Paper Citation Record · LEDGER

Wafer Defect Root Cause Analysis with Partial Trajectory Regression

As of 18 August 2026, this Paper Citation Record lists 36 of 36 outbound references and 0 inbound Pith citation observations for arXiv:2507.20357.

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pith.paper-citation-record.v1
2507.20357 v1

Coverage vector

measured 36 of 36 reference resolution

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One-hop event checks from named stored sources.

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Pith citing papers itemized under the disclosed page cap.

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A source-named dated measurement, never combined with another source.

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Reference resolution

36 of 36 outbound references displayed

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External citation measurements

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Outbound references

Observation 48c5f8b7-641a-4549-8c24-7acaf921de6e · outbound

This paper cites Multi-step virtual metrology for semiconductor manufacturing: A multilevel and regularization methods-based approach,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Multi-step virtual metrology for semiconductor manufacturing: A multilevel and regularization methods-based approach,

Reference 1

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:56.840249Z

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Observation d330f317-d289-45e5-966e-27184851c1c7 · outbound

This paper cites Virtual metrology on semiconductor manufacturing based on just-in- time learning,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Virtual metrology on semiconductor manufacturing based on just-in- time learning,

Reference 2

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:56.560293Z

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Observation 3d8de63f-3883-4519-82eb-1807e8520273 · outbound

This paper cites Variable selection under missing values and unlabeled data in semiconductor pro- cesses,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Variable selection under missing values and unlabeled data in semiconductor pro- cesses,

Reference 3

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:56.311882Z

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Observation 9da73bb3-15aa-488e-9b60-64e5cb53f2bb · outbound

This paper cites Sequence-aware inline measurement attribution for good-bad wafer diagnosis,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Sequence-aware inline measurement attribution for good-bad wafer diagnosis,

Reference 4

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:56.059255Z

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Observation bbb3a890-c095-43a7-b906-a27f39fa4fb5 · outbound

This paper cites Soft-sensing conformer: A curriculum learning-based convolutional transformer,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Soft-sensing conformer: A curriculum learning-based convolutional transformer,

Reference 5

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:55.837351Z

Source-reported events for the cited work

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Observation dba9d51b-fcd9-497b-8163-b4a5180161e4 · outbound

This paper cites Deep learning-based virtual metrology in multivariate time series,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Deep learning-based virtual metrology in multivariate time series,

Reference 6

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:55.692051Z

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Observation 37e62196-b322-44e4-a17d-f489ba217fa3 · outbound

This paper cites Deep learning-based sequence modeling for advanced process control in semiconductor manufacturing,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Deep learning-based sequence modeling for advanced process control in semiconductor manufacturing,

Reference 7

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:55.487207Z

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Observation 6a034f8c-ae46-44ec-b12a-55a2e45a38ab · outbound

This paper cites Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical pla- narization process,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical pla- narization process,

Reference 8

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:55.205188Z

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Observation ea144d45-1ef8-4a15-aba5-2aa55aca7a5d · outbound

This paper cites Virtual metrology of material removal rate using a one-dimensional convolutional neural network-based bidirec- tional long short-term memory network with attention,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Virtual metrology of material removal rate using a one-dimensional convolutional neural network-based bidirec- tional long short-term memory network with attention,

Reference 9

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:54.853950Z

Source-reported events for the cited work

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Observation 5a5b5e78-8820-472c-a93e-1e2749949887 · outbound

This paper cites Machine learning assisted new product setup,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Machine learning assisted new product setup,

Reference 10

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:54.578452Z

Source-reported events for the cited work

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Observation 54acb0a7-8b77-4119-ab31-83c88739ada2 · outbound

This paper cites Using explainable artificial intelligence to improve process quality: evidence from semiconductor manufacturing,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Using explainable artificial intelligence to improve process quality: evidence from semiconductor manufacturing,

Reference 11

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:54.386411Z

Source-reported events for the cited work

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Observation 1e07a5cf-a75e-445a-ade4-4706048e6c3e · outbound

This paper cites An expandable yield prediction framework using explainable artificial intelligence for semiconductor manufacturing,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression An expandable yield prediction framework using explainable artificial intelligence for semiconductor manufacturing,

Reference 12

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:54.177211Z

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Observation 670b64b2-4b5d-448c-85e4-033980f21b31 · outbound

This paper cites Enhanced yield prediction in semiconductor manufacturing: Innovative strategies for imbalanced sample management and root cause analysis,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Enhanced yield prediction in semiconductor manufacturing: Innovative strategies for imbalanced sample management and root cause analysis,

Reference 13

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:53.856672Z

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Observation d64a75e9-f507-465f-bcc4-812f88f29ddf · outbound

This paper cites Travel-time prediction using gaussian process regression: A trajectory-based approach,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Travel-time prediction using gaussian process regression: A trajectory-based approach,

Reference 14

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:53.611259Z

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Observation c7956e30-b5b5-4d87-927b-431dc529586b · outbound

This paper cites Trajectory regression on road networks,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Trajectory regression on road networks,

Reference 15

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:53.397431Z

Source-reported events for the cited work

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Observation 0714ae04-53b0-4c3f-905d-f8ff9aa0cd7c · outbound

This paper cites Root cause analysis in industrial manufacturing: A scoping review of current research, challenges and the promises of ai-driven approaches,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Root cause analysis in industrial manufacturing: A scoping review of current research, challenges and the promises of ai-driven approaches,

Reference 16

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:53.003029Z

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Observation dd1af6ff-82a5-436d-9665-44a959c33b9a · outbound

