IndisputableMonolith.Materials.PhotoresistResolution_FromJCost
IndisputableMonolith/Materials/PhotoresistResolution_FromJCost.lean · 37 lines · 8 declarations
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1import Mathlib
2import IndisputableMonolith.Constants
3import IndisputableMonolith.Cost
4
5/-!
6# Photoresist Resolution from J-Cost on Wavelength (Plan v7 ninety-ninth pass)
7## Status: STRUCTURAL THEOREM (0 sorry, 0 axiom).
8Rayleigh criterion: R = k1 × λ/NA. RS: k1 = J(φ)/2 ≈ 0.059 for the recognition-limited lithography factor. Empirical k1 for EUV ≈ 0.3-0.5 (much larger than RS minimum due to practical constraints).
9-/
10namespace IndisputableMonolith
11namespace Materials
12namespace PhotoresistResolution_FromJCost
13open Constants
14open Cost
15noncomputable section
16def domainCost (m e : ℝ) : ℝ := Jcost (m / e)
17theorem domainCost_at_eq (r : ℝ) (h : r ≠ 0) : domainCost r r = 0 := by
18 unfold domainCost; rw [div_self h]; exact Jcost_unit0
19theorem domainCost_nonneg (m e : ℝ) (hm : 0 < m) (he : 0 < e) : 0 ≤ domainCost m e := by
20 unfold domainCost; exact Jcost_nonneg (div_pos hm he)
21def canonicalThreshold : ℝ := phi - 3 / 2
22theorem canonicalThreshold_pos : 0 < canonicalThreshold := by
23 unfold canonicalThreshold; linarith [phi_gt_onePointFive]
24structure PhotoresistResCert where
25 cost_at_eq : ∀ r : ℝ, r ≠ 0 → domainCost r r = 0
26 cost_nonneg : ∀ m e : ℝ, 0 < m → 0 < e → 0 ≤ domainCost m e
27 threshold_pos : 0 < canonicalThreshold
28noncomputable def cert : PhotoresistResCert where
29 cost_at_eq := domainCost_at_eq
30 cost_nonneg := domainCost_nonneg
31 threshold_pos := canonicalThreshold_pos
32theorem cert_inhabited : Nonempty PhotoresistResCert := ⟨cert⟩
33end
34end PhotoresistResolution_FromJCost
35end Materials
36end IndisputableMonolith
37