Paper Citation Record · LEDGER

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry

As of 20 August 2026, this Paper Citation Record lists 41 of 41 outbound references and 0 inbound Pith citation observations for arXiv:2505.03826.

A citation records a reference. It does not transfer a finding from one paper to another.

pith.paper-citation-record.v1
2505.03826 v1

Coverage vector

measured 41 of 41 reference resolution

Typed states for the displayed outbound observations.

Source: paper_references, paper_reference_links, observed 2026-08-16T04:13:02.737634Z

measured 41 of 41 standing notices

One-hop event checks from named stored sources.

Source: scholarly_work_events, retraction_status_cache, observed 2026-08-20T06:33:59.587034+00:00

measured 0 of 0 inbound itemization

Pith citing papers itemized under the disclosed page cap.

Source: paper_references, paper_reference_links

measured 0 of 1 external citation measurements

A source-named dated measurement, never combined with another source.

Source: cited_works

Reference resolution

41 of 41 outbound references displayed

verified exact0
verified fuzzy27
unresolved14
parse uncertain0
malformed identifier0
metadata mismatch0

External citation measurements

No source-named external measurement is stored.

Outbound references

Observation 99919083-bc39-46ef-893a-80f1c50c2133 · outbound

This paper cites an unresolved cited work.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry Unresolved cited work

Reference 1

Resolution: unresolved; raw_fallback, observed 2026-08-16T04:13:03.328812Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation a9d7bd19-aec7-4588-ba51-ad8627aab9e2 · outbound

This paper cites H.; Miao, Y.; Zhou, Z.; Wu, Z.; Kong, Z.; Gao, J.; Yang, H.; Ren, Y.; Zhang, Y.; Shi, J., Nanomater.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry H.; Miao, Y.; Zhou, Z.; Wu, Z.; Kong, Z.; Gao, J.; Yang, H.; Ren, Y.; Zhang, Y.; Shi, J., Nanomater

Reference 2

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.315244Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 6bd1e647-2699-41cf-8c32-6c14823c950f · outbound

This paper cites J.; Kim, K.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry J.; Kim, K

Reference 3

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.302060Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation c4c41f9a-d150-4165-8f7a-9397b6014fd6 · outbound

This paper cites an unresolved cited work.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry Unresolved cited work

Reference 4

Resolution: unresolved; raw_fallback, observed 2026-08-16T04:13:03.289402Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation a20e0440-f013-4e29-909f-dcc425cf9511 · outbound

This paper cites an unresolved cited work.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry Unresolved cited work

Reference 5

Resolution: unresolved; raw_fallback, observed 2026-08-16T04:13:03.276028Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 34eebaf4-5605-42a4-a305-e511565572e0 · outbound

This paper cites J.; Franklin, A.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry J.; Franklin, A

Reference 6

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.263078Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 7124d8cd-bc42-43b4-8842-489cd86b62ab · outbound

This paper cites China Inf.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry China Inf

Reference 7

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.249489Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation ad0e5082-c583-4eae-8042-253cc9ba603e · outbound

This paper cites an unresolved cited work.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry Unresolved cited work

Reference 8

Resolution: unresolved; raw_fallback, observed 2026-08-16T04:13:03.236435Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 26ba6705-42c6-484a-93b5-f009d6d6ab6a · outbound

This paper cites J.; Zhang, Z.; Wang, S.; Hudson, E.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry J.; Zhang, Z.; Wang, S.; Hudson, E

Reference 9

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.223260Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 481d3806-42ac-4458-ab31-102ead7b41ed · outbound

This paper cites an unresolved cited work.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry Unresolved cited work

Reference 10

Resolution: unresolved; raw_fallback, observed 2026-08-16T04:13:03.209730Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 9af6f7e5-4572-4de8-ad0d-3b8ca0a1da9c · outbound

This paper cites an unresolved cited work.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry Unresolved cited work

