Reproduction of voltage-pressure dependence in DC magnetron sputtering using PIC and fluid models, explained by constant ionization rate requiring reduced electron energy at higher pressure.
Buyle ,\ title Simplified model for the d.c
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Pressure dependence of magnetron sputtering: 2D-RZ particle-in-cell and 1D fluid modeling
Reproduction of voltage-pressure dependence in DC magnetron sputtering using PIC and fluid models, explained by constant ionization rate requiring reduced electron energy at higher pressure.