Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond | Paper Citation Record

Observation 8622e906-8b0b-48c4-a999-8daf5d443ac4 · outbound

This paper cites GPT-4 Technical Report.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond GPT-4 Technical Report

Reference 1

Resolution: unresolved; no resolver link, observed 2026-08-07T15:12:21.457968Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

Observation 06de222c-5eeb-4b11-bdfe-777b79418b75 · outbound

This paper cites The Surprising Effectiveness of Test-Time Training for Few-Shot Learning.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond The Surprising Effectiveness of Test-Time Training for Few-Shot Learning

Reference 2

Resolution: unresolved; no resolver link, observed 2026-08-07T15:12:21.572709Z

Source-reported events for the cited work

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Observation cec1c1ce-e197-449c-9844-adbc8e57f70c · outbound

This paper cites Analyzing inverse problems with invertible neural networks.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Analyzing inverse problems with invertible neural networks

Reference 3

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:34.826781Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 44c19e1f-ddde-4105-884d-0850e55853f3 · outbound

This paper cites Mt3: Meta test- time training for self-supervised test-time adaption.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Mt3: Meta test- time training for self-supervised test-time adaption

Reference 4

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:34.635210Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation d4f817fa-ad64-4980-a3fc-c27be32ff9f5 · outbound

This paper cites The novel stress simulation method for contemporary dram capacitor arrays.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond The novel stress simulation method for contemporary dram capacitor arrays

Reference 5

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:34.556766Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation e3421be2-ba91-4cd3-9aae-82cbf7f8f80e · outbound

This paper cites Springer, 2014.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Springer, 2014

Reference 6

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:34.409176Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 7a109cf4-d0a3-4fad-a4c6-ecc2ea98d6a9 · outbound

This paper cites Etch model based on machine learning.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Etch model based on machine learning

Reference 7

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:34.269290Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation fe71b67e-12e6-41f8-89b0-878611570b12 · outbound

This paper cites Exploring machine learning for semiconductor process optimization: a systematic review.IEEE Transactions on Artificial Intelligence, 2024.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Exploring machine learning for semiconductor process optimization: a systematic review.IEEE Transactions on Artificial Intelligence, 2024

Reference 8

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:34.130363Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 08315539-d9ca-4f6f-a58d-b67b4f2c44e7 · outbound

This paper cites A Tutorial on Bayesian Optimization.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond A Tutorial on Bayesian Optimization

Reference 9

Resolution: unresolved; no resolver link, observed 2026-08-07T15:12:22.396802Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

Observation 19f00b7e-cb1c-4909-b70f-b5852749ebf3 · outbound

This paper cites Test-time training with masked autoencoders.Advances in Neural Information Processing Systems, 35:29374–29385, 2022.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Test-time training with masked autoencoders.Advances in Neural Information Processing Systems, 35:29374–29385, 2022

Reference 10

Resolution: unresolved; no resolver link, observed 2026-08-07T15:12:22.536833Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

Observation a65b6f12-29a8-4a2e-a8ec-6d3f4640c4c6 · outbound

This paper cites Internal model control.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Internal model control

Reference 11

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:34.011061Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation ae68c399-fd39-451a-bd8f-afb94a83b646 · outbound

This paper cites A survey of deep learning techniques for autonomous driving.Journal of field robotics, 37(3):362–386, 2020.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond A survey of deep learning techniques for autonomous driving.Journal of field robotics, 37(3):362–386, 2020

Reference 12

Resolution: unresolved; no resolver link, observed 2026-08-07T15:12:22.779690Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

Observation 2f6ac4dd-9d98-438a-9a43-3951cfaf3ee2 · outbound

This paper cites Safe multi-agent reinforcement learning for multi-robot control.Artificial Intelligence, 319:103905, 2023.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Safe multi-agent reinforcement learning for multi-robot control.Artificial Intelligence, 319:103905, 2023

Reference 13

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:33.867616Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 9cd32049-05b3-4c0f-b230-ecaf89c5d252 · outbound

This paper cites an unresolved cited work.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Unresolved cited work

Reference 14

Resolution: unresolved; raw_fallback, observed 2026-08-07T15:12:33.698651Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 3b635ea8-0785-4295-9736-8f4ab423d298 · outbound

This paper cites Bridging tcad and ai: Its application to semiconductor design.IEEE Transactions on Electron Devices, 68(11):5364– 5371, 2021.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Bridging tcad and ai: Its application to semiconductor design.IEEE Transactions on Electron Devices, 68(11):5364– 5371, 2021

