Typed states for the displayed outbound observations.
Source: paper_references, paper_reference_links, observed 2026-08-01T03:43:01.602215Z
Paper Citation Record · LEDGER
As of 14 August 2026, this Paper Citation Record lists 69 of 69 outbound references and 0 inbound Pith citation observations for arXiv:2607.23082.
A citation records a reference. It does not transfer a finding from one paper to another.
Typed states for the displayed outbound observations.
Source: paper_references, paper_reference_links, observed 2026-08-01T03:43:01.602215Z
One-hop event checks from named stored sources.
Source: scholarly_work_events, retraction_status_cache, observed 2026-08-14T06:32:32.682623+00:00
Pith citing papers itemized under the disclosed page cap.
Source: paper_references, paper_reference_links
A source-named dated measurement, never combined with another source.
Source: cited_works
69 of 69 outbound references displayed
External citation measurements
No source-named external measurement is stored.
Observation b3fe935b-534c-4e41-bdfd-86d99c667bd8 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Semico nductor supply chain resilience and disruption: insights, mitigation, an d future directions,
Reference 1
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 3a780050-944a-402d-b4ce-9178c447c6cf · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Understa nding systemic disruption from the Covid-19-induced semiconductor shortage for the auto industry,
Reference 2
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation cc6854c9-c3ac-4b97-8584-3dca4428a56a · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Implications of the Tohoku earthqua ke for Toyota’s coordination mechanism: Supply chain disruption of automotive semiconductors,
Reference 3
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation cfcfea8b-0624-4697-a687-52c98ba93947 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) With new export controls on critical mine rals, supply concentration risks become reality,
Reference 4
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation bd33b47d-071c-4627-86dc-e8a16176884f · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) IRDS 2024 chapter-- Environment, safety, health & sustainability (ESHS): environmental sustainability of the semiconductor facilities (ESSF),
Reference 5
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 1be8c6b2-aa8a-4102-b84a-f7be5b2caaab · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Virtual metrolog y in semiconductor manufacturing: Current status and future prospects,
Reference 6
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 8e31d0a9-687c-41e5-b47d-38ede1be4bcf · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Virtual Metrology Model Robustness Against Chamber Condition Variation Using Deep Lear ning,
Reference 7
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation bc441a6c-5e6c-4d0b-93d8-87781b51d4e7 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) V irtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Pl asma,
Reference 8
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation a49cbf76-5adb-49e5-aba2-775820fd7835 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) M achine learning-based novelty detection for faulty wafer detection in sem iconductor manufacturing,
Reference 9
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 70aa327c-6333-4d07-9357-10861e686d97 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Safe and sustainable by design - Research and innovation,
Reference 10
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 1fe06804-cd47-4d28-b5a3-0dc98eacb404 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Recommendations for making the European Commission ’s Safe and Sustainable by Design framework practicable for bio cides,
Reference 11
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 2aaf9293-e437-4c09-88fc-a1c85a9a70fe · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Enhancing public procurement through GRC management: navigating the evolving EU regulatory landscape,
Reference 12
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation e45798ff-b0f3-4975-951b-4f5344cf8223 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Virtual metrology as an approach for product quality estima tion in Industry 4.0: a systematic review and integrative conceptual framework,
Reference 13
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 7d370f71-0df6-4d44-872a-2f9a488ded79 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Echoes from a singularity
Reference 14
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation d27ea004-43c0-430a-b8c1-c08042d220fb · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) An integrated framework of Industry 3.5 and an empirical study of simulation-based automate d material handling system for semiconductor manufacturing,
Reference 15
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation fccb3a72-f7f2-4029-89d3-0c5ac1f21f08 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Integrated Semico nductor Supply Chain Production Planning,
Reference 16
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation d80a33ea-aa12-408f-9ef4-0e0ec22dbec2 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Integrating resilience and reliability in semiconductor supply chains during disruptions,
Reference 17
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 32de2f20-fde5-4e1c-be90-04a64b18e209 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Structural resilie nce evolution and vulnerability assessment of semiconductor materials supply network in the global semiconductor industry,
Reference 18
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 04dbd7ac-3a73-42e3-932b-3467bcfd4d5f · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Res ilient and sustainable semiconductor supply chain network design under tra de credit and uncertainty of supply and demand,
Reference 19
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation a53a05f4-2a77-4f91-8768-64f0012dd8fa · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Digital tra nsformation and innovation and business ecosystems: A bibliometric analysis for conceptual insights and collaborative practices for ecosystem innovation,
Reference 20
