A methodology combining automated mode identification with multi-mode ringdown measurements quantifies intrinsic quality factor Q_intr in silicon nitride membranes, revealing thickness-dependent losses not captured by established models and explained via a phenomenological thickness-dependent loss m
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Determination of the intrinsic mechanical quality factor in high-stress silicon nitride resonators
A methodology combining automated mode identification with multi-mode ringdown measurements quantifies intrinsic quality factor Q_intr in silicon nitride membranes, revealing thickness-dependent losses not captured by established models and explained via a phenomenological thickness-dependent loss m