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Paper Citation Record · LEDGER

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review

As of 17 August 2026, this Paper Citation Record lists 66 of 66 outbound references and 0 inbound Pith citation observations for arXiv:2507.10983.

A citation records a reference. It does not transfer a finding from one paper to another.

pith.paper-citation-record.v1
2507.10983 v1

Coverage vector

measured 66 of 66 reference resolution

Typed states for the displayed outbound observations.

Source: paper_references, paper_reference_links, observed 2026-08-06T17:24:49.026338Z

measured 66 of 66 standing notices

One-hop event checks from named stored sources.

Source: scholarly_work_events, retraction_status_cache, observed 2026-08-17T06:30:58.91139+00:00

measured 0 of 0 inbound itemization

Pith citing papers itemized under the disclosed page cap.

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measured 0 of 1 external citation measurements

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Source: cited_works

Reference resolution

66 of 66 outbound references displayed

  • verified exact2
  • verified fuzzy55
  • unresolved9
  • parse uncertain0
  • malformed identifier0
  • metadata mismatch0

External citation measurements

No source-named external measurement is stored.

Outbound references

Observation 326d39fb-7726-4fc1-90d4-12e4e6b1e12a · outbound

This paper cites N., 2012.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review N., 2012

Reference 1

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.876178Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.740424Z digest=sha256:e6ba559e5afdc568e57069c9a23325ad7c18945841b7510655ef3c1237726a8b

Observation df8d66cc-d8f4-4275-a6dc-3b0e743779fc · outbound

This paper cites N., 2012, page 88, Chapter 3.1.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review N., 2012, page 88, Chapter 3.1

Reference 2

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raw_fallback, observed 2026-08-06T17:24:49.864256Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.744587Z digest=sha256:c2706c523348653b8ebee37f35fe2c28d0d4a17acdd3ca552cbde973edbf7c53

Observation 84e2701a-e9bc-4d91-be34-9b18457c287c · outbound

This paper cites N., 2012, page 135, Chapter 3.3.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review N., 2012, page 135, Chapter 3.3

Reference 3

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raw_fallback, observed 2026-08-06T17:24:49.852922Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.748460Z digest=sha256:5bcd50c4153273de8de710b6348b1f18ea44ccfc326527250378b6dda2b165a6

Observation 7ba33ccd-1c44-4108-99f5-7f8b81687eac · outbound

This paper cites Handbook of thin film deposition.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Handbook of thin film deposition

Reference 4

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.840586Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.752287Z digest=sha256:535a659034e8df7b0399084f54662c38cc6be921cec47fe2e363c42cfddd7114

Observation 080aa49e-9f05-4b03-8574-342ddddeb378 · outbound

This paper cites F., Butler, S.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review F., Butler, S

Reference 5

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.828991Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.757274Z digest=sha256:295c3fca9e6a7420dad13c33c0e229efe5282b5b259537322e25ce17332d5b50

Observation 6cabeb66-3bc8-4bde-bb73-98dba779d362 · outbound

This paper cites What is machine learning?.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review What is machine learning?

Reference 6

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.805196Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.768160Z digest=sha256:cb8a8c2e7e3237afb76e956ca552dc3f45f238e52cfcdbde04b78befd1d36b2f

Observation 6acfda9b-b6b7-41a7-9b8f-be53fb544d19 · outbound

This paper cites D., 2019.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review D., 2019

Reference 7

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.793615Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.775852Z digest=sha256:8675e174e7e7a8c94dfa1df11a7415f3b3ebc3b1e8e0f747fbe2167c4a8334c6

Observation d8da95ea-dfa1-44b5-9797-a009c9a23531 · outbound

This paper cites an unresolved cited work.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Unresolved cited work

Reference 8

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unresolved
raw_fallback, observed 2026-08-06T17:24:49.781244Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.779924Z digest=sha256:09444da015a12919e9023f31f89f7eaba13a1c6c594bcd55ab31142f14ff9b85

Observation 59bf0381-29ea-4b42-ad90-807fbdca7c7b · outbound

This paper cites Physics- informed machine learning.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Physics- informed machine learning

Reference 9

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.769261Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.783659Z digest=sha256:54123c0560ab42b4b4e7789d4f7322fb48865adea436aca7e15cffc9d3c55f4f

