Derives optimal air-knife trajectories via two-staged least-squares gradient descent to achieve consistent drying rates at critical concentration for solution films on wafer-sized substrates, with limitations for non-monotonic initial thickness profiles.
Richards, Uli Lemmer, Gerardo Hernandez-Sosa, and Ulrich W
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Consistent control of drying rates of solution thin films on wafer-sized substrates by dynamic air-knife drying with optimal trajectories
Derives optimal air-knife trajectories via two-staged least-squares gradient descent to achieve consistent drying rates at critical concentration for solution films on wafer-sized substrates, with limitations for non-monotonic initial thickness profiles.