A Percolative Model of Soft Breakdown in Ultrathin Oxides

The degradation of ultrathin oxide layers in the presence of a stress voltage is modeled in terms of two antagonist percolation processes taking place in a random resistor network. The resistance and leakage current fluctuations are studied by MonteCarlo simulations for voltages below the breakdown threshold. An increase of excess noise together with a noticeable non-Gaussian behavior is found in the pre-breakdown regime in agreement with experimental results.