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Paper Citation Record · LEDGER

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD)

As of 14 August 2026, this Paper Citation Record lists 69 of 69 outbound references and 0 inbound Pith citation observations for arXiv:2607.23082.

A citation records a reference. It does not transfer a finding from one paper to another.

pith.paper-citation-record.v1
2607.23082 v1

Coverage vector

measured 69 of 69 reference resolution

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Source: paper_references, paper_reference_links, observed 2026-08-01T03:43:01.602215Z

measured 69 of 69 standing notices

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Source: scholarly_work_events, retraction_status_cache, observed 2026-08-14T06:32:32.682623+00:00

measured 0 of 0 inbound itemization

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measured 0 of 1 external citation measurements

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Reference resolution

69 of 69 outbound references displayed

  • verified exact18
  • verified fuzzy0
  • unresolved50
  • parse uncertain0
  • malformed identifier1
  • metadata mismatch0

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Outbound references

Observation b3fe935b-534c-4e41-bdfd-86d99c667bd8 · outbound

This paper cites Semico nductor supply chain resilience and disruption: insights, mitigation, an d future directions,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Semico nductor supply chain resilience and disruption: insights, mitigation, an d future directions,

Reference 1

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no resolver link, observed 2026-08-01T03:43:01.235728Z

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source=pdf_text observed=2026-08-01T03:43:01.235728Z digest=sha256:d15034b155d92930083f06ab13c4bb244f19ec576c0bc6bc6b6f45c5e65baa05

Observation 3a780050-944a-402d-b4ce-9178c447c6cf · outbound

This paper cites Understa nding systemic disruption from the Covid-19-induced semiconductor shortage for the auto industry,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Understa nding systemic disruption from the Covid-19-induced semiconductor shortage for the auto industry,

Reference 2

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no resolver link, observed 2026-08-01T03:43:01.240752Z

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source=pdf_text observed=2026-08-01T03:43:01.240752Z digest=sha256:b60411579d995f527ce14482d4aff9d7420a47640bb81b2808afcd573e35c4d3

Observation cc6854c9-c3ac-4b97-8584-3dca4428a56a · outbound

This paper cites Implications of the Tohoku earthqua ke for Toyota’s coordination mechanism: Supply chain disruption of automotive semiconductors,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Implications of the Tohoku earthqua ke for Toyota’s coordination mechanism: Supply chain disruption of automotive semiconductors,

Reference 3

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doi, observed 2026-08-01T03:43:57.874503Z

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No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.

source=pdf_text observed=2026-08-01T03:43:01.245144Z digest=sha256:045d0e4cd9f052efb2d1c8a79df655a9a40ba8f928d7c3ce2493fce7fedcce09

Observation cfcfea8b-0624-4697-a687-52c98ba93947 · outbound

This paper cites With new export controls on critical mine rals, supply concentration risks become reality,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) With new export controls on critical mine rals, supply concentration risks become reality,

Reference 4

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source=pdf_text observed=2026-08-01T03:43:01.249491Z digest=sha256:a2bcd385c08d7132115636f96e63b2b68399e874d1a67958c98f0e1d7800a985

Observation bd33b47d-071c-4627-86dc-e8a16176884f · outbound

This paper cites IRDS 2024 chapter-- Environment, safety, health & sustainability (ESHS): environmental sustainability of the semiconductor facilities (ESSF),.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) IRDS 2024 chapter-- Environment, safety, health & sustainability (ESHS): environmental sustainability of the semiconductor facilities (ESSF),

Reference 5

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source=pdf_text observed=2026-08-01T03:43:01.253652Z digest=sha256:2abd43caeb09bfd74de913f539af382c49284e6ec74fc90eaf05ff41904780bc

Observation 1be8c6b2-aa8a-4102-b84a-f7be5b2caaab · outbound

This paper cites Virtual metrolog y in semiconductor manufacturing: Current status and future prospects,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Virtual metrolog y in semiconductor manufacturing: Current status and future prospects,

Reference 6

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source=pdf_text observed=2026-08-01T03:43:01.258056Z digest=sha256:35935e12ba839ab4bc56c78b49c5049b31e1d57e1550b7147e8f7dd4050385ed

Observation 8e31d0a9-687c-41e5-b47d-38ede1be4bcf · outbound

This paper cites Virtual Metrology Model Robustness Against Chamber Condition Variation Using Deep Lear ning,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Virtual Metrology Model Robustness Against Chamber Condition Variation Using Deep Lear ning,