Reference 15

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:33.524762Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation ff9950c7-6349-4d88-8647-46616ef93e52 · outbound

This paper cites Royal society of chemistry, 2009.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Royal society of chemistry, 2009

Reference 16

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:33.381925Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation cbe5e493-b76f-4022-b6d2-262c77c9fb18 · outbound

This paper cites Highly accurate protein structure prediction with alphafold.nature, 596(7873):583–589, 2021.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Highly accurate protein structure prediction with alphafold.nature, 596(7873):583–589, 2021

Reference 17

Resolution: unresolved; no resolver link, observed 2026-08-07T15:12:23.199112Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

Observation e93c48e0-fb08-41dc-9a4b-2e4737e1b342 · outbound

This paper cites Human–machine collaboration for improving semiconductor process development.Nature, 616(7958):707–711, 2023.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Human–machine collaboration for improving semiconductor process development.Nature, 616(7958):707–711, 2023

Reference 18

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:33.245730Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation c14aef36-1f7c-4390-9e78-94f1766c6830 · outbound

This paper cites Ai chips: what they are and why they matter.Center for Security and Emerging Technology, 2020.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Ai chips: what they are and why they matter.Center for Security and Emerging Technology, 2020

Reference 19

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:33.099481Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 5ddf609b-8076-4f90-b0d0-3cc9c5a6c6ed · outbound

This paper cites Prediction of silicon oxynitride plasma etching using a generalized regression neural network.Journal of applied physics, 98(3), 2005.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Prediction of silicon oxynitride plasma etching using a generalized regression neural network.Journal of applied physics, 98(3), 2005

Reference 20

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:32.955423Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 86c8f582-bae6-449c-bb8d-df4d29fe1835 · outbound

This paper cites Application of plasma information-based virtual metrology (pi-vm) for etching in c4f8/ar/o2 plasma.IEEE Transactions on Semiconductor Manufacturing, 2024.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Application of plasma information-based virtual metrology (pi-vm) for etching in c4f8/ar/o2 plasma.IEEE Transactions on Semiconductor Manufacturing, 2024

Reference 21

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:32.768820Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation f7331357-63ea-4071-a1ce-f6b4a27d603f · outbound

This paper cites A review of robot learning for manip- ulation: Challenges, representations, and algorithms.Journal of machine learning research, 22(30):1–82, 2021.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond A review of robot learning for manip- ulation: Challenges, representations, and algorithms.Journal of machine learning research, 22(30):1–82, 2021

Reference 22

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:32.653771Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 6b6285cc-100b-4fca-9d4d-7a6380267fdb · outbound

This paper cites Robohive: A unified framework for robot learning.Advances in Neural Information Processing Systems, 36, 2024.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Robohive: A unified framework for robot learning.Advances in Neural Information Processing Systems, 36, 2024

Reference 23

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:32.488426Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation ab10fd84-5060-4143-b3e1-be63001a68f8 · outbound

This paper cites Deep learning.nature, 521(7553):436–444, 2015.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Deep learning.nature, 521(7553):436–444, 2015

Reference 24

Resolution: unresolved; no resolver link, observed 2026-08-07T15:12:23.920442Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

Observation fb69cac0-53cf-41f1-b609-5655f5d266fb · outbound

This paper cites NETT: Solving Inverse Problems with Deep Neural Networks.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond NETT: Solving Inverse Problems with Deep Neural Networks

Reference 25

Resolution: verified exact; local_arxiv, observed 2026-08-07T15:12:27.522994Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 1a4acae2-07b5-42b7-8572-4acc2a6ab031 · outbound

This paper cites Brief introduction of back propagation (bp) neural network algorithm and its improvement.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Brief introduction of back propagation (bp) neural network algorithm and its improvement

Reference 26

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:32.308106Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation a943403e-659a-4c7d-af7d-a5cf10a80eb5 · outbound

This paper cites Ttt++: When does self-supervised test-time training fail or thrive?Advances in Neural Information Processing Systems, 34:21808–21820, 2021.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Ttt++: When does self-supervised test-time training fail or thrive?Advances in Neural Information Processing Systems, 34:21808–21820, 2021

Reference 27

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:32.097841Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation d335478d-5442-4a00-bdbb-c58c0d5e1225 · outbound

This paper cites A fast and manufacture-friendly optical proximity correction based on machine learning.Microelectronic Engineering, 168:15–26, 2017.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond A fast and manufacture-friendly optical proximity correction based on machine learning.Microelectronic Engineering, 168:15–26, 2017

