/bundle.json","state_url":"https://pith.science/pith/2ESRA3EPX57PQXH5RTTSGD5P5L/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/2ESRA3EPX57PQXH5RTTSGD5P5L/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-08-14T23:19:49Z","links":{"resolver":"https://pith.science/pith/2ESRA3EPX57PQXH5RTTSGD5P5L","bundle":"https://pith.science/pith/2ESRA3EPX57PQXH5RTTSGD5P5L/bundle.json","state":"https://pith.science/pith/2ESRA3EPX57PQXH5RTTSGD5P5L/state.json","well_known_bundle":"https://pith.science/.well-known/pith/2ESRA3EPX57PQXH5RTTSGD5P5L/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2026:2ESRA3EPX57PQXH5RTTSGD5P5L","merge_version":"pith-open-graph-merge-v1","event_count":3,"valid_event_count":3,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"7bf40ec6c4310754dd575c02f13d3cdf65f733645050d0e0af0ff663ff6ca7b3","cross_cats_sorted":["cond-mat.mtrl-sci"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2026-08-10T12:13:37Z","title_canon_sha256":"ea9eb7f7b11687349516103b421120a8056efe59c99a4f285a8a8e8b9d9d6c26"},"schema_version":"1.0","source":{"id":"2608.09508","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2608.09508","created_at":"2026-08-11T02:24:21Z"},{"alias_kind":"arxiv_version","alias_value":"2608.09508v1","created_at":"2026-08-11T02:24:21Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2608.09508","created_at":"2026-08-11T02:24:21Z"},{"alias_kind":"pith_short_12","alias_value":"2ESRA3EPX57P","created_at":"2026-08-11T02:24:21Z"},{"alias_kind":"pith_short_16","alias_value":"2ESRA3EPX57PQXH5","created_at":"2026-08-11T02:24:21Z"},{"alias_kind":"pith_short_8","alias_value":"2ESRA3EP","created_at":"2026-08-11T02:24:21Z"}],"graph_snapshots":[{"event_id":"sha256:a291f12a151143adde9692c9ed576f8525ef1b11a59e3dfd37aa05ec46e3597b","target":"graph","created_at":"2026-08-11T02:24:21Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"integrity":{"available":true,"clean":true,"detectors_run":[],"endpoint":"/pith/2608.09508/integrity.json","findings":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938","summary":{"advisory":0,"by_detector":{},"critical":0,"informational":0}},"paper":{"abstract_excerpt":"Monolithic 3D (M3D) integration offers a pathway to overcome the scaling limits of conventional silicon complementary metal-oxide-semiconductor (CMOS) technology by extending dense vertical stacking of multifunctional logic and memory devices. Here, we demonstrate wafer-scale M3D integration of three tiers of atomic-layer-deposited (ALD) indium oxide (InOx)-based devices (>100,000 fabricated), including ferroelectric, enhancement-mode, and depletion-mode field-effect transistors, on 200 mm silicon wafers. We achieve threshold voltage standard deviation as low as 0.04 V, average electron mobili","authors_text":"Chang Liu, Chang Niu, Haitong Li, Haiyan Wang, Jian-Yu Lin, Juanjuan Lu, Kisoo Nam, Linjia Long, Luqi Zheng, Peide D. Ye, Shuting Du, Zehao Lin","cross_cats":["cond-mat.mtrl-sci"],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2026-08-10T12:13:37Z","title":"200 mm Wafer-Scale Monolithic 3D Integration of Atomic Layer-Deposited Oxide Semiconductors"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2608.09508","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:564114190435410ea27472e6f85a61090fd001caee66f890a93d5a9140598d7b","target":"record","created_at":"2026-08-11T02:24:21Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"7bf40ec6c4310754dd575c02f13d3cdf65f733645050d0e0af0ff663ff6ca7b3","cross_cats_sorted":["cond-mat.mtrl-sci"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2026-08-10T12:13:37Z","title_canon_sha256":"ea9eb7f7b11687349516103b421120a8056efe59c99a4f285a8a8e8b9d9d6c26"},"schema_version":"1.0","source":{"id":"2608.09508","kind":"arxiv","version":1}},"canonical_sha256":"d125106c8fbf7ef85cfd8ce7230fafead1819ec28d8391cd1cf134377b2dde68","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"d125106c8fbf7ef85cfd8ce7230fafead1819ec28d8391cd1cf134377b2dde68","first_computed_at":"2026-08-11T02:24:21.965000Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-08-11T02:24:21.965000Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"UxhJPEH3ciOi/0BeKN/MozDLqOsvV3LsK8upzUXEE4N/wvsvi3jRi7yl089yJ5sziEr2ifCXqccVRnSYZDYsBA==","signature_status":"signed_v1","signed_at":"2026-08-11T02:24:21.966560Z","signed_message":"canonical_sha256_bytes"},"source_id":"2608.09508","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:564114190435410ea27472e6f85a61090fd001caee66f890a93d5a9140598d7b","sha256:a291f12a151143adde9692c9ed576f8525ef1b11a59e3dfd37aa05ec46e3597b","sha256:277852b896d21d14dd0a286d760c527d9ea00caa8f9224dfd80c5bf1a3d34c98"],"state_sha256":"736647627aea4c19205ff0ac1240566aebda85327ddf5cce2d1c5c228f8d5209"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"LMgMs87+af9oA7TeuH3sfj1XoddtZcMVHGfg4DqyEj+MOPg8/zxVrxbwDjw/hixyRaJbWn83sKftoicNwXjWBA==","signed_message":"bundle_sha256_bytes","signed_at":"2026-08-14T23:19:49.831848Z","bundle_sha256":"7bb15d5e20aa035f34e5e243397f884947cf75bcd4074b83b690fad8497ab1ad"}}