Observation 3bf8ee57-f969-4b7a-822d-58b32262e11b · outbound

This paper cites Physics-informed neural networks: A deep learning framework for solving forward and inverse problems in- volving nonlinear partial differential equations.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Physics-informed neural networks: A deep learning framework for solving forward and inverse problems in- volving nonlinear partial differential equations

Reference 10

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.757887Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.788341Z digest=sha256:aa5fddf5eb5768ce1114cbab65fb78299a5517660b32583334d462e850910c04

Observation bd25bb3b-08ea-40f7-9803-f225697a1ffe · outbound

This paper cites Introduction to semiconductor manufactur- ing technology.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Introduction to semiconductor manufactur- ing technology

Reference 11

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.747057Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.793226Z digest=sha256:7ab6733627e632f451f1e766c358fdd15329b0abbe28a77fb6149ceac4732658

Observation ea674ae3-4158-4ccb-aae8-7f55268c041b · outbound

This paper cites Moore’s law.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Moore’s law

Reference 12

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.735196Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.798641Z digest=sha256:5f21a242245d2ad16dae364cdba43e2d2bce5070d45309931381b2c20a9405e9

Observation d419c2ec-1bd2-4ea7-b990-03593878738b · outbound

This paper cites Euv lithography.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Euv lithography

Reference 13

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.723856Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.804440Z digest=sha256:95b2bc95633a48f06340fd4298bb77ebd89fb91a0b0c69c1932c87f7c6e64e10

Observation df0b2830-5798-4459-a294-6304b16855e4 · outbound

This paper cites Introduction to fin- fet: Formation process, strengths, and future exploration.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Introduction to fin- fet: Formation process, strengths, and future exploration

Reference 14

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.712521Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.809966Z digest=sha256:cdfcb4981bb149c4dc375511112624d33a822a95c16375d96103f23ff84487bd

Observation 1d538ad8-cd86-4a25-adb9-a1b2c7692141 · outbound

This paper cites Finfet ver- sus gate-all-around nanowire fet: Performance, scaling, and variability.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Finfet ver- sus gate-all-around nanowire fet: Performance, scaling, and variability

Reference 15

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.700170Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.816757Z digest=sha256:36faed2b7cdf9fbd260c9c715f0c2894165afb915a450b928fc67ab5449d3fb9

Observation 3051e1e4-ee15-4a9a-a8e1-903d87263355 · outbound

This paper cites High-k/metal gate innovations en- abling continued cmos scaling.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review High-k/metal gate innovations en- abling continued cmos scaling

Reference 16

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.688856Z

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source=pdf_text observed=2026-08-06T17:24:48.842516Z digest=sha256:8d8a93088dbae1ed76e782387e0b65106d1853227123b0f1b4a71008b3cba53f

Observation 45bbbeaa-4d12-47d6-94fd-a1d797316adc · outbound

This paper cites Recent advances and trends in advanced packaging.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Recent advances and trends in advanced packaging

Reference 17

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raw_fallback, observed 2026-08-06T17:24:49.676778Z

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source=pdf_text observed=2026-08-06T17:24:48.860399Z digest=sha256:6d3f75827443f42a445278d8942cdd49f8c25a56bf578d791a462826fcb5e213

Observation a385feb9-0e8d-4b9b-9385-d807c14065a8 · outbound

This paper cites Chapter 12 - structure and prop- erties of films.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Chapter 12 - structure and prop- erties of films

Reference 18

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raw_fallback, observed 2026-08-06T17:24:49.664336Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.863985Z digest=sha256:5468a6e7ee34cebaee0df18e38d9ea1594c705d877c357445d9e2fcf712356ea

Observation e7b77a75-eb4b-403a-8ef3-19a464a19c41 · outbound

This paper cites E., 2000.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review E., 2000

Reference 19

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raw_fallback, observed 2026-08-06T17:24:49.651939Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.866871Z digest=sha256:b49a78c10a3f5f27bbd4e954402ee56fbfa600ce1b808159acb7f46dfca5fe59

Observation 5068aa08-2ace-4133-b427-344981100d76 · outbound

This paper cites Chemical methods of thin film de- position: Chemical vapor deposition, atomic layer depo- sition, and related technologies.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Chemical methods of thin film de- position: Chemical vapor deposition, atomic layer depo- sition, and related technologies

