F. Scholze

Identifiers

• name variant F. Scholze 0.60 · backfill

Papers (5)

1. Analytical modeling and 3D finite element simulation of line edge roughness in scatterometry physics.optics · 2012 · author #3
2. Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations physics.optics · 2011 · author #7
3. Metrology of EUV Masks by EUV-Scatterometry and Finite Element Analysis physics.optics · 2010 · author #4
4. Rigorous FEM-Simulation of EUV-Masks: Influence of Shape and Material Parameters physics.optics · 2006 · author #5
5. Characterising a Si(Li) detector element for the SIXA X-ray spectrometer physics.ins-det · 1997 · author #4

Mentions

• 1208.4220 #3 · backfill · confidence 0.70 F. Scholze
• 1110.4760 #7 · backfill · confidence 0.70 F. Scholze
• 1011.2665 #4 · backfill · confidence 0.70 F. Scholze

Frequent Coauthors

• S. Burger 4 shared papers
• C. Laubis 3 shared papers
• F. Schmidt 3 shared papers
• J. Pomplun 3 shared papers
• A. Kato 2 shared papers
• L. Zschiedrich 2 shared papers
• U. Dersch 2 shared papers
• Berlin) 1 shared papers
• G. Ulm (Physikalisch-Technische Bundesanstalt 1 shared papers
• R. Thornagel 1 shared papers
• S. Kraft 1 shared papers
• T. Tikkanen (Observatory 1 shared papers
• University of Helsinki) 1 shared papers