{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2011:2GYSAT55QVPLV5XETGGMVLCFFO","short_pith_number":"pith:2GYSAT55","schema_version":"1.0","canonical_sha256":"d1b1204fbd855ebaf6e4998ccaac452bb1d5453595328d7c009de1b15ccd8441","source":{"kind":"arxiv","id":"1106.4289","version":1},"attestation_state":"computed","paper":{"title":"Process Optimization and Downscaling of a Single Electron Single Dot Memory","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cs.ET"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Christophe Krzeminski (IEMN), Emmanuel Dubois (IEMN), Nicolas Reckinger (DICE - MLG), Vincent Bayot (DICE - MLG), Xiaohui Tang (DICE - MLG)","submitted_at":"2011-06-21T19:00:44Z","abstract_excerpt":"This paper presents the process optimization of a single-electron nanoflash electron memory. Self-aligned single dot memory structures have been fabricated using a wet anisotropic oxidation of a silicon nanowire. One of the main issue was to clarify the process conditions for the dot formation. Based on the process modeling, the influence of various parameters (oxidation temperature, nanowire shape) has been investigated. The necessity of a sharp compromise between these different parameters to ensure the presence of the memory dot has been established. In order to propose an aggressive memory"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"1106.4289","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2011-06-21T19:00:44Z","cross_cats_sorted":["cs.ET"],"title_canon_sha256":"f90ccc5656565ffc54fc567f4105aa5f5ca072c8e5223129bb43e1a04fee639f","abstract_canon_sha256":"c2677fd5035d82700243e232e00ef3c0135048da674e27c2fecc2967d45e57fd"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T04:19:33.763100Z","signature_b64":"E18eMtbCWJuYVMXyz+OkrvcEqOuyX3np84K2jYcsYTzMWVindp/i75KIKExYSl+MMw+888DOvX6T47pb8HlKAg==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"d1b1204fbd855ebaf6e4998ccaac452bb1d5453595328d7c009de1b15ccd8441","last_reissued_at":"2026-05-18T04:19:33.762535Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T04:19:33.762535Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Process Optimization and Downscaling of a Single Electron Single Dot Memory","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cs.ET"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Christophe Krzeminski (IEMN), Emmanuel Dubois (IEMN), Nicolas Reckinger (DICE - MLG), Vincent Bayot (DICE - MLG), Xiaohui Tang (DICE - MLG)","submitted_at":"2011-06-21T19:00:44Z","abstract_excerpt":"This paper presents the process optimization of a single-electron nanoflash electron memory. Self-aligned single dot memory structures have been fabricated using a wet anisotropic oxidation of a silicon nanowire. One of the main issue was to clarify the process conditions for the dot formation. Based on the process modeling, the influence of various parameters (oxidation temperature, nanowire shape) has been investigated. The necessity of a sharp compromise between these different parameters to ensure the presence of the memory dot has been established. In order to propose an aggressive memory"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1106.4289","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"1106.4289","created_at":"2026-05-18T04:19:33.762619+00:00"},{"alias_kind":"arxiv_version","alias_value":"1106.4289v1","created_at":"2026-05-18T04:19:33.762619+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1106.4289","created_at":"2026-05-18T04:19:33.762619+00:00"},{"alias_kind":"pith_short_12","alias_value":"2GYSAT55QVPL","created_at":"2026-05-18T12:26:18.847500+00:00"},{"alias_kind":"pith_short_16","alias_value":"2GYSAT55QVPLV5XE","created_at":"2026-05-18T12:26:18.847500+00:00"},{"alias_kind":"pith_short_8","alias_value":"2GYSAT55","created_at":"2026-05-18T12:26:18.847500+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/2GYSAT55QVPLV5XETGGMVLCFFO","json":"https://pith.science/pith/2GYSAT55QVPLV5XETGGMVLCFFO.json","graph_json":"https://pith.science/api/pith-number/2GYSAT55QVPLV5XETGGMVLCFFO/graph.json","events_json":"https://pith.science/api/pith-number/2GYSAT55QVPLV5XETGGMVLCFFO/events.json","paper":"https://pith.science/paper/2GYSAT55"},"agent_actions":{"view_html":"https://pith.science/pith/2GYSAT55QVPLV5XETGGMVLCFFO","download_json":"https://pith.science/pith/2GYSAT55QVPLV5XETGGMVLCFFO.json","view_paper":"https://pith.science/paper/2GYSAT55","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=1106.4289&json=true","fetch_graph":"https://pith.science/api/pith-number/2GYSAT55QVPLV5XETGGMVLCFFO/graph.json","fetch_events":"https://pith.science/api/pith-number/2GYSAT55QVPLV5XETGGMVLCFFO/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/2GYSAT55QVPLV5XETGGMVLCFFO/action/timestamp_anchor","attest_storage":"https://pith.science/pith/2GYSAT55QVPLV5XETGGMVLCFFO/action/storage_attestation","attest_author":"https://pith.science/pith/2GYSAT55QVPLV5XETGGMVLCFFO/action/author_attestation","sign_citation":"https://pith.science/pith/2GYSAT55QVPLV5XETGGMVLCFFO/action/citation_signature","submit_replication":"https://pith.science/pith/2GYSAT55QVPLV5XETGGMVLCFFO/action/replication_record"}},"created_at":"2026-05-18T04:19:33.762619+00:00","updated_at":"2026-05-18T04:19:33.762619+00:00"}