Randomized benchmarking of single qubit gates in a 2D array of neutral atom qubits

We characterize single qubit Clifford gate operations with randomized benchmarking in a 2D array of neutral atom qubits, and demonstrate global and site selected gates with high fidelity. An average fidelity of $F^2=0.9983(14)$ is measured for global microwave driven gates applied to a 49 qubit array. Single site gates are implemented with a focused laser beam to Stark shift the microwaves into resonance at a selected site. At Stark selected single sites we observe $F^2=0.9923(7)$ and an average spin flip crosstalk error at other sites of $0.002(9)$.