Wafer-scale 3D SiN photonic circuits are demonstrated with 0.068-0.077 dB/cm waveguide loss and 6 mdB 3D transitions using E-CMP planarization and κ-engineered tapers, plus the first 3D high-Q cavities.
K.et al.Shortcuts to adiabaticity in waveg- uide couplers–theory and implementation.Advances in Physics: X6, 1894978 (2021)
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Building reliable 3D photonic integrated circuits and cavities at the wafer scale
Wafer-scale 3D SiN photonic circuits are demonstrated with 0.068-0.077 dB/cm waveguide loss and 6 mdB 3D transitions using E-CMP planarization and κ-engineered tapers, plus the first 3D high-Q cavities.