Reference 11

Resolution: unresolved; raw_fallback, observed 2026-08-16T04:13:03.196628Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 663e855f-a399-4936-93d6-d47e7408852c · outbound

This paper cites S.; Kim, T.; Kim, H.-U., Appl.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry S.; Kim, T.; Kim, H.-U., Appl

Reference 12

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.184003Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation c2447ad1-b4b0-427a-af5a-80a1051008c2 · outbound

This paper cites K.; Seok, H.; Bak, M.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry K.; Seok, H.; Bak, M

Reference 13

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.171173Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 7202827e-6faa-4819-aa3a-d7b59196ef5e · outbound

This paper cites an unresolved cited work.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry Unresolved cited work

Reference 14

Resolution: unresolved; raw_fallback, observed 2026-08-16T04:13:03.157169Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation d2d9010d-07b9-4a7f-bf1b-c3f931726116 · outbound

This paper cites W.; Smith, L.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry W.; Smith, L

Reference 15

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.142925Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 36623396-7270-44db-abe1-ea3ec449893b · outbound

This paper cites an unresolved cited work.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry Unresolved cited work

Reference 16

Resolution: unresolved; raw_fallback, observed 2026-08-16T04:13:03.129968Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 82ff445a-2d07-47f0-b9d6-d242e551f48d · outbound

This paper cites an unresolved cited work.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry Unresolved cited work

Reference 17

Resolution: unresolved; raw_fallback, observed 2026-08-16T04:13:03.117099Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 8cbe36db-d31e-4ef9-93c5-7bc982d41856 · outbound

This paper cites V.; Maldonado -Flores, C.; Gómez -Navarro, C.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry V.; Maldonado -Flores, C.; Gómez -Navarro, C

Reference 18

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.104067Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation b219e716-15c6-47af-bf1d-1cfcf00c4db2 · outbound

This paper cites 2015, 184, 23-29.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry 2015, 184, 23-29

Reference 19

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.089909Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation b0d08e7f-732a-47ae-9044-8f52de53d1fb · outbound

This paper cites R.; Ding, X., Food Control 2020, 108, 106885.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry R.; Ding, X., Food Control 2020, 108, 106885

Reference 20

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.075922Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 57fa4a21-5179-4039-9af8-93db53b8d5ad · outbound

This paper cites T.; Santos, V.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry T.; Santos, V

Reference 21

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.061209Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 715e1076-a0fd-4a88-8b7b-6ea59b9b1c86 · outbound

This paper cites D.; Sakti, L.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry D.; Sakti, L

Reference 22

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.047725Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 346df907-a423-43ca-b1ca-3aeab6bec879 · outbound

This paper cites an unresolved cited work.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry Unresolved cited work

Reference 23

Resolution: unresolved; raw_fallback, observed 2026-08-16T04:13:03.034322Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation e1dbecd6-5ee6-481e-a762-0d845da56301 · outbound

This paper cites F.; Aydın, M.; Demir, M.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry F.; Aydın, M.; Demir, M

Reference 24

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.020397Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 9e0b4a90-0b1c-4578-be2a-bc6b7244c2fa · outbound

This paper cites L.; Alwi, W.; Trinoveldi, F.; Rahayu, I.; Rahmidar, L.; Warsito, K., Procedia Environ.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry L.; Alwi, W.; Trinoveldi, F.; Rahayu, I.; Rahmidar, L.; Warsito, K., Procedia Environ

Reference 25

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:03.006428Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 984c3db5-f25c-48e1-8f57-03cf0c3fc9ed · outbound

This paper cites K.; Datta, S.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry K.; Datta, S

Reference 26

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:02.993031Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation f9484858-1a3d-42f4-8267-40e7b2224fa1 · outbound

This paper cites -A.; Song, J.; Jung, H.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry -A.; Song, J.; Jung, H

Reference 27

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:02.978534Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 6df063e4-665e-4fff-bbfe-822cffbc2791 · outbound