Reference 28

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:31.911502Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation e7ec8071-db49-49d1-b5a8-2cefa4d476a1 · outbound

This paper cites Fast pixel-based optical proximity correction based on nonparametric kernel regression.Journal of Micro/Nanolithogra- phy, MEMS, and MOEMS, 13(4):043007–043007, 2014.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Fast pixel-based optical proximity correction based on nonparametric kernel regression.Journal of Micro/Nanolithogra- phy, MEMS, and MOEMS, 13(4):043007–043007, 2014

Reference 29

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:31.726027Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 091e5d47-1d9e-4feb-8476-914401cfca58 · outbound

This paper cites John Wiley & Sons, 2006.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond John Wiley & Sons, 2006

Reference 30

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:31.451617Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 228bc0d5-e56e-4583-bee2-e9ad77eaf919 · outbound

This paper cites Enabling dfm and apc strategies at the 32 nm technology node.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Enabling dfm and apc strategies at the 32 nm technology node

Reference 31

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:31.207110Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation f51d7a66-579b-4c0a-b8b9-4335202530b4 · outbound

This paper cites A Novel Approach for Semiconductor Etching Process with Inductive Biases.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond A Novel Approach for Semiconductor Etching Process with Inductive Biases

Reference 32

Resolution: verified exact; local_arxiv, observed 2026-08-07T15:12:27.296802Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 3903f00a-f78f-4243-b2db-e5d59551f3fa · outbound

This paper cites Modeling simplification for thermal mechanical analysis of high density chip-to-substrate connections.Journal of electronic packaging, 133(4), 2011.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Modeling simplification for thermal mechanical analysis of high density chip-to-substrate connections.Journal of electronic packaging, 133(4), 2011

Reference 33

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:30.957790Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation d0882e8c-95e8-4655-82c5-e46f398315a5 · outbound

This paper cites Future of plasma etching for microelectronics: Challenges and opportunities.Journal of Vacuum Science & Technology B, 42(4), 2024.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Future of plasma etching for microelectronics: Challenges and opportunities.Journal of Vacuum Science & Technology B, 42(4), 2024

Reference 34

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:30.711868Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 329f8941-d911-4765-aace-4cca92526e8e · outbound

This paper cites Training language models to follow instructions with human feedback.Advances in neural information processing systems, 35:27730–27744, 2022.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Training language models to follow instructions with human feedback.Advances in neural information processing systems, 35:27730–27744, 2022

Reference 35

Resolution: unresolved; no resolver link, observed 2026-08-07T15:12:24.997541Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

Observation 5b182893-b323-403a-9ff0-c534b4935dd7 · outbound

This paper cites Damage-free plasma source for atomic-scale processing.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Damage-free plasma source for atomic-scale processing

Reference 36

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:30.461906Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 0d0e83d8-05a1-4b21-a309-377e322e00a2 · outbound

This paper cites Plasma heating characterization of the large area inductively coupled plasma etchers with the plasma information for managing the mass production.Physics of Plasmas, 31(7), 2024.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Plasma heating characterization of the large area inductively coupled plasma etchers with the plasma information for managing the mass production.Physics of Plasmas, 31(7), 2024

Reference 37

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:30.215852Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation b1e08812-1826-4bf1-8518-489800b09488 · outbound

This paper cites Perspectives on artificial intelligence for plasma-assisted manufacturing in semiconductor industry.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Perspectives on artificial intelligence for plasma-assisted manufacturing in semiconductor industry

Reference 38

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:29.989696Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 34dbcd96-7ac7-4605-b774-b0fc13c4ed19 · outbound

This paper cites Advanced plasma processing: etching, deposition, and wafer bonding techniques for semiconductor applications.Semiconductor technologies, 27:81–105, 2010.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Advanced plasma processing: etching, deposition, and wafer bonding techniques for semiconductor applications.Semiconductor technologies, 27:81–105, 2010

Reference 39

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:29.749016Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 2466a9e8-9e67-47a3-a0af-97c5714a0f77 · outbound

This paper cites Three-dimensional integrated circuit (3d ic) key technol- ogy: Through-silicon via (tsv).Nanoscale research letters, 12:1–9, 2017.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Three-dimensional integrated circuit (3d ic) key technol- ogy: Through-silicon via (tsv).Nanoscale research letters, 12:1–9, 2017

Reference 40

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:29.526771Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 7e277a2e-9abb-4bae-9f8b-699934272a20 · outbound