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 4fcd18e2-9b35-4eb3-bfe8-4539a275145f · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) The geographies and geopolitics of industrial policy: Designing a data- driven UK semiconductor strategy,
Reference 21
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation 665f1942-d2b6-4e7f-97bb-54b70991100c · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) The European Chips Act: Europe’s Quest for Semiconductor Autonomy,
Reference 22
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation b280dee8-c26c-4e3a-afda-fb2f8788776d · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) The paradox of semiconductors—EU governance between sovereignty and interdependence,
Reference 23
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation dc5cfab4-960e-4b35-b162-6a0dd489f489 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) From Overdependence to Independen ce: European Policy Frameworks for Semiconductor Supply Chain Resilienc e,
Reference 24
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 85dca73e-6609-4fb7-bc12-b67ef3b89ffb · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Navigating the pat h to sustainability: case study insights from Taiwan’s semiconductor sector,
Reference 25
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation a7bf9c22-13c7-4532-b435-ccbc27724abc · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Sustainable global semiconductor supply chain network design considering ESG,
Reference 26
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 379b0e77-27bf-4498-9763-40a790331fb4 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) On the Need of International Cross-Data Space Interworking: An EU–Japan Case Study,
Reference 27
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation fc7d828c-dd83-4fa4-ba85-7edd3495f1a5 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Evolution and future of manufacturing systems,
Reference 28
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation 3b6a081d-21c8-4c3f-bb57-f9fac6fede91 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) The Industry 5.0 framework: viability-based integration of the resilience, sustainability, and human-centricit y perspectives,
Reference 29
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 3d8f1b65-25fa-43e5-9891-8b34734a6852 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) A multimodal hier archical learning approach for virtual metrology in semiconductor man ufacturing,
Reference 30
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation ee884a19-02c8-4be2-86c9-93d8bc237966 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) GenAI applications of vision-language models for semiconductor defect classification,
Reference 31
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation 32751601-f6f2-4750-a295-bab9ba94acb9 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) F rom Industry 4.0 to Industry 5.0: The Triple Transition Digital, Green and Social
Reference 32
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation 7a361050-ee0d-439e-ab27-12c4d16e7f75 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Scientific mapping and systematic literature review on sociotechnical change and transition to Industry 5.0 or Society 5. 0,
Reference 33
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation cf1b5ced-d4d1-4edd-9c3d-16533ef18984 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) D igital product passports as enablers of digital circular economy: a framework based on technological perspective,
Reference 34
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation a9c397ca-839c-499b-b088-6c42d49937c0 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Smart di gital platforms for carbon neutral management and services: business mo dels based on ITU standards for green digital transformation,
Reference 35
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation a05512c5-02b7-4498-a0f4-ba81807849da · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Roadmap ping for strategy and innovation,
Reference 36
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 2e8ea359-55d9-456c-a3ef-1efeaa7fb753 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Emerging trends in roadmapping research: A bibliom etric literature review,
Reference 37
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation efa528f2-b142-478f-8302-f887194ab84e · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Geneva, Switzerland: International Telecommunication Union (ITU), 2020
Reference 38
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 38b20042-0aeb-4b2d-9ced-2ce4b017c3ab · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Orchestrating the twin transition : sustainable AI and semiconductor ecosystems (RegTech & FinTech framewo rks),
Reference 39
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 3983e905-e404-45a6-b47b-d7d9f079ac09 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) bibliometrix: an R-tool for comprehensive science mapping analysis,
Reference 40
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation c30576ef-5f29-4104-a204-813393715a29 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Introduction to bibliometrics for construction and maintenance of thesauri: Methodical considerations,
Reference 41
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation f361c7a7-7d1a-42dd-994d-9ecb389ac2f4 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) How to combine term clumping and technology roadmapping fo r newly emerging science & technology competitive intellige nce:
Reference 42
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation ad2851dd-79a5-4d96-8872-5c360e444ead · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) A semantic web- based risk assessment framework for collaborative planning to enhance overall supply chain effectiveness for semiconducto r industry,
Reference 43
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation af24eb8d-41ba-4bae-9988-6d1b857a6bc7 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Chips and challenges: an integrative review on sustainability and risk ma nagement in semiconductor supply chains,
Reference 44
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation 58bee5b9-e66b-4601-b9ec-5acf3dbece90 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) The impact of supply chain risk complexity and concentration on f inancial and ESG performance in chinas semiconductor industry,