This paper cites an unresolved cited work.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry Unresolved cited work

Reference 28

Resolution: unresolved; raw_fallback, observed 2026-08-16T04:13:02.965304Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 785c3529-f1f4-4d20-94ef-7dd757f630a2 · outbound

This paper cites K.; Kim, J.; Kim, S.; Kim, C.; Lee, H.-C.; Kang, W.; Choi, M.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry K.; Kim, J.; Kim, S.; Kim, C.; Lee, H.-C.; Kang, W.; Choi, M

Reference 29

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:02.949896Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 56c5e101-a9f6-42d7-8343-cfc4af6ed21f · outbound

This paper cites -U.; Kim, T., Sensors 2023, 23 (12), 5563.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry -U.; Kim, T., Sensors 2023, 23 (12), 5563

Reference 30

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:02.935547Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 986ec454-177f-4a19-908d-0d8de553ef96 · outbound

This paper cites R.; LeSar, R., Annu.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry R.; LeSar, R., Annu

Reference 31

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:02.920710Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 6fc96a06-c3cd-4713-86c5-79ac0b459145 · outbound

This paper cites In Dropout as a bayesian approximation: Representing model uncertainty in deep learning, international conference on machine learning, PMLR: 2016; pp 1050-1059.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry In Dropout as a bayesian approximation: Representing model uncertainty in deep learning, international conference on machine learning, PMLR: 2016; pp 1050-1059

Reference 32

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:02.905754Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation add84251-2dd0-4e73-b1eb-a6bc32e60b76 · outbound

This paper cites an unresolved cited work.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry Unresolved cited work

Reference 33

Resolution: unresolved; raw_fallback, observed 2026-08-16T04:13:02.891896Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation cdbead38-53d0-4057-bc73-d237037b7ac9 · outbound

This paper cites In Study of plasma system by OES (optical emission spectroscopy), Proc.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry In Study of plasma system by OES (optical emission spectroscopy), Proc

Reference 34

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:02.877690Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation f0999803-07f2-40d5-8a7b-ee48b1998d42 · outbound

This paper cites J., Perkin Elmer Corp 1997, 3 (2), 115.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry J., Perkin Elmer Corp 1997, 3 (2), 115

Reference 35

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:02.862722Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 2de74d1c-8e04-42fc-8631-8115c1df5c50 · outbound

This paper cites A.; Lichtenberg, A.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry A.; Lichtenberg, A

Reference 36

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:02.847524Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 8fa03712-d8a6-4dc6-8bf2-9cf123e4b9f4 · outbound

This paper cites -N.; Bogaerts, A., Plasma Sources Sci.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry -N.; Bogaerts, A., Plasma Sources Sci

Reference 37

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:02.831576Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation c88b2255-f203-4664-9b33-c5b54f04cb22 · outbound

This paper cites W.; Hershkowitz, N., Plasma Sources Sci.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry W.; Hershkowitz, N., Plasma Sources Sci

Reference 38

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:02.816580Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 481c391d-16cb-40cc-87e9-5dfdbaf5fd9e · outbound

This paper cites P.; Durocher -Jean, A.; Gangwar, R.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry P.; Durocher -Jean, A.; Gangwar, R

Reference 39

Resolution: verified fuzzy; raw_fallback, observed 2026-08-16T04:13:02.800859Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation 1538ff34-b689-4005-a480-cbccfd1898bd · outbound

This paper cites an unresolved cited work.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry Unresolved cited work

Reference 40

Resolution: unresolved; raw_fallback, observed 2026-08-16T04:13:02.786303Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Observation e7da0ba2-3006-4a2f-8155-92f0c3c9e09d · outbound

This paper cites an unresolved cited work.

In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry Unresolved cited work

Reference 41

Resolution: unresolved; raw_fallback, observed 2026-08-16T04:13:02.771675Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-20T06:33:59.587034+00:00.

Pith citing papers

No inbound Pith citation observations are available.