Reference 7

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source=pdf_text observed=2026-08-01T03:43:01.262608Z digest=sha256:bfbd96d0a201c7380f6463fdc31fbb7a023a9e4a52ba11ee2b94bd825926dd5c

Observation bc441a6c-5e6c-4d0b-93d8-87781b51d4e7 · outbound

This paper cites V irtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Pl asma,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) V irtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Pl asma,

Reference 8

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source=pdf_text observed=2026-08-01T03:43:01.266473Z digest=sha256:86ee6ff2709636a0bf7b748634ac92ab27359f9ca2cc5c6f7e5ce2d7015b9e51

Observation a49cbf76-5adb-49e5-aba2-775820fd7835 · outbound

This paper cites M achine learning-based novelty detection for faulty wafer detection in sem iconductor manufacturing,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) M achine learning-based novelty detection for faulty wafer detection in sem iconductor manufacturing,

Reference 9

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source=pdf_text observed=2026-08-01T03:43:01.270448Z digest=sha256:ee710e535862a1c15f7c0c083c386a77e80f79c672116e951c16c7befbf8ee4b

Observation 70aa327c-6333-4d07-9357-10861e686d97 · outbound

This paper cites Safe and sustainable by design - Research and innovation,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Safe and sustainable by design - Research and innovation,

Reference 10

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source=pdf_text observed=2026-08-01T03:43:01.274230Z digest=sha256:af9a184ee557d43263c19daaf3d6f5837cfe70739579abfbefc8b18a347c663e

Observation 1fe06804-cd47-4d28-b5a3-0dc98eacb404 · outbound

This paper cites Recommendations for making the European Commission ’s Safe and Sustainable by Design framework practicable for bio cides,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Recommendations for making the European Commission ’s Safe and Sustainable by Design framework practicable for bio cides,

Reference 11

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source=pdf_text observed=2026-08-01T03:43:01.278247Z digest=sha256:7185f6d8cd891eeeb4f12e7265c3b1d8f3cf31225aa96c3935f6bf439399e7c5

Observation 2aaf9293-e437-4c09-88fc-a1c85a9a70fe · outbound

This paper cites Enhancing public procurement through GRC management: navigating the evolving EU regulatory landscape,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Enhancing public procurement through GRC management: navigating the evolving EU regulatory landscape,

Reference 12

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doi, observed 2026-08-01T03:43:57.578088Z

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No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.

source=pdf_text observed=2026-08-01T03:43:01.282151Z digest=sha256:ce3605bab095054e8666c763182b93baad13dc17aaf9aa45f524ef8624b6933d

Observation e45798ff-b0f3-4975-951b-4f5344cf8223 · outbound

This paper cites Virtual metrology as an approach for product quality estima tion in Industry 4.0: a systematic review and integrative conceptual framework,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Virtual metrology as an approach for product quality estima tion in Industry 4.0: a systematic review and integrative conceptual framework,

Reference 13

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source=pdf_text observed=2026-08-01T03:43:01.286089Z digest=sha256:1b09645ce19ab6c33a58bab5a4b3806b3f9f5b2d7e382b4498a2f686b773baf9

Observation 7d370f71-0df6-4d44-872a-2f9a488ded79 · outbound

This paper cites Echoes from a singularity.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Echoes from a singularity

Reference 14

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source=pdf_text observed=2026-08-01T03:43:01.293944Z digest=sha256:a64c9faaa6e79b79fb5007df86aab863f9e8c607754cb362afee390ae186cec6

Observation d27ea004-43c0-430a-b8c1-c08042d220fb · outbound

This paper cites An integrated framework of Industry 3.5 and an empirical study of simulation-based automate d material handling system for semiconductor manufacturing,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) An integrated framework of Industry 3.5 and an empirical study of simulation-based automate d material handling system for semiconductor manufacturing,

Reference 15

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source=pdf_text observed=2026-08-01T03:43:01.298215Z digest=sha256:639dca833a21a7ddcdf417308d7eef9650f6d8f658eaceec87d78c2b6071ed11

Observation fccb3a72-f7f2-4029-89d3-0c5ac1f21f08 · outbound

This paper cites Integrated Semico nductor Supply Chain Production Planning,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Integrated Semico nductor Supply Chain Production Planning,

Reference 16

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source=pdf_text observed=2026-08-01T03:43:01.305711Z digest=sha256:436e67984418bef4bce72fccb3f229a5b540ec6486dd62a5f91c5d4a1b9f876f