Reference 20

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raw_fallback, observed 2026-08-06T17:24:49.640198Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.869821Z digest=sha256:cadac9c2f5d763c0e3c6fb3e7305f902f1a3190712227261d4668bd80934348c

Observation 54ccd40e-8782-4b28-82f9-c9c3c9c1665f · outbound

This paper cites Atomic layer deposi- tion and other thin film deposition techniques: from princi- ples to film properties.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Atomic layer deposi- tion and other thin film deposition techniques: from princi- ples to film properties

Reference 21

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raw_fallback, observed 2026-08-06T17:24:49.627897Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.873324Z digest=sha256:ec2d83a832722b2f60399e6d0d0f34b8dd8a3bbd9fab443296d90d51dcff07b3

Observation 9a9f80de-9ea0-4ed1-acba-d4f64c4fe5cc · outbound

This paper cites Chapter 3 - an overview of deep learning in big data, image, and signal processing in the modern digital age.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Chapter 3 - an overview of deep learning in big data, image, and signal processing in the modern digital age

Reference 22

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raw_fallback, observed 2026-08-06T17:24:49.614570Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.876579Z digest=sha256:26cab1ddcf5672bfa5dcc094e8cd14e8f2735f9c424383f1de4c349519173f8f

Observation 9df47f6b-eaf2-4a9c-ba96-758f77293c95 · outbound

This paper cites A comprehensive literature review of the applications of ai techniques through the lifecycle of indus- trial equipment.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review A comprehensive literature review of the applications of ai techniques through the lifecycle of indus- trial equipment

Reference 23

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raw_fallback, observed 2026-08-06T17:24:49.603875Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.880777Z digest=sha256:23e7f4cc85614fada0d1958b717791b6b090c7eda8002ec0d2bd0488bb5d75c1

Observation f9210478-148d-49ac-8539-48f0a807b945 · outbound

This paper cites Artificial intelligence and machine learning approaches to energy demand-side response: A systematic review.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Artificial intelligence and machine learning approaches to energy demand-side response: A systematic review

Reference 24

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raw_fallback, observed 2026-08-06T17:24:49.592780Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.884949Z digest=sha256:b04d27e89045356b3764677531f7fa5e8952c9be87ea506303c97a94d6ee0b68

Observation 56823f20-447f-444d-a173-ecb5d9a759c5 · outbound

This paper cites Deepsem- net: Enhancing sem defect analysis in semiconductor manufacturing with a dual-branch cnn-transformer archi- tecture.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Deepsem- net: Enhancing sem defect analysis in semiconductor manufacturing with a dual-branch cnn-transformer archi- tecture

Reference 25

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.580469Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.888549Z digest=sha256:41fbaa70538e936b160eae4213911475781114b8e07dc74bef67d3df730901d8

Observation e200259c-ff7e-4fdb-b689-267e4ad91dfe · outbound

This paper cites Image-driven machine learning for automatic characterization of grain size and distribution in smart vanadium dioxide thin films.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Image-driven machine learning for automatic characterization of grain size and distribution in smart vanadium dioxide thin films

Reference 26

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verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.569730Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.891427Z digest=sha256:aced3c337cc477e3b81bb5ff4c39be1909820c943804cd1da6f7d665f8d252e9

Observation cd4f7316-7f1e-4410-937d-c852285e1149 · outbound

This paper cites Deep transfer wasserstein adversarial network for wafer map defect recognition.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Deep transfer wasserstein adversarial network for wafer map defect recognition

Reference 27

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raw_fallback, observed 2026-08-06T17:24:49.558999Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.894319Z digest=sha256:149c27401ea7d70074422152377dbaa78354788fb6684df0bb8e2d7a7834067b

Observation fe9c432b-da5d-42d7-a2e7-03be2a9c5388 · outbound

This paper cites an unresolved cited work.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Unresolved cited work

Reference 28

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unresolved
raw_fallback, observed 2026-08-06T17:24:49.548945Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.897692Z digest=sha256:e1e533d2b0e04b9273fc30264a7b2192c35fa4a0f4e9a994e366afb4a126f9d2

