Using diffraction from crystalline samples, the authors report a lower limit of 60% lateral coherence over 5% of the electron beam diameter in an SEM.
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2026 2verdicts
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A bilevel optimization framework smooths isotonic regression outputs into continuous piece-wise linear monotonic functions to recover marginal properties in both convex and non-convex cases.
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Determining Electron Beam Lateral Coherence in a Scanning Electron Microscope Using Electron Diffraction
Using diffraction from crystalline samples, the authors report a lower limit of 60% lateral coherence over 5% of the electron beam diameter in an SEM.
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Piece-wise linear isotonic regression
A bilevel optimization framework smooths isotonic regression outputs into continuous piece-wise linear monotonic functions to recover marginal properties in both convex and non-convex cases.