Observation d80a33ea-aa12-408f-9ef4-0e0ec22dbec2 · outbound

This paper cites Integrating resilience and reliability in semiconductor supply chains during disruptions,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Integrating resilience and reliability in semiconductor supply chains during disruptions,

Reference 17

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source=pdf_text observed=2026-08-01T03:43:01.309652Z digest=sha256:85a5627bcca238aa331637e6980a5dee25e5d196ff1c6f42e7568ff1e746bdd5

Observation 32de2f20-fde5-4e1c-be90-04a64b18e209 · outbound

This paper cites Structural resilie nce evolution and vulnerability assessment of semiconductor materials supply network in the global semiconductor industry,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Structural resilie nce evolution and vulnerability assessment of semiconductor materials supply network in the global semiconductor industry,

Reference 18

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source=pdf_text observed=2026-08-01T03:43:01.313508Z digest=sha256:b8e8a5d83d69b544c1800f3a2f2934d26555a1f8836f7170cc270beef37ad4f9

Observation 04dbd7ac-3a73-42e3-932b-3467bcfd4d5f · outbound

This paper cites Res ilient and sustainable semiconductor supply chain network design under tra de credit and uncertainty of supply and demand,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Res ilient and sustainable semiconductor supply chain network design under tra de credit and uncertainty of supply and demand,

Reference 19

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source=pdf_text observed=2026-08-01T03:43:01.317425Z digest=sha256:83a4ecc8e48f72434201724060758d9259d0696df73164db4ed6e71541ab93ae

Observation a53a05f4-2a77-4f91-8768-64f0012dd8fa · outbound

This paper cites Digital tra nsformation and innovation and business ecosystems: A bibliometric analysis for conceptual insights and collaborative practices for ecosystem innovation,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Digital tra nsformation and innovation and business ecosystems: A bibliometric analysis for conceptual insights and collaborative practices for ecosystem innovation,

Reference 20

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source=pdf_text observed=2026-08-01T03:43:01.321659Z digest=sha256:3cbcfb8713a998a83111157883ffcba7c4422a2f931cb25e61bea2ce6cbd3c79

Observation 4fcd18e2-9b35-4eb3-bfe8-4539a275145f · outbound

This paper cites The geographies and geopolitics of industrial policy: Designing a data- driven UK semiconductor strategy,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) The geographies and geopolitics of industrial policy: Designing a data- driven UK semiconductor strategy,

Reference 21

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doi, observed 2026-08-01T03:43:57.344358Z

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No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.

source=pdf_text observed=2026-08-01T03:43:01.325573Z digest=sha256:3e221ca82514296dc73371a9929c89d46d3362a5b0cf683acb7bd032d03c37dd

Observation 665f1942-d2b6-4e7f-97bb-54b70991100c · outbound

This paper cites The European Chips Act: Europe’s Quest for Semiconductor Autonomy,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) The European Chips Act: Europe’s Quest for Semiconductor Autonomy,

Reference 22

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no resolver link, observed 2026-08-01T03:43:01.329574Z

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source=pdf_text observed=2026-08-01T03:43:01.329574Z digest=sha256:9b790fa86fd5d000a0ab6447bbd592383e407e3778b76e74ac053d5440f90fbd

Observation b280dee8-c26c-4e3a-afda-fb2f8788776d · outbound

This paper cites The paradox of semiconductors—EU governance between sovereignty and interdependence,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) The paradox of semiconductors—EU governance between sovereignty and interdependence,

Reference 23

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no resolver link, observed 2026-08-01T03:43:01.333413Z

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source=pdf_text observed=2026-08-01T03:43:01.333413Z digest=sha256:60edd33435019c426cada38b64d802939dff9fb49045cb60dcc4b1a16b4de95a

Observation dc5cfab4-960e-4b35-b162-6a0dd489f489 · outbound

This paper cites From Overdependence to Independen ce: European Policy Frameworks for Semiconductor Supply Chain Resilienc e,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) From Overdependence to Independen ce: European Policy Frameworks for Semiconductor Supply Chain Resilienc e,

Reference 24

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no resolver link, observed 2026-08-01T03:43:01.337238Z

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source=pdf_text observed=2026-08-01T03:43:01.337238Z digest=sha256:bf3f42300c1e91f36cdc8b3153eda9a28077ac91278d5ab28b9a79a5a7344337