Reference 45
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation e9cffc97-8070-4739-8777-8539c6586cf2 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) SECS/GEMsec: a mechanism for detection and prevention of cyber-attacks on SECS/GEM communicati ons in industry 4.0 landscape,
Reference 46
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 27b1a32b-bb49-4b13-a9ee-b69b9a7483cd · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Contact-less integrity verification of microelectronics using ne ar-field EM analysis,
Reference 47
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 1e6a6ae3-8fa2-4b5d-99da-0dd19de54d00 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) A novel rolling -window and production-maintenance-based machine learning appro ach to virtual metrology in semiconductor manufacturing,
Reference 48
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 0f0090c1-066e-466b-8e72-ce4856d11cb3 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Review of Application s of Experimental Designs in Wafer Manufacturing,
Reference 49
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation ca744dce-1d2c-4cee-98ef-ffd782d06fb1 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Nanoelectronics-enabled reservoir computing hardware for real-time robotic controls,
Reference 50
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation bd8d01e5-9603-4bc6-8205-f2a01a89e95e · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Sustainable circular micro index for evaluating virtual substitution using mac hine learning with the path planning problem as a case study,
Reference 51
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation fc66cb0a-7594-42a9-86b4-1fbeeb9f675e · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Standards: road mapping computer technology trends enlightens industry,
Reference 52
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation da1a47e2-8ac3-4e68-ae3d-6f026e771825 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Analysis of the structure and robustness of the global semiconductor trade networ k,
Reference 53
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation 08258f6d-f042-44f6-83fe-2c3bbefa6ea1 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Strategies for managing perfluorinated compounds (PFCs) in semicon ductor manufacturing: a supply chain and public management approach,
Reference 54
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation d4404475-bccf-4fd8-9f45-d1065237c4e6 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) An overview of semicon ductor industry efforts to reduce PFAS use and emissions in plasma processes,
Reference 55
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 1c91789f-455c-4208-9c90-679e07035fe0 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Sustainable transition of the global semiconductor industry: challenges, strategies, and future directions,
Reference 56
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation 29d8414d-8bc5-4957-8a8d-588f87789612 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Transforming wastewater into resources: a review o f fluidized-bed homogeneous crystallization for sustainable treatme nt and recovery,
Reference 57
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation f04667c8-d94b-4009-8ff4-d5033c080ed4 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) 2024 IRDS edition: outside system connectivity,
Reference 58
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation abc0c76c-8f99-4b63-b7d5-0ebe7e055558 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Research quality evaluation by A I in the era of large language models: advantages, disadvantages, and systemic effects – an opinion paper,
Reference 59
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation 6d67c6d9-9c97-4942-bff6-d169ceb77a7d · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Transferrable framework based on knowledge graphs for generating explainable results in domain-specific, intelligent information retrieval,
Reference 60
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation d492d33e-b698-4d5d-9a91-333eae8d1ac8 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) A global south str ategy for evaluating research value with ChatGPT,
Reference 61
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
Observation 393b6e9b-f626-4e33-a484-5eb14e31d15c · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Industrial multi-machine data aggregation, AI-ready data preparation, and machine learning for virtual metro logy in semiconductor wafer and slider production,
Reference 62
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 0b524d54-ec67-43e1-a1dc-2144595f6b31 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) A proactive approach of optimizing real-time equipment monitori ng settings for enhancing end-of-line yield,
Reference 63
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation fc94c180-3478-470d-950d-045f8e5f8b30 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Virtual metrology in semiconductor fabrication foundry using deep learni ng neural networks,
Reference 64
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 9ba4a6ce-49fc-438d-a4d7-aa82d021d1eb · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) The duo of artificial intelligence and big data for Industry 4.0: applications, techniques, challenges, and futu re research directions,
Reference 65
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation fb1f3fb5-6b33-40cb-b95f-831d7c0f7849 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Unresolved cited work
Reference 2018
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation a44d60b3-fe66-4a31-9b12-047ed67bd6a7 · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Unresolved cited work
Reference 2022
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation db6e6e1b-0fa7-4f49-b53f-04fce5a4942c · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Unresolved cited work
Reference 2024
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 212d5fb4-9f6d-459a-9d73-73980f17887f · outbound
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Unresolved cited work
Reference 2025
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.
No inbound Pith citation observations are available.