Observation 1df7dbc5-d63b-43e1-b30e-9ca888f09cca · outbound

This paper cites Humana Press, Totowa, NJ, pp.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Humana Press, Totowa, NJ, pp

Reference 29

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raw_fallback, observed 2026-08-06T17:24:49.530115Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.904188Z digest=sha256:917145c49632e809a2f1c8e219209f630e4ab37150d4fb40bfe8faf530e3388b

Observation 4390176b-b4db-48bf-9f84-a916e101d4ad · outbound

This paper cites Machine learning-based model- ing and operation for ald of sio2 thin-films using data from a multiscale cfd simulation.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Machine learning-based model- ing and operation for ald of sio2 thin-films using data from a multiscale cfd simulation

Reference 30

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raw_fallback, observed 2026-08-06T17:24:49.520764Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.907775Z digest=sha256:2a27d3abbcbcfe863b0b4cab488cd516cdf4521f723738bff81d15396eb1449a

Observation 8ebdc118-cb94-4255-8da9-55c99aac9cd3 · outbound

This paper cites an unresolved cited work.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Unresolved cited work

Reference 31

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unresolved
raw_fallback, observed 2026-08-06T17:24:49.511669Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.911689Z digest=sha256:687d7f642653efa0e0ee7ecf06deff671e4d60b8361aa178c19d725a2e6129c8

Observation a892a3cb-89a2-4c4b-9a62-39d5e2f1fef9 · outbound

This paper cites an unresolved cited work.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Unresolved cited work

Reference 33

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unresolved
raw_fallback, observed 2026-08-06T17:24:49.478686Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.922957Z digest=sha256:5f5d23b7ee643b72f1430376bcfaddc355727b2f8c025d89e85cabd7a5e23cb5

Observation 4683a322-a880-48b2-a2c2-5ab832761bf4 · outbound

This paper cites Deep reinforcement learning: A brief survey.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Deep reinforcement learning: A brief survey

Reference 34

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raw_fallback, observed 2026-08-06T17:24:49.468505Z

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No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.926678Z digest=sha256:d4d21d010c403ecc2247871792e8e0f12c3a4845aaf9a486a9b9529e4948df96

Observation 3c991e2f-74be-459d-b5ea-88788994119c · outbound

This paper cites Exploring machine learning for semiconductor process optimization: A sys- tematic review.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Exploring machine learning for semiconductor process optimization: A sys- tematic review

Reference 35

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raw_fallback, observed 2026-08-06T17:24:49.458019Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.930142Z digest=sha256:6a8a0d0e55723ec79ed0170c5bbbb73baf0f87863a594a7f4e91b42cc3ad8e68

Observation f1589db9-0bb3-4078-9852-1dd935212ce5 · outbound

This paper cites Artifi- cial neural network discrimination for parameter estimation and optimal product design of thin films manufactured by chemical vapor deposition.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Artifi- cial neural network discrimination for parameter estimation and optimal product design of thin films manufactured by chemical vapor deposition

Reference 36

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.448624Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.933155Z digest=sha256:a9f4aec2f2e73d1214e931138ca3b3b55bc917388b5a7b0cf10cc3a4eda5aa0f

Observation 82a144d2-5b2e-4c92-8bd6-e00bb61ad8da · outbound

This paper cites an unresolved cited work.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Unresolved cited work

Reference 37

Resolution
unresolved
raw_fallback, observed 2026-08-06T17:24:49.489021Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.936676Z digest=sha256:c1fd5dbab31ce2ba789e25d6742a1b988700ea32c3738f6f88aa35e875e4649b

Observation e4d8ec54-60d0-4b09-adf0-f90da41016e8 · outbound

This paper cites Optimizing the chemical vapor deposition process of 4h–sic epitaxial layer growth with machine-learning-assisted multiphysics simulations.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Optimizing the chemical vapor deposition process of 4h–sic epitaxial layer growth with machine-learning-assisted multiphysics simulations

Reference 38

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.438613Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.940673Z digest=sha256:242174231eed6d4fd36c8e495e9011754f268d14a78a725f175b7c9f0b00a3e0