Observation 85dca73e-6609-4fb7-bc12-b67ef3b89ffb · outbound

This paper cites Navigating the pat h to sustainability: case study insights from Taiwan’s semiconductor sector,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Navigating the pat h to sustainability: case study insights from Taiwan’s semiconductor sector,

Reference 25

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doi, observed 2026-08-01T03:43:57.172334Z

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source=pdf_text observed=2026-08-01T03:43:01.341304Z digest=sha256:ec336c2045fac39b4756ca76232833acbb2a59ce6892e452394357fb05787977

Observation a7bf9c22-13c7-4532-b435-ccbc27724abc · outbound

This paper cites Sustainable global semiconductor supply chain network design considering ESG,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Sustainable global semiconductor supply chain network design considering ESG,

Reference 26

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source=pdf_text observed=2026-08-01T03:43:01.345093Z digest=sha256:b0572db47e48c91869e1e40ef6f797bb93481eb571af7678e46f922f10d475c4

Observation 379b0e77-27bf-4498-9763-40a790331fb4 · outbound

This paper cites On the Need of International Cross-Data Space Interworking: An EU–Japan Case Study,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) On the Need of International Cross-Data Space Interworking: An EU–Japan Case Study,

Reference 27

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source=pdf_text observed=2026-08-01T03:43:01.348816Z digest=sha256:da2f59ce930bc2a1e83baa0e0414c10bfb92a0d5f79eab11f53d6af11eaad73c

Observation fc7d828c-dd83-4fa4-ba85-7edd3495f1a5 · outbound

This paper cites Evolution and future of manufacturing systems,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Evolution and future of manufacturing systems,

Reference 28

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doi, observed 2026-08-01T03:43:56.914274Z

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source=pdf_text observed=2026-08-01T03:43:01.352620Z digest=sha256:0b6f2812abeea8b9f349b92dae209292960943a1316dfc43f67d05a4071d37dd

Observation 3b6a081d-21c8-4c3f-bb57-f9fac6fede91 · outbound

This paper cites The Industry 5.0 framework: viability-based integration of the resilience, sustainability, and human-centricit y perspectives,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) The Industry 5.0 framework: viability-based integration of the resilience, sustainability, and human-centricit y perspectives,

Reference 29

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no resolver link, observed 2026-08-01T03:43:01.356591Z

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source=pdf_text observed=2026-08-01T03:43:01.356591Z digest=sha256:54f60bf96906dad10e658e40d8d058d5ef56b1b05620a517b083f867b16d16a7

Observation 3d8f1b65-25fa-43e5-9891-8b34734a6852 · outbound

This paper cites A multimodal hier archical learning approach for virtual metrology in semiconductor man ufacturing,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) A multimodal hier archical learning approach for virtual metrology in semiconductor man ufacturing,

Reference 30

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source=pdf_text observed=2026-08-01T03:43:01.360201Z digest=sha256:6ea03ca13aae22f50fbdea1ea1ff6abdcf1b84b7ba27c0904326bb2d60b2491a

Observation ee884a19-02c8-4be2-86c9-93d8bc237966 · outbound

This paper cites GenAI applications of vision-language models for semiconductor defect classification,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) GenAI applications of vision-language models for semiconductor defect classification,

Reference 31

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source=pdf_text observed=2026-08-01T03:43:01.364038Z digest=sha256:618de6f018089747d73bea1f671e48ae9edd2b70c59ffd4cadd903f7778a84f7

Observation 32751601-f6f2-4750-a295-bab9ba94acb9 · outbound

This paper cites F rom Industry 4.0 to Industry 5.0: The Triple Transition Digital, Green and Social.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) F rom Industry 4.0 to Industry 5.0: The Triple Transition Digital, Green and Social

Reference 32

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source=pdf_text observed=2026-08-01T03:43:01.367823Z digest=sha256:3a8291813cb29b4e5da51298308a675ecf486044b8e7bceddbabe98513cd25a4

Observation 7a361050-ee0d-439e-ab27-12c4d16e7f75 · outbound

This paper cites Scientific mapping and systematic literature review on sociotechnical change and transition to Industry 5.0 or Society 5. 0,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Scientific mapping and systematic literature review on sociotechnical change and transition to Industry 5.0 or Society 5. 0,

Reference 33

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source=pdf_text observed=2026-08-01T03:43:01.372026Z digest=sha256:fe86ff14395c6c3b4ff9c188b3a324360bd91229427f300ccfd1232448bf04ef

