A bibliometric scoping review finds a structural disconnect between AI-driven semiconductor process optimization and ESG/sustainability governance, and proposes a six-layer SSbD architecture to bridge it.
A multimodal hier archical learning approach for virtual metrology in semiconductor man ufacturing,
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Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD)
A bibliometric scoping review finds a structural disconnect between AI-driven semiconductor process optimization and ESG/sustainability governance, and proposes a six-layer SSbD architecture to bridge it.