Scalable and deterministic construction of moir\'e superlattice in 2D materials using stressor films

Moir\'e superlattice in two-dimensional (2D) materials provides a powerful platform to engineer emergent electronic states, yet the construction of moir\'e superlattices remains lab-scale, involving much trial and error and with little control. Here, we demonstrate the construction of a heterostrain-induced moir\'e superlattice in transition metal dichalcogenides using a scalable process that deterministically induces strain to 2D materials. By applying patterned thin-film stressors and probing the resulting structures with scanning transmission electron microscopy, we directly resolve the induced heterostrain, lattice deformations, and stacking variations that produce the moir\'e superlattice. We find that uniaxial and biaxial heterostrain give rise to distinct moir\'e patterns, including stripes and distorted hexagonal patterns. With this approach, we create in-plane polar distortions and thus in-plane polarization at the domain boundaries of the moir\'e superlattice in MoS$_2$. The deterministic and scalable construction of moir\'e patterns using a well-established scalable process opens opportunities to design new moir\'e geometries in 2D materials.