Observation cf1b5ced-d4d1-4edd-9c3d-16533ef18984 · outbound

This paper cites D igital product passports as enablers of digital circular economy: a framework based on technological perspective,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) D igital product passports as enablers of digital circular economy: a framework based on technological perspective,

Reference 34

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source=pdf_text observed=2026-08-01T03:43:01.375959Z digest=sha256:845662805c42d1c943cd0a769c190e52895278c6a28eec9dc25cb7c67ab07c1c

Observation a9c397ca-839c-499b-b088-6c42d49937c0 · outbound

This paper cites Smart di gital platforms for carbon neutral management and services: business mo dels based on ITU standards for green digital transformation,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Smart di gital platforms for carbon neutral management and services: business mo dels based on ITU standards for green digital transformation,

Reference 35

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source=pdf_text observed=2026-08-01T03:43:01.379871Z digest=sha256:09f51927d5e1c7c3a8f31ccf999fe95b655626922fefc0720aad7499517cab8f

Observation a05512c5-02b7-4498-a0f4-ba81807849da · outbound

This paper cites Roadmap ping for strategy and innovation,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Roadmap ping for strategy and innovation,

Reference 36

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source=pdf_text observed=2026-08-01T03:43:01.383448Z digest=sha256:69dcefaa85e2df01e1b9aafa6eb39895cea5a9614090c249ea905830a491cc60

Observation 2e8ea359-55d9-456c-a3ef-1efeaa7fb753 · outbound

This paper cites Emerging trends in roadmapping research: A bibliom etric literature review,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Emerging trends in roadmapping research: A bibliom etric literature review,

Reference 37

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source=pdf_text observed=2026-08-01T03:43:01.387219Z digest=sha256:c0441713ddca64f682c02abaa38b0ccc9a94474ca430e8107512988754e3f106

Observation efa528f2-b142-478f-8302-f887194ab84e · outbound

This paper cites Geneva, Switzerland: International Telecommunication Union (ITU), 2020.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Geneva, Switzerland: International Telecommunication Union (ITU), 2020

Reference 38

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source=pdf_text observed=2026-08-01T03:43:01.390766Z digest=sha256:06bb5c41b41ebfc7350ad2bb108c782d8b4dbcf5f1b41b12bbd84d0d7b06c576

Observation 38b20042-0aeb-4b2d-9ced-2ce4b017c3ab · outbound

This paper cites Orchestrating the twin transition : sustainable AI and semiconductor ecosystems (RegTech & FinTech framewo rks),.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Orchestrating the twin transition : sustainable AI and semiconductor ecosystems (RegTech & FinTech framewo rks),

Reference 39

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source=pdf_text observed=2026-08-01T03:43:01.394514Z digest=sha256:4e70f141d09b4de7842390b81dc296a45f8db9c71fb480ac760e98d9009cdd86

Observation 3983e905-e404-45a6-b47b-d7d9f079ac09 · outbound

This paper cites bibliometrix: an R-tool for comprehensive science mapping analysis,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) bibliometrix: an R-tool for comprehensive science mapping analysis,

Reference 40

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source=pdf_text observed=2026-08-01T03:43:01.398350Z digest=sha256:0c9280b23638a0a5c3504533cb26978690372ff61c6ac072bcf7146879d861b3

Observation c30576ef-5f29-4104-a204-813393715a29 · outbound

This paper cites Introduction to bibliometrics for construction and maintenance of thesauri: Methodical considerations,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Introduction to bibliometrics for construction and maintenance of thesauri: Methodical considerations,

Reference 41

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source=pdf_text observed=2026-08-01T03:43:01.402520Z digest=sha256:3cf8d4c375c419723db39dc4f6cee849e99f47de9d503cef91a0eaa55d7f8f57

Observation f361c7a7-7d1a-42dd-994d-9ecb389ac2f4 · outbound

This paper cites How to combine term clumping and technology roadmapping fo r newly emerging science & technology competitive intellige nce:.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) How to combine term clumping and technology roadmapping fo r newly emerging science & technology competitive intellige nce:

Reference 42

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source=pdf_text observed=2026-08-01T03:43:01.406370Z digest=sha256:b5f025ae6303d8b08723b4f411317f73a710c32d9107ab2424bb58e93761f1e8

Observation ad2851dd-79a5-4d96-8872-5c360e444ead · outbound

This paper cites A semantic web- based risk assessment framework for collaborative planning to enhance overall supply chain effectiveness for semiconducto r industry,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) A semantic web- based risk assessment framework for collaborative planning to enhance overall supply chain effectiveness for semiconducto r industry,

