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arxiv: 2106.05254 · v1 · pith:7JORDAPO · submitted 2021-06-09 · cond-mat.mes-hall · cond-mat.mtrl-sci

High mobility SiMOSFETs fabricated in a full 300mm CMOS process

Timothy N. Camenzind , Asser Elsayed , Fahd A. Mohiyaddin , Ruoyu Li , Stefan Kubicek , Julien Jussot , Pol Van Dorpe , Bogdan Govoreanu
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Iuliana Radu Dominik M. Zumb\"uhl
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classification cond-mat.mes-hall cond-mat.mtrl-sci
keywords qualityhighquantumcmosfabricatedfullinterfacemobility
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The quality of the semiconductor-barrier interface plays a pivotal role in the demonstration of high quality reproducible quantum dots for quantum information processing. In this work, we have measured SiMOSFET Hall bars on undoped Si substrates in order to investigate the quality of the devices fabricated in a full CMOS process. We report a record mobility of 17'500 cm2/Vs with a sub-10 nm oxide thickness indicating a high quality interface, suitable for future qubit applications. We also study the influence of gate materials on the mobilities and discuss the underlying mechanisms, giving insight into further material optimization for large scale quantum processors.

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