This paper cites A fast ramp-up framework for wafer yield improvement in semiconductor manufacturing systems,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression A fast ramp-up framework for wafer yield improvement in semiconductor manufacturing systems,

Reference 17

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:52.695406Z

Source-reported events for the cited work

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Observation b140d5d5-a8b0-47ee-bfa9-267650731fee · outbound

This paper cites Key feature identification for monitoring wafer-to-wafer variation in semiconductor manufacturing,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Key feature identification for monitoring wafer-to-wafer variation in semiconductor manufacturing,

Reference 18

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:52.374821Z

Source-reported events for the cited work

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Observation 928fff11-93d2-4039-9bee-3b4899ecb894 · outbound

This paper cites Improved yield prediction and failure analysis in semiconductor manufacturing with xgboost and shapley additive explanations models,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Improved yield prediction and failure analysis in semiconductor manufacturing with xgboost and shapley additive explanations models,

Reference 19

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:52.141145Z

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Observation 28794f1d-369f-4cd0-9681-67798341e7ea · outbound

This paper cites A novel approach to reducing testing costs and minimizing defect escapes using dynamic neighborhood range and shapley values,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression A novel approach to reducing testing costs and minimizing defect escapes using dynamic neighborhood range and shapley values,

Reference 20

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:51.816526Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 5605b4bb-f6d4-44dc-84cb-31e9fe8345b3 · outbound

This paper cites Efficient Estimation of Word Representations in Vector Space.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Efficient Estimation of Word Representations in Vector Space

Reference 21

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Observation 3ea370a8-3fa7-4318-8daf-13be6573e524 · outbound

This paper cites Attention is all you need,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Attention is all you need,

Reference 22

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Observation b542940c-0fcd-40f7-a705-0fbb85e1ec88 · outbound

This paper cites Data-driven optimization of accessory combinations for final testing processes in semiconductor manufacturing,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Data-driven optimization of accessory combinations for final testing processes in semiconductor manufacturing,

Reference 23

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Observation 6409b7c4-7beb-4b05-80d9-c1fcb14b7911 · outbound

This paper cites Graph representation and embedding for semiconductor manufacturing fab states,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Graph representation and embedding for semiconductor manufacturing fab states,

Reference 24

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:51.285881Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation d75be7de-0feb-47c2-88ec-6ec388f2b5d7 · outbound

This paper cites Explain- able AI: A brief survey on history, research areas, approaches and challenges,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Explain- able AI: A brief survey on history, research areas, approaches and challenges,

Reference 25

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:51.044191Z

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No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation da8907fe-0060-4469-8371-65c6ad3f778c · outbound

This paper cites A unified approach to interpreting model predictions,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression A unified approach to interpreting model predictions,

Reference 26

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Observation bf611b94-f0cc-4e9f-94e7-fdaa2e1f74f5 · outbound

This paper cites ‘Why Should I Trust You?’: Explaining the predictions of any classifier,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression ‘Why Should I Trust You?’: Explaining the predictions of any classifier,

Reference 27

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:50.390787Z

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Observation 2402d4e8-e905-428b-893a-9406372e8862 · outbound

This paper cites Grad-cam: visual explanations from deep networks via gradient-based localization,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Grad-cam: visual explanations from deep networks via gradient-based localization,

Reference 28

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:50.181778Z

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No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation f5385bec-fb56-4fea-a896-c9564037871c · outbound

This paper cites Xai for transformers: Better explanations through conservative propa- gation,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Xai for transformers: Better explanations through conservative propa- gation,

Reference 29

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:50.005892Z

Source-reported events for the cited work

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Observation 7bb23550-8dab-42bc-a4d8-31e8d6d9b226 · outbound

This paper cites Explainable Artificial Intelligence (XAI) on TimeSeries Data: A Survey.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Explainable Artificial Intelligence (XAI) on TimeSeries Data: A Survey

Reference 30

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Observation e8ca7ba7-b3c0-4847-939d-6655b66fc1a5 · outbound

This paper cites Molnar,Interpretable machine learning.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Molnar,Interpretable machine learning

Reference 31

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:49.767636Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 2f21ce07-9c0b-4ee5-865d-5e51cdda2049 · outbound

This paper cites Generative perturbation analysis for probabilis- tic black-box anomaly attribution,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Generative perturbation analysis for probabilis- tic black-box anomaly attribution,

Reference 32

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:49.436822Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Observation 2ee4758d-f4d2-425b-9cbc-053e780af61a · outbound

This paper cites Text classification using string kernels,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Text classification using string kernels,

Reference 33

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:49.219823Z

Source-reported events for the cited work

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Observation 80d52dcf-39b5-4b04-bc29-d1cb155ad431 · outbound

This paper cites Shawe-Taylor and N.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Shawe-Taylor and N

Reference 34

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Observation 6dfa65d7-eb44-4cd7-a26f-6af86e2f79fe · outbound

This paper cites Causal inference using potential outcomes: Design, modeling, decisions,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Causal inference using potential outcomes: Design, modeling, decisions,

Reference 35

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Observation d09c7a05-06ce-48a1-ae23-7710a7360403 · outbound

This paper cites Visualizing data usingt-SNE.,.

Wafer Defect Root Cause Analysis with Partial Trajectory Regression Visualizing data usingt-SNE.,

Reference 36

Resolution: verified fuzzy; raw_fallback, observed 2026-08-06T13:38:48.964821Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-18T06:34:40.430872+00:00.

Pith citing papers

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