Observation bf3b1368-56df-4948-a3aa-a5a1e66d9066 · outbound

This paper cites When magnetron sput- tering deposition meets machine learning: Application to process anomaly detection.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review When magnetron sput- tering deposition meets machine learning: Application to process anomaly detection

Reference 39

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.428434Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.943849Z digest=sha256:b73c6c7024d928b629c50c0e1ff5635fc2553484c5f7a1c168fba0ec9aeaccc5

Observation 726ddccb-c6df-4c75-b2ef-91b5a080fdc5 · outbound

This paper cites A contextual sensor system for non-intrusive machine status and energy monitoring.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review A contextual sensor system for non-intrusive machine status and energy monitoring

Reference 40

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.417775Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.947012Z digest=sha256:c51ae57b5b2b591dc83fd149456f3049388497e4618d3c68b6bf55a89bdc83eb

Observation 4e2f9df8-4547-4903-9f05-6d105a36e591 · outbound

This paper cites Accelerating power flow calcu- lations in lv networks using physics-informed graph neural networks.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Accelerating power flow calcu- lations in lv networks using physics-informed graph neural networks

Reference 41

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.405663Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.950085Z digest=sha256:f72531435d039014c6c615c7077bdf95d5c5148ec5dff6b7e0f0a0977e6e652e

Observation 0d1a3d2d-7ab7-45cc-b966-b8470321693c · outbound

This paper cites Physical activation functions (pafs): An approach for more efficient induction of physics into physics-informed neural networks (pinns).

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Physical activation functions (pafs): An approach for more efficient induction of physics into physics-informed neural networks (pinns)

Reference 42

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.395948Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.953576Z digest=sha256:9c158042c24e708041686bd7e1ec56b4690d47dc0592f66bd12dc5f9db5b8d92

Observation a798f3ac-c260-4cc7-9386-96ec12f64369 · outbound

This paper cites Physics-Informed Machine Learning: A Survey on Problems, Methods and Applications.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Physics-Informed Machine Learning: A Survey on Problems, Methods and Applications

Reference 43

Resolution
unresolved
no resolver link, observed 2026-08-06T17:24:48.957034Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=pdf_text observed=2026-08-06T17:24:48.957034Z digest=sha256:4c7a72a5258e678ef7cdee93ae40f22a0d70f038d4ae2b9e45b06e0ee72f7d65

Observation 0dfde28b-beb9-405f-9eb7-9ad4c448a3df · outbound

This paper cites Scientific machine learning through physics–informed neural networks: Where we are and what’s next.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Scientific machine learning through physics–informed neural networks: Where we are and what’s next

Reference 44

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.384718Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.960714Z digest=sha256:a55a0aa27915cab54da5b845ef771f96d34ed226c43847f28ebbdc07b8f06605

Observation 419d546f-6c67-4856-bde8-4ecfcaa05b44 · outbound

This paper cites Hidden fluid mechanics: Learning velocity and pressure fields from flow visualizations.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Hidden fluid mechanics: Learning velocity and pressure fields from flow visualizations

Reference 45

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.374515Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.963500Z digest=sha256:bd8dab94b1cdb4e57e2e215071acfe0c123ba85b5a06f959f68041ae146caa4a

Observation ec88485a-663c-44af-b7fc-3b9b36fd241c · outbound

This paper cites Physics-informed deep neural networks for learning parameters and consti- tutive relationships in subsurface flow problems.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Physics-informed deep neural networks for learning parameters and consti- tutive relationships in subsurface flow problems

Reference 46

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.365203Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.966653Z digest=sha256:fe0ad37babe613115b4aab96459b7a72e1191db7fb22c6507026c5b3529fb117

Observation 9b65ab4d-b1f7-4a01-966e-4eabca5273bd · outbound

This paper cites an unresolved cited work.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Unresolved cited work

Reference 47

Resolution
unresolved
raw_fallback, observed 2026-08-06T17:24:49.355281Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.969585Z digest=sha256:021e673e451c335d4aa6f6b67a3f7a9d78df464ffc88223a16cc0e37e6551dd2

Observation 62c5cef7-d566-4d73-bc58-95782f5fa91f · outbound

This paper cites Understand- ing and mitigating gradient flow pathologies in physics- informed neural networks.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Understand- ing and mitigating gradient flow pathologies in physics- informed neural networks