Reference 43

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source=pdf_text observed=2026-08-01T03:43:01.410330Z digest=sha256:b4a4cbad5112de3c35f5df5d9462eefb7bb5ea886168eac2e1284a7517f69a6c

Observation af24eb8d-41ba-4bae-9988-6d1b857a6bc7 · outbound

This paper cites Chips and challenges: an integrative review on sustainability and risk ma nagement in semiconductor supply chains,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Chips and challenges: an integrative review on sustainability and risk ma nagement in semiconductor supply chains,

Reference 44

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source=pdf_text observed=2026-08-01T03:43:01.414085Z digest=sha256:73022d21cd45c103a677a3155fee163bc7a30b96c44e8f974945fc21f553050a

Observation 58bee5b9-e66b-4601-b9ec-5acf3dbece90 · outbound

This paper cites The impact of supply chain risk complexity and concentration on f inancial and ESG performance in chinas semiconductor industry,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) The impact of supply chain risk complexity and concentration on f inancial and ESG performance in chinas semiconductor industry,

Reference 45

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source=pdf_text observed=2026-08-01T03:43:01.417842Z digest=sha256:6af3cbdea34f6957d58f6f4c4759c144ababdcb84a88fa8630bbbaa83042b8d9

Observation e9cffc97-8070-4739-8777-8539c6586cf2 · outbound

This paper cites SECS/GEMsec: a mechanism for detection and prevention of cyber-attacks on SECS/GEM communicati ons in industry 4.0 landscape,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) SECS/GEMsec: a mechanism for detection and prevention of cyber-attacks on SECS/GEM communicati ons in industry 4.0 landscape,

Reference 46

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source=pdf_text observed=2026-08-01T03:43:01.421496Z digest=sha256:9f9074d376a58973065cf5bf9163091043f15488db4c7a42ffd03c7d54169c78

Observation 27b1a32b-bb49-4b13-a9ee-b69b9a7483cd · outbound

This paper cites Contact-less integrity verification of microelectronics using ne ar-field EM analysis,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Contact-less integrity verification of microelectronics using ne ar-field EM analysis,

Reference 47

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source=pdf_text observed=2026-08-01T03:43:01.425183Z digest=sha256:cd72913f3d7b573d9c6d0b7070cf701548c1f8030aa0304a6f6493c9e7165a6b

Observation 1e6a6ae3-8fa2-4b5d-99da-0dd19de54d00 · outbound

This paper cites A novel rolling -window and production-maintenance-based machine learning appro ach to virtual metrology in semiconductor manufacturing,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) A novel rolling -window and production-maintenance-based machine learning appro ach to virtual metrology in semiconductor manufacturing,

Reference 48

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source=pdf_text observed=2026-08-01T03:43:01.428766Z digest=sha256:d60a875b2276011d51d6f13aaa89cb85186af1fc617e385918da1cde369d8a6f

Observation 0f0090c1-066e-466b-8e72-ce4856d11cb3 · outbound

This paper cites Review of Application s of Experimental Designs in Wafer Manufacturing,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Review of Application s of Experimental Designs in Wafer Manufacturing,

Reference 49

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source=pdf_text observed=2026-08-01T03:43:01.534271Z digest=sha256:f45b37cc855f122baa0f9f88b6cdbdc2a412236562a7a737e846806bd4de75d4

Observation ca744dce-1d2c-4cee-98ef-ffd782d06fb1 · outbound

This paper cites Nanoelectronics-enabled reservoir computing hardware for real-time robotic controls,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Nanoelectronics-enabled reservoir computing hardware for real-time robotic controls,

Reference 50

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source=pdf_text observed=2026-08-01T03:43:01.538629Z digest=sha256:da58a3a188427667d1864c932cd4f3b934f490362ad86b5d5813931984b0005b

Observation bd8d01e5-9603-4bc6-8205-f2a01a89e95e · outbound

This paper cites Sustainable circular micro index for evaluating virtual substitution using mac hine learning with the path planning problem as a case study,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Sustainable circular micro index for evaluating virtual substitution using mac hine learning with the path planning problem as a case study,

Reference 51

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source=pdf_text observed=2026-08-01T03:43:01.546620Z digest=sha256:5086e8e7f2e9e2b5128552aaae20c33d5d9f75ef184b55ed26991ac13e108535

