{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2026:7FHLOOCJN2VV2PFCYU3USB2R4K","short_pith_number":"pith:7FHLOOCJ","schema_version":"1.0","canonical_sha256":"f94eb738496eab5d3ca2c537490751e2b0126342308975ca93393200b986091a","source":{"kind":"arxiv","id":"2606.04625","version":1},"attestation_state":"computed","paper":{"title":"Low Distortion Fusion Bonding using Pneumatically Warped Wafers","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.app-ph","authors_text":"Damien Leech, Dennis Bumuller, Eric Beyne, Koen D'have, Koen Kennes, Philippe Muller, Philipp Schmidt, Serena Iacovo, Steven Brems, Thomas Schmidt, Utkarsh Jain","submitted_at":"2026-06-03T08:59:36Z","abstract_excerpt":"Backside power-delivery-network (BSPDN) schemes require wafer-to-wafer bonding steps that do not leave high order shape changes or localized stresses in the bonded stack to ensure that these don't get transferred to the thinned wafer for further lithographic exposure. However, bonding mechanics involve strong adhesive forces which can inherently create localized distortions that lithography tools must eventually compensate. Some contributors to grid distortion of the target wafer are, method of bond initiation, bond front velocity variations, and lack of symmetry between the wafers. In this wo"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"2606.04625","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2026-06-03T08:59:36Z","cross_cats_sorted":[],"title_canon_sha256":"702b5801b5cc41862dc8971035f915cae6d6dc15488876a53f466cee59f4ba20","abstract_canon_sha256":"bce5bc579cb7cf24752366c08b27725d24d02202f8b52320f8fce37b1045884a"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-06-04T01:09:22.013214Z","signature_b64":"PDMsVFOr+yvzFifuGRJxfDYh8OUfaaeoJWfdcW+bm1ZCMkd+N3S47zWAmWRAN6NsmTujEfHk8wVzfOh/wBM7Dg==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"f94eb738496eab5d3ca2c537490751e2b0126342308975ca93393200b986091a","last_reissued_at":"2026-06-04T01:09:22.012653Z","signature_status":"signed_v1","first_computed_at":"2026-06-04T01:09:22.012653Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Low Distortion Fusion Bonding using Pneumatically Warped Wafers","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.app-ph","authors_text":"Damien Leech, Dennis Bumuller, Eric Beyne, Koen D'have, Koen Kennes, Philippe Muller, Philipp Schmidt, Serena Iacovo, Steven Brems, Thomas Schmidt, Utkarsh Jain","submitted_at":"2026-06-03T08:59:36Z","abstract_excerpt":"Backside power-delivery-network (BSPDN) schemes require wafer-to-wafer bonding steps that do not leave high order shape changes or localized stresses in the bonded stack to ensure that these don't get transferred to the thinned wafer for further lithographic exposure. However, bonding mechanics involve strong adhesive forces which can inherently create localized distortions that lithography tools must eventually compensate. Some contributors to grid distortion of the target wafer are, method of bond initiation, bond front velocity variations, and lack of symmetry between the wafers. In this wo"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2606.04625","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2606.04625/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"2606.04625","created_at":"2026-06-04T01:09:22.012730+00:00"},{"alias_kind":"arxiv_version","alias_value":"2606.04625v1","created_at":"2026-06-04T01:09:22.012730+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2606.04625","created_at":"2026-06-04T01:09:22.012730+00:00"},{"alias_kind":"pith_short_12","alias_value":"7FHLOOCJN2VV","created_at":"2026-06-04T01:09:22.012730+00:00"},{"alias_kind":"pith_short_16","alias_value":"7FHLOOCJN2VV2PFC","created_at":"2026-06-04T01:09:22.012730+00:00"},{"alias_kind":"pith_short_8","alias_value":"7FHLOOCJ","created_at":"2026-06-04T01:09:22.012730+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/7FHLOOCJN2VV2PFCYU3USB2R4K","json":"https://pith.science/pith/7FHLOOCJN2VV2PFCYU3USB2R4K.json","graph_json":"https://pith.science/api/pith-number/7FHLOOCJN2VV2PFCYU3USB2R4K/graph.json","events_json":"https://pith.science/api/pith-number/7FHLOOCJN2VV2PFCYU3USB2R4K/events.json","paper":"https://pith.science/paper/7FHLOOCJ"},"agent_actions":{"view_html":"https://pith.science/pith/7FHLOOCJN2VV2PFCYU3USB2R4K","download_json":"https://pith.science/pith/7FHLOOCJN2VV2PFCYU3USB2R4K.json","view_paper":"https://pith.science/paper/7FHLOOCJ","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=2606.04625&json=true","fetch_graph":"https://pith.science/api/pith-number/7FHLOOCJN2VV2PFCYU3USB2R4K/graph.json","fetch_events":"https://pith.science/api/pith-number/7FHLOOCJN2VV2PFCYU3USB2R4K/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/7FHLOOCJN2VV2PFCYU3USB2R4K/action/timestamp_anchor","attest_storage":"https://pith.science/pith/7FHLOOCJN2VV2PFCYU3USB2R4K/action/storage_attestation","attest_author":"https://pith.science/pith/7FHLOOCJN2VV2PFCYU3USB2R4K/action/author_attestation","sign_citation":"https://pith.science/pith/7FHLOOCJN2VV2PFCYU3USB2R4K/action/citation_signature","submit_replication":"https://pith.science/pith/7FHLOOCJN2VV2PFCYU3USB2R4K/action/replication_record"}},"created_at":"2026-06-04T01:09:22.012730+00:00","updated_at":"2026-06-04T01:09:22.012730+00:00"}