Wafer-scale 3D SiN photonic circuits are demonstrated with 0.068-0.077 dB/cm waveguide loss and 6 mdB 3D transitions using E-CMP planarization and κ-engineered tapers, plus the first 3D high-Q cavities.
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physics.optics 2years
2026 2verdicts
UNVERDICTED 2representative citing papers
Experimental demonstration of a self-configuring integrated photonic processor that sorts orthogonal input beams from random speckle and performs arbitrary manipulations over spatial and polarization dimensions.
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Building reliable 3D photonic integrated circuits and cavities at the wafer scale
Wafer-scale 3D SiN photonic circuits are demonstrated with 0.068-0.077 dB/cm waveguide loss and 6 mdB 3D transitions using E-CMP planarization and κ-engineered tapers, plus the first 3D high-Q cavities.
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Self-Configuring Universal Multichannel and Multidimensional Integrated Photonic Processing Engine
Experimental demonstration of a self-configuring integrated photonic processor that sorts orthogonal input beams from random speckle and performs arbitrary manipulations over spatial and polarization dimensions.