Room-temperature on-chip magnetic levitation of a ferromagnetic microsphere with librational eigenfrequencies above 10 kHz.
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Surface modification experiments on SiNx resonators indicate that hydroxyl groups contribute to mechanical dissipation and that silanization can reduce it.
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On-chip levitation of ferromagnetic microparticles
Room-temperature on-chip magnetic levitation of a ferromagnetic microsphere with librational eigenfrequencies above 10 kHz.
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HF Etching and Silanization: Evidence for the Role of Surface Hydroxyl Groups in Silicon Nitride Resonator Loss
Surface modification experiments on SiNx resonators indicate that hydroxyl groups contribute to mechanical dissipation and that silanization can reduce it.