Vahedi \ and\ author M

author author V · 1995

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Pressure dependence of magnetron sputtering: 2D-RZ particle-in-cell and 1D fluid modeling

physics.plasm-ph · 2025-09-03

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Pressure dependence of magnetron sputtering: 2D-RZ particle-in-cell and 1D fluid modeling physics.plasm-ph · 2025-09-03 · unreviewed · ref 30