Reference 48

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.334861Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.975300Z digest=sha256:886c309002ee5d85f0361803b7411a025631965db699f85a1423c744ded92d07

Observation b9067ee8-78db-4e49-a785-9e3d13508c17 · outbound

This paper cites L., and Sbalzarini, I.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review L., and Sbalzarini, I

Reference 49

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.322746Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.978649Z digest=sha256:6f56f65f76a6201014ff0ea432f601500abe14974644adacb9b10598495c2fa9

Observation 82c0c2ca-54ef-42ee-90e0-5838a5cdad8c · outbound

This paper cites Self- adaptive physics-informed neural networks.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Self- adaptive physics-informed neural networks

Reference 50

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.308751Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.984469Z digest=sha256:d19a6fd0bf96956c81d1414e0e3a0c207bc238ec735f9ff270c2b8f59455918b

Observation 506e3bd2-ee9d-47b0-b1d7-a21c0c0df6c3 · outbound

This paper cites A dual-dimer method for training physics-constrained neural networks with minimax architecture.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review A dual-dimer method for training physics-constrained neural networks with minimax architecture

Reference 51

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.298104Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.987571Z digest=sha256:713bf17420812fd8132602c8aaea6b2c139460579aa1ef60791a58340656fe1a

Observation 9b79f49d-66f9-4dc9-9789-9d914d203f28 · outbound

This paper cites The distribution of points in a cube and the approximate evaluation of integrals.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review The distribution of points in a cube and the approximate evaluation of integrals

Reference 52

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.288344Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.991250Z digest=sha256:a824bd156f2e9ce1b6aa61e17e847434e66329c408ed1c6d554d398ec6f76ec2

Observation af08178e-aa5c-4bf5-b667-ae84d72f421b · outbound

This paper cites On the efficiency of certain quasi-random sequences of points in evaluating multi- dimensional integrals.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review On the efficiency of certain quasi-random sequences of points in evaluating multi- dimensional integrals

Reference 53

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.277158Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.994775Z digest=sha256:6e72400b2c9b565f33f6532f874d41ce646213e03483d25bb5ed64c818c441ec

Observation 9b8b0e72-2ae7-4ceb-9b1d-ff19bd6a32af · outbound

This paper cites Monte carlo methods for solv- ing multivariable problems.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Monte carlo methods for solv- ing multivariable problems

Reference 54

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.266275Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.998649Z digest=sha256:0f83c7b719caf92468314424a462a4e00018d42ac3f5912e7cfa3660a20695ff

Observation 9bdcaa2e-4777-4c3e-8b95-e456c0bdcf58 · outbound

This paper cites A comparison of three methods for selecting values of input variables in the analysis of output from a computer code.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review A comparison of three methods for selecting values of input variables in the analysis of output from a computer code

Reference 55

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.254397Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:49.001766Z digest=sha256:e51d907d16fcf7b27fc46a4db403241c36a2cad41bfb34a8cea213ff74344179

Observation 4e3758eb-e8df-410f-8818-74a984c8712f · outbound

This paper cites Not all sam- ples are created equal: Deep learning with importance sam- pling.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Not all sam- ples are created equal: Deep learning with importance sam- pling

Reference 56

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.239951Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:49.005377Z digest=sha256:cff238c8ed0a17c95f2ccc5dac368f903e907e3f5fd3774f12a06271f974965a

Observation fcaf447d-cab9-4937-8243-2c61a9cb2b51 · outbound

This paper cites Variance Reduction in SGD by Distributed Importance Sampling.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Variance Reduction in SGD by Distributed Importance Sampling

Reference 57

Resolution
unresolved
no resolver link, observed 2026-08-06T17:24:49.009550Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=pdf_text observed=2026-08-06T17:24:49.009550Z digest=sha256:68f9fe7435ff551e14efa18ecc5ef3a52f1988849968dfb4b8f270b7d14c7593

Observation 7864032a-e17c-4945-be59-fc77e74e6bdf · outbound

This paper cites Efficient training of physics-informed neural networks via importance sampling.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Efficient training of physics-informed neural networks via importance sampling

Reference 58

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.222750Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:49.013391Z digest=sha256:bb9d1aeddb0173db7e782dce09691be18165e38cd719ca28cb095c6876746eb5

