{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2025:MQSSGJAKDESFZEDSA2OQ5QY54L","short_pith_number":"pith:MQSSGJAK","schema_version":"1.0","canonical_sha256":"642523240a19245c9072069d0ec31de2e74f0ef0a1c39b9fb597a92e3f8e25d9","source":{"kind":"arxiv","id":"2509.03664","version":1},"attestation_state":"computed","paper":{"title":"Pressure dependence of magnetron sputtering: 2D-RZ particle-in-cell and 1D fluid modeling","license":"http://creativecommons.org/licenses/by-nc-sa/4.0/","headline":"","cross_cats":[],"primary_cat":"physics.plasm-ph","authors_text":"2) ((1) University of Colorado Boulder, (2) Silvaco Inc.), Daniel Main (2), Gregory R. Werner (1), John R. Cary (1, Joseph G. Theis (1), Thomas G. Jenkins (2)","submitted_at":"2025-09-03T19:28:35Z","abstract_excerpt":"We reproduce the consistently-seen experimental voltage versus pressure (V-P) dependence of DC magnetron sputtering (DCMS) with 2D-RZ particle-in-cell (PIC) simulation. Informed by PIC simulation, we develop a steady-state, 1D-axial fluid model of the sheath and presheath that also reproduces this V-P dependence. The V-P dependence is the relationship between the steady-state voltage needed to maintain a constant discharge current and the neutral gas pressure. V-P dependence is fundamental to device performance, but has not previously been reproduced with simulation or satisfactorily explained"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"2509.03664","kind":"arxiv","version":1},"metadata":{"license":"http://creativecommons.org/licenses/by-nc-sa/4.0/","primary_cat":"physics.plasm-ph","submitted_at":"2025-09-03T19:28:35Z","cross_cats_sorted":[],"title_canon_sha256":"5a4b5e47c9da120f3436b9eec514bc3716eed4935e78b1fce4c1e549ea435d1b","abstract_canon_sha256":"8c06eacc29720950e35557e3dabc3837fca9564c157771e94906dac7d7abba88"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-22T02:04:36.797832Z","signature_b64":"YH/n5zh123kygJVzGWXC53AlYiEWR4CR/TPgbxYuJegcOCyaAm5Vi75TpyXGowEGajSicvIQn1cIjM7Ket33Bg==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"642523240a19245c9072069d0ec31de2e74f0ef0a1c39b9fb597a92e3f8e25d9","last_reissued_at":"2026-05-22T02:04:36.796822Z","signature_status":"signed_v1","first_computed_at":"2026-05-22T02:04:36.796822Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Pressure dependence of magnetron sputtering: 2D-RZ particle-in-cell and 1D fluid modeling","license":"http://creativecommons.org/licenses/by-nc-sa/4.0/","headline":"","cross_cats":[],"primary_cat":"physics.plasm-ph","authors_text":"2) ((1) University of Colorado Boulder, (2) Silvaco Inc.), Daniel Main (2), Gregory R. Werner (1), John R. Cary (1, Joseph G. Theis (1), Thomas G. Jenkins (2)","submitted_at":"2025-09-03T19:28:35Z","abstract_excerpt":"We reproduce the consistently-seen experimental voltage versus pressure (V-P) dependence of DC magnetron sputtering (DCMS) with 2D-RZ particle-in-cell (PIC) simulation. Informed by PIC simulation, we develop a steady-state, 1D-axial fluid model of the sheath and presheath that also reproduces this V-P dependence. The V-P dependence is the relationship between the steady-state voltage needed to maintain a constant discharge current and the neutral gas pressure. V-P dependence is fundamental to device performance, but has not previously been reproduced with simulation or satisfactorily explained"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2509.03664","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2509.03664/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"2509.03664","created_at":"2026-05-22T02:04:36.796977+00:00"},{"alias_kind":"arxiv_version","alias_value":"2509.03664v1","created_at":"2026-05-22T02:04:36.796977+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2509.03664","created_at":"2026-05-22T02:04:36.796977+00:00"},{"alias_kind":"pith_short_12","alias_value":"MQSSGJAKDESF","created_at":"2026-05-22T02:04:36.796977+00:00"},{"alias_kind":"pith_short_16","alias_value":"MQSSGJAKDESFZEDS","created_at":"2026-05-22T02:04:36.796977+00:00"},{"alias_kind":"pith_short_8","alias_value":"MQSSGJAK","created_at":"2026-05-22T02:04:36.796977+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/MQSSGJAKDESFZEDSA2OQ5QY54L","json":"https://pith.science/pith/MQSSGJAKDESFZEDSA2OQ5QY54L.json","graph_json":"https://pith.science/api/pith-number/MQSSGJAKDESFZEDSA2OQ5QY54L/graph.json","events_json":"https://pith.science/api/pith-number/MQSSGJAKDESFZEDSA2OQ5QY54L/events.json","paper":"https://pith.science/paper/MQSSGJAK"},"agent_actions":{"view_html":"https://pith.science/pith/MQSSGJAKDESFZEDSA2OQ5QY54L","download_json":"https://pith.science/pith/MQSSGJAKDESFZEDSA2OQ5QY54L.json","view_paper":"https://pith.science/paper/MQSSGJAK","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=2509.03664&json=true","fetch_graph":"https://pith.science/api/pith-number/MQSSGJAKDESFZEDSA2OQ5QY54L/graph.json","fetch_events":"https://pith.science/api/pith-number/MQSSGJAKDESFZEDSA2OQ5QY54L/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/MQSSGJAKDESFZEDSA2OQ5QY54L/action/timestamp_anchor","attest_storage":"https://pith.science/pith/MQSSGJAKDESFZEDSA2OQ5QY54L/action/storage_attestation","attest_author":"https://pith.science/pith/MQSSGJAKDESFZEDSA2OQ5QY54L/action/author_attestation","sign_citation":"https://pith.science/pith/MQSSGJAKDESFZEDSA2OQ5QY54L/action/citation_signature","submit_replication":"https://pith.science/pith/MQSSGJAKDESFZEDSA2OQ5QY54L/action/replication_record"}},"created_at":"2026-05-22T02:04:36.796977+00:00","updated_at":"2026-05-22T02:04:36.796977+00:00"}