Inverse design produces foundry-compliant multilayer grating couplers for efficient multimode free-space to on-chip coupling that stay robust to fabrication imperfections with unchanged scaling laws.
Mack,Fundamental principles of optical lithography: the science of microfabrication(John Wiley & Sons, 2008)
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Multimode grating couplers via foundry-compliant inverse design
Inverse design produces foundry-compliant multilayer grating couplers for efficient multimode free-space to on-chip coupling that stay robust to fabrication imperfections with unchanged scaling laws.