Observation eed1af24-47b0-49a5-9f62-acc5d94e844f · outbound

This paper cites Biased Importance Sampling for Deep Neural Network Training.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Biased Importance Sampling for Deep Neural Network Training

Reference 59

Resolution
unresolved
no resolver link, observed 2026-08-06T17:24:49.016554Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=pdf_text observed=2026-08-06T17:24:49.016554Z digest=sha256:76a2301a02785997d61eb0052443fa30fb4ab5fb944fecbbaf7d6c51811156ed

Observation a1a5b040-59ea-40ae-aacc-fc814100421a · outbound

This paper cites Das-pinns: A deep adaptive sampling method for solving high-dimensional partial differential equations.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Das-pinns: A deep adaptive sampling method for solving high-dimensional partial differential equations

Reference 60

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.212731Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:49.019952Z digest=sha256:0775ac70222e0a32f7a7d7faf1a3f243f40de1391aa838ec234e1c92d9d21588

Observation c728ec5b-6a21-46de-b0bf-87fa8e391197 · outbound

This paper cites Generative ad- versarial networks: An overview.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Generative ad- versarial networks: An overview

Reference 61

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.202619Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:49.022978Z digest=sha256:2696eecb62bc92db514e6536ddd75e9c73aa3c9006ade37b2813a407b1421ee5

Observation 7573598d-070f-4ea3-abe6-a8e224e055e0 · outbound

This paper cites When Graph Neural Network Meets Causality: Opportunities, Methodologies and An Outlook.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review When Graph Neural Network Meets Causality: Opportunities, Methodologies and An Outlook

Reference 62

Resolution
verified exact
local_arxiv, observed 2026-08-06T17:24:49.063277Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:49.026338Z digest=sha256:66f294825225303c66677f97dcd8d133267c95a6ccaf52e5e25d02c935042b7a

Observation 7c120bcb-88e3-47b2-ba34-57f16cf1df45 · outbound

This paper cites Automatic control in microelectronics manufactur- ing: Practices, challenges, and possibilities.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Automatic control in microelectronics manufactur- ing: Practices, challenges, and possibilities

Reference 2000

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.817637Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.762982Z digest=sha256:055ed9d49e42f565070f1bfa937b9f3c64cfe0bf373e77c6e62a9a2a9caacc18

Observation 49385967-42e8-40ba-b0a2-eb50048cf58e · outbound

This paper cites Microscopic modeling and optimal operation of plasma enhanced atomic layer deposition.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Microscopic modeling and optimal operation of plasma enhanced atomic layer deposition

Reference 2020

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.500589Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.915325Z digest=sha256:19acd3b3d1e9152e4d90381989f86a053992746d56d2993631a5d4063831ae89

Observation f8c56610-0115-45c3-8b91-46ba7e2cdc64 · outbound

This paper cites Physics-informed neural networks with hard con- straints for inverse design.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Physics-informed neural networks with hard con- straints for inverse design

Reference 2021

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.345570Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.972383Z digest=sha256:b625ce84a8a8476dab04bfeb778c5a1fa60b21b6c55bd1ce48680d90632d0e3f

Observation 2a691b75-85d2-4da8-9d27-2869cfb5263b · outbound

This paper cites Inverse dirichlet weighting enables reliable train- ing of physics-informed neural networks.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Inverse dirichlet weighting enables reliable train- ing of physics-informed neural networks

Reference 2023

Resolution
verified exact
raw_fallback, observed 2026-08-06T17:24:49.179692Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.981436Z digest=sha256:9c3c49da4985f48b9f438482d5b8c3453708cea25778ab4d9a300ceccdec8095

Observation 648a4136-a8c4-4073-8bd0-ee81614680fb · outbound

This paper cites Opinion mining by convolutional neural networks for maximizing discoverability of nanomaterials.

Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review Opinion mining by convolutional neural networks for maximizing discoverability of nanomaterials

Reference 2024

Resolution
verified fuzzy
raw_fallback, observed 2026-08-06T17:24:49.539602Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-06T17:24:48.900751Z digest=sha256:69668b2fbc68a4ed875bea11dd98b03c42941c576555ec1cb3ac0b2e3e10e15a

Pith citing papers

No inbound Pith citation observations are available.