Confocal subsurface backscattering microscopy detects and classifies nanoscale threading dislocations in SiC substrates via confocal dark-field filtering and photoelastic scattering from strain-induced index perturbations.
et al.Threading dislocations in n- and p-type 4H–SiC material analyzed by etch- ing and synchrotron X-ray topography
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Confocal Subsurface Backscattering Microscopy for Optical Identification of Nanoscale Threading Dislocations in SiC Substrates
Confocal subsurface backscattering microscopy detects and classifies nanoscale threading dislocations in SiC substrates via confocal dark-field filtering and photoelastic scattering from strain-induced index perturbations.