Thermal reconstruction of sapphire substrates via CO2 laser annealing enables growth of more crystalline TiN films for superconducting resonators without chemical cleaning, achieving similar device performance.
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NbTiN spiral inductors show predominantly inductive resonance shifts under elevated temperature and near-tesla fields, with design metrics linking track width and kinetic-inductance fraction to stability and field robustness.
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Thermal reconstruction as a method of substrate preparation for highly crystalline superconducting TiN resonators
Thermal reconstruction of sapphire substrates via CO2 laser annealing enables growth of more crystalline TiN films for superconducting resonators without chemical cleaning, achieving similar device performance.
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Superconducting Spiral Inductors for RF Reflectometry: Operation at Elevated Temperatures and Magnetic Fields
NbTiN spiral inductors show predominantly inductive resonance shifts under elevated temperature and near-tesla fields, with design metrics linking track width and kinetic-inductance fraction to stability and field robustness.