Observation fc66cb0a-7594-42a9-86b4-1fbeeb9f675e · outbound

This paper cites Standards: road mapping computer technology trends enlightens industry,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Standards: road mapping computer technology trends enlightens industry,

Reference 52

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source=pdf_text observed=2026-08-01T03:43:01.550480Z digest=sha256:b12c85ff5c4afa72ebb85597a313ac572efc1e9a6d64568314d44bffb420a940

Observation da1a47e2-8ac3-4e68-ae3d-6f026e771825 · outbound

This paper cites Analysis of the structure and robustness of the global semiconductor trade networ k,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Analysis of the structure and robustness of the global semiconductor trade networ k,

Reference 53

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source=pdf_text observed=2026-08-01T03:43:01.557722Z digest=sha256:97b96137ee508494f27a2c2e3da1ea27e2261421e6af68fa7e8e7ea1fdde4bf9

Observation 08258f6d-f042-44f6-83fe-2c3bbefa6ea1 · outbound

This paper cites Strategies for managing perfluorinated compounds (PFCs) in semicon ductor manufacturing: a supply chain and public management approach,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Strategies for managing perfluorinated compounds (PFCs) in semicon ductor manufacturing: a supply chain and public management approach,

Reference 54

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source=pdf_text observed=2026-08-01T03:43:01.561293Z digest=sha256:1453fe3bb64b1d2908a31811a033d886b530dc653af7931aead5bf74a428c0e8

Observation d4404475-bccf-4fd8-9f45-d1065237c4e6 · outbound

This paper cites An overview of semicon ductor industry efforts to reduce PFAS use and emissions in plasma processes,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) An overview of semicon ductor industry efforts to reduce PFAS use and emissions in plasma processes,

Reference 55

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source=pdf_text observed=2026-08-01T03:43:01.565150Z digest=sha256:e3df052b5b64d178339ac0dcb201bbbb0b39c5e184f0ed166d2ec1b97c69ed0d

Observation 1c91789f-455c-4208-9c90-679e07035fe0 · outbound

This paper cites Sustainable transition of the global semiconductor industry: challenges, strategies, and future directions,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Sustainable transition of the global semiconductor industry: challenges, strategies, and future directions,

Reference 56

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source=pdf_text observed=2026-08-01T03:43:01.568766Z digest=sha256:c1c623fb429d47e5547fda1f11455ceb72536c29a40bc169e67a6ced42f99ac6

Observation 29d8414d-8bc5-4957-8a8d-588f87789612 · outbound

This paper cites Transforming wastewater into resources: a review o f fluidized-bed homogeneous crystallization for sustainable treatme nt and recovery,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Transforming wastewater into resources: a review o f fluidized-bed homogeneous crystallization for sustainable treatme nt and recovery,

Reference 57

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source=pdf_text observed=2026-08-01T03:43:01.572304Z digest=sha256:a777331da962886c7c1b9bf235c66611dd5b3c27ac93be3bbb6e6e58f2fbfdb9

Observation f04667c8-d94b-4009-8ff4-d5033c080ed4 · outbound

This paper cites 2024 IRDS edition: outside system connectivity,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) 2024 IRDS edition: outside system connectivity,

Reference 58

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source=pdf_text observed=2026-08-01T03:43:01.576012Z digest=sha256:7f0e0aeeabcfaf083c5d28104ea8350059784cac6cc04a01427f0ed06dbeeadc

Observation abc0c76c-8f99-4b63-b7d5-0ebe7e055558 · outbound

This paper cites Research quality evaluation by A I in the era of large language models: advantages, disadvantages, and systemic effects – an opinion paper,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Research quality evaluation by A I in the era of large language models: advantages, disadvantages, and systemic effects – an opinion paper,

Reference 59

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source=pdf_text observed=2026-08-01T03:43:01.579656Z digest=sha256:990341672b5d8758973688c830a7b12d9efd520a1824ce1ecfcacf4546bbe3f8

Observation 6d67c6d9-9c97-4942-bff6-d169ceb77a7d · outbound

This paper cites Transferrable framework based on knowledge graphs for generating explainable results in domain-specific, intelligent information retrieval,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Transferrable framework based on knowledge graphs for generating explainable results in domain-specific, intelligent information retrieval,

Reference 60

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source=pdf_text observed=2026-08-01T03:43:01.583335Z digest=sha256:b3d660718b491189dc6cb96d6e77c52ed0e34517b948e3cbf65715e8591af417

