CVD-grown Er:Y2O3 films show substrate-dependent texture, including epitaxy on YSZ and 99% (111) texture on an MBE oxide/Si template, with telecom inhomogeneous linewidths of 9 to 14 GHz.
We observed that the substrate’s choice influenced the morphology and texture of the films
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Erbium doped yttrium oxide thin films grown by chemical vapour deposition for quantum technologies
CVD-grown Er:Y2O3 films show substrate-dependent texture, including epitaxy on YSZ and 99% (111) texture on an MBE oxide/Si template, with telecom inhomogeneous linewidths of 9 to 14 GHz.