Phase transformation in AlN layers of TiN-AlN multilayers above 3 nm thickness leads to stabilized mechanical properties and improved damage tolerance.
Holleck, Material selection for hard coatings, Journal of Vacuum Science & Technology A 4 (1986) 2661–2669
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A correlation of structural changes with nanomechanical properties in TiN-AlN multilayer films
Phase transformation in AlN layers of TiN-AlN multilayers above 3 nm thickness leads to stabilized mechanical properties and improved damage tolerance.