Observation d492d33e-b698-4d5d-9a91-333eae8d1ac8 · outbound

This paper cites A global south str ategy for evaluating research value with ChatGPT,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) A global south str ategy for evaluating research value with ChatGPT,

Reference 61

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source=pdf_text observed=2026-08-01T03:43:01.587206Z digest=sha256:68ad9f115bb47b01b12aba8d4b55493d721745fa409640172291aa5389f37f4f

Observation 393b6e9b-f626-4e33-a484-5eb14e31d15c · outbound

This paper cites Industrial multi-machine data aggregation, AI-ready data preparation, and machine learning for virtual metro logy in semiconductor wafer and slider production,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Industrial multi-machine data aggregation, AI-ready data preparation, and machine learning for virtual metro logy in semiconductor wafer and slider production,

Reference 62

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source=pdf_text observed=2026-08-01T03:43:01.590888Z digest=sha256:e5ce9547e38b543664a1d6ecf60f715be5d3066c46f9244f1fccf14d33c7f153

Observation 0b524d54-ec67-43e1-a1dc-2144595f6b31 · outbound

This paper cites A proactive approach of optimizing real-time equipment monitori ng settings for enhancing end-of-line yield,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) A proactive approach of optimizing real-time equipment monitori ng settings for enhancing end-of-line yield,

Reference 63

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source=pdf_text observed=2026-08-01T03:43:01.594728Z digest=sha256:a703bdd7f7038526afe9cbda58914d72dc59ed0d75bf96b2b2129494ef9b4597

Observation fc94c180-3478-470d-950d-045f8e5f8b30 · outbound

This paper cites Virtual metrology in semiconductor fabrication foundry using deep learni ng neural networks,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Virtual metrology in semiconductor fabrication foundry using deep learni ng neural networks,

Reference 64

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source=pdf_text observed=2026-08-01T03:43:01.598667Z digest=sha256:6a5b703f7efa09f7f43161c966b50c2d6e76b77f19d703c085514a591b8aff9f

Observation 9ba4a6ce-49fc-438d-a4d7-aa82d021d1eb · outbound

This paper cites The duo of artificial intelligence and big data for Industry 4.0: applications, techniques, challenges, and futu re research directions,.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) The duo of artificial intelligence and big data for Industry 4.0: applications, techniques, challenges, and futu re research directions,

Reference 65

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source=pdf_text observed=2026-08-01T03:43:01.602215Z digest=sha256:1a6fb142981c54d705a0f3be2794a00fa3c16ce3cb58fd1d6f35a2a35b4437c3

Observation fb1f3fb5-6b33-40cb-b95f-831d7c0f7849 · outbound

This paper cites an unresolved cited work.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Unresolved cited work

Reference 2018

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no resolver link, observed 2026-08-01T03:43:01.554284Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=pdf_text observed=2026-08-01T03:43:01.554284Z digest=sha256:12a4491d8e369328cdc12efbeabcc3464f9573c8f59fdb692d020cfe265af5d5

Observation a44d60b3-fe66-4a31-9b12-047ed67bd6a7 · outbound

This paper cites an unresolved cited work.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Unresolved cited work

Reference 2022

Resolution
unresolved
no resolver link, observed 2026-08-01T03:43:01.290111Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=pdf_text observed=2026-08-01T03:43:01.290111Z digest=sha256:a9a33289017456d781d509ecd90626c3833d59de09401de0eeaaf654eeb3113e

Observation db6e6e1b-0fa7-4f49-b53f-04fce5a4942c · outbound

This paper cites an unresolved cited work.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Unresolved cited work

Reference 2024

Resolution
unresolved
no resolver link, observed 2026-08-01T03:43:01.302023Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=pdf_text observed=2026-08-01T03:43:01.302023Z digest=sha256:5b1a067ee52588f5e284f5ce82281af72e0af0ddc8e90d65ffb5c840f8ec7982

Observation 212d5fb4-9f6d-459a-9d73-73980f17887f · outbound

This paper cites an unresolved cited work.

Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD) Unresolved cited work

Reference 2025

Resolution
verified exact
doi, observed 2026-08-01T03:43:55.590285Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-14T06:32:32.682623+00:00.

source=pdf_text observed=2026-08-01T03:43:01.542525Z digest=sha256:b0a6733998d315ac0a9f6bc5876ea86a588e11781b8a5f750139f963327d3614

Pith citing papers

No inbound Pith citation observations are available.