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Atomic layer deposition of titanium nitride for quantum circuits

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arxiv 1808.06009 v2 pith:X7LX6AC2 submitted 2018-08-17 cond-mat.mes-hall physics.app-phquant-ph

classification cond-mat.mes-hallphysics.app-phquant-ph
keywords quantumfilmssystemsatomiccouplingdepositionhighhybrid
verification ladder T0 review T1 audit T2 compute T3 formal
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Superconducting thin films with high intrinsic kinetic inductance are of great importance for photon detectors, achieving strong coupling in hybrid systems, and protected qubits. We report on the performance of titanium nitride resonators, patterned on thin films (9-110 nm) grown by atomic layer deposition, with sheet inductances of up to 234 pH/square. For films thicker than 14 nm, quality factors measured in the quantum regime range from 0.4 to 1.0 million and are likely limited by dielectric two-level systems. Additionally, we show characteristic impedances up to 28 kOhm, with no significant degradation of the internal quality factor as the impedance increases. These high impedances correspond to an increased single photon coupling strength of 24 times compared to a 50 Ohm resonator, transformative for hybrid quantum systems and quantum sensing.

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  1. A scanning resonator for probing quantum coherent devices

    quant-ph 2025-06 conditional novelty 6.0 of 10

    A scanning high-Q superconducting resonator can couple coherently to transmon qubits and read out their spectra and coherence times without fabricating on-chip readout circuitry.

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