{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2024:5WCXOIGRZFB4WYVMQ4XCPEPUAH","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"fec324990494096f8ff0bbe8e6f454b786c1fb85fcdd06756a1702448c3248b7","cross_cats_sorted":["cond-mat.mtrl-sci"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.supr-con","submitted_at":"2024-08-10T19:43:56Z","title_canon_sha256":"a77849557b9a53ae8efc0fb9c30f314eb2293322e7dbd999562ccd08faf5b2ff"},"schema_version":"1.0","source":{"id":"2408.05621","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2408.05621","created_at":"2026-07-05T08:54:22Z"},{"alias_kind":"arxiv_version","alias_value":"2408.05621v1","created_at":"2026-07-05T08:54:22Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2408.05621","created_at":"2026-07-05T08:54:22Z"},{"alias_kind":"pith_short_12","alias_value":"5WCXOIGRZFB4","created_at":"2026-07-05T08:54:22Z"},{"alias_kind":"pith_short_16","alias_value":"5WCXOIGRZFB4WYVM","created_at":"2026-07-05T08:54:22Z"},{"alias_kind":"pith_short_8","alias_value":"5WCXOIGR","created_at":"2026-07-05T08:54:22Z"}],"graph_snapshots":[{"event_id":"sha256:dcdffe75248f86ce1832beae6cdd0e3d0f753d25a594146ac27f212d5668fcd9","target":"graph","created_at":"2026-07-05T08:54:22Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"integrity":{"available":true,"clean":true,"detectors_run":[],"endpoint":"/pith/2408.05621/integrity.json","findings":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938","summary":{"advisory":0,"by_detector":{},"critical":0,"informational":0}},"paper":{"abstract_excerpt":"We report a milestone in achieving large-scale, ultrathin (~5 nm) superconducting NbN thin films on 300 mm Si wafers using a high-volume manufacturing (HVM) industrial physical vapor deposition (PVD) system. The NbN thin films possess remarkable structural uniformity and consistently high superconducting quality across the entire 300 mm Si wafer, by incorporating an AlN buffer layer. High-resolution X-ray diffraction and transmission electron microscopy analyses unveiled enhanced crystallinity of (111)-oriented {\\delta}-phase NbN with the AlN buffer layer. Notably, NbN films deposited on AlN-b","authors_text":"Di Zhang, Haiyan Wang, Hao Zeng, Mingwei Zhu, Nag Patibandla, Nicholas Cucciniello, Ping Lu, Pinku Roy, Quanxi Jia, Samyak Dhole, Xiucheng Wei, Zhebo Chen, Zihao Yang","cross_cats":["cond-mat.mtrl-sci"],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.supr-con","submitted_at":"2024-08-10T19:43:56Z","title":"CMOS-Compatible Ultrathin Superconducting NbN Thin Films Deposited by Reactive Ion Sputtering on 300 mm Si Wafer"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2408.05621","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:0e57db00f15951b1a472cfe4018b69b08f3d68c90df91b15e098737a42a17672","target":"record","created_at":"2026-07-05T08:54:22Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"fec324990494096f8ff0bbe8e6f454b786c1fb85fcdd06756a1702448c3248b7","cross_cats_sorted":["cond-mat.mtrl-sci"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.supr-con","submitted_at":"2024-08-10T19:43:56Z","title_canon_sha256":"a77849557b9a53ae8efc0fb9c30f314eb2293322e7dbd999562ccd08faf5b2ff"},"schema_version":"1.0","source":{"id":"2408.05621","kind":"arxiv","version":1}},"canonical_sha256":"ed857720d1c943cb62ac872e2791f401e75ace4ad22b42bf46c338069a1140d8","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"ed857720d1c943cb62ac872e2791f401e75ace4ad22b42bf46c338069a1140d8","first_computed_at":"2026-07-05T08:54:22.846194Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-07-05T08:54:22.846194Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"pE/iv6JUcJqZ6IETcdNN3CdOss+4o8+0vYlLZikE2A1+cjiWpPDgTUndtqGCTUQHNPaUIXkLcQNTShoierprAg==","signature_status":"signed_v1","signed_at":"2026-07-05T08:54:22.846642Z","signed_message":"canonical_sha256_bytes"},"source_id":"2408.05621","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:0e57db00f15951b1a472cfe4018b69b08f3d68c90df91b15e098737a42a17672","sha256:dcdffe75248f86ce1832beae6cdd0e3d0f753d25a594146ac27f212d5668fcd9"],"state_sha256":"5a3c7f93c950cedbb677d2c8b7a0586ca642151b050d26c19e64fd103940edf0"}