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The combined first order spin-density wave/structural transition occurs in the parent CaFe2As2 compound at 168 K and gradually shifts to lower temperature for low doping levels (x = 0.032 and x = 0.051). It is completely suppressed upon higher doping x = 0.056. Simultaneously, superconductivity appears at lower temperature with a transition temperature around Tc = 14.1 K for Ca(Fe0.937Co0.063)2As2. 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