This paper cites Machine learning-guided etch proximity correction.IEEE Transactions on Semiconductor Manufacturing, 30(1):1–7, 2016.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Machine learning-guided etch proximity correction.IEEE Transactions on Semiconductor Manufacturing, 30(1):1–7, 2016

Reference 41

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:29.372552Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 340f128a-420c-416c-bdd1-9e993341d0f3 · outbound

This paper cites Mas- tering the game of go with deep neural networks and tree search.nature, 529(7587):484–489, 2016.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Mas- tering the game of go with deep neural networks and tree search.nature, 529(7587):484–489, 2016

Reference 42

Resolution: unresolved; no resolver link, observed 2026-08-07T15:12:25.608424Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

Observation f64df688-40ea-4a75-b16d-2c137ce5b419 · outbound

This paper cites Test: Test-time self- training under distribution shift.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Test: Test-time self- training under distribution shift

Reference 43

Resolution: unresolved; no resolver link, observed 2026-08-07T15:12:25.691423Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

Observation f5b074e8-0c84-4b90-81d2-5a1d5a4240e3 · outbound

This paper cites Chemical vapour deposition.Nature Reviews Methods Primers, 1(1):5, 2021.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Chemical vapour deposition.Nature Reviews Methods Primers, 1(1):5, 2021

Reference 44

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:29.193425Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 48e614d7-3af7-449f-bb93-6731fd2c83ab · outbound

This paper cites Test-time training with self-supervision for generalization under distribution shifts.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Test-time training with self-supervision for generalization under distribution shifts

Reference 45

Resolution: unresolved; no resolver link, observed 2026-08-07T15:12:25.897307Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

Observation 3b11d90b-b260-472c-b793-e315b82e90dc · outbound

This paper cites Modeling of layout-dependent stress effect in cmos design.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Modeling of layout-dependent stress effect in cmos design

Reference 46

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:28.926309Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 0a840475-3266-4210-bbc3-c78df781a0d5 · outbound

This paper cites Tent: Fully test-time adaptation by entropy minimization.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Tent: Fully test-time adaptation by entropy minimization

Reference 47

Resolution: unresolved; no resolver link, observed 2026-08-07T15:12:26.108660Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

Observation a5587f24-05fc-446d-993b-86bba284156c · outbound

This paper cites Data-driven machine learning predictor model for optimal operation of a thermal atomic layer etching reactor.Industrial & Engineering Chemistry Research, 63(45):19693–19706, 2024.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Data-driven machine learning predictor model for optimal operation of a thermal atomic layer etching reactor.Industrial & Engineering Chemistry Research, 63(45):19693–19706, 2024

Reference 48

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:28.730885Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation a47e4a32-ec7d-43c3-b685-706d8e65a253 · outbound

This paper cites Attention is all you need.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Attention is all you need

Reference 49

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:28.464000Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation fe12ce53-57f6-4d07-b384-c4d65008c779 · outbound

This paper cites SPIE press, 2009.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond SPIE press, 2009

Reference 50

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:28.253812Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 5000d28c-bf6c-41bd-9608-3b6b17ae7802 · outbound

This paper cites Multiscale modeling and recurrent neural network based optimization of a plasma etch process.Processes, 9(1):151, 2021.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Multiscale modeling and recurrent neural network based optimization of a plasma etch process.Processes, 9(1):151, 2021

Reference 51

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:28.045336Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation bd3012fa-a70f-4c0e-bb09-d024efde5bed · outbound

This paper cites Etching process prediction based on cascade recurrent neural network.Engineering Applications of Artificial Intelligence, 139:109590, 2025.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Etching process prediction based on cascade recurrent neural network.Engineering Applications of Artificial Intelligence, 139:109590, 2025

Reference 52

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:27.873550Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 8cb6e0fc-144a-465e-b981-c6ee16662e7e · outbound

This paper cites Autonomous driving system: A comprehensive survey.Expert Systems with Applications, 242:122836, 2024.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond Autonomous driving system: A comprehensive survey.Expert Systems with Applications, 242:122836, 2024

Reference 53

Resolution: verified fuzzy; raw_fallback, observed 2026-08-07T15:12:27.689613Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 199a5a7d-9c09-4d8c-9a57-2a35e6a582ad · outbound

This paper cites SE" represents senior engineers, 16 and “JE.

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond SE" represents senior engineers, 16 and “JE

Reference 54

Resolution: malformed identifier; raw_fallback, observed 2026-08-07T15:12:27.017211Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Coverage vector

Reference resolution

Outbound references

Pith citing papers