Enhanced interaction between a mechanical oscillator and two coupled resonant electrical circuits

This paper reports result of calculation and experimental realization of an electromechanical system that consists of a high-Q mechanical oscillator parametrically coupled in the manner of a capacitive transducer with a RF circuit, which is in turn inductively coupled with another RF circuit. The system operates in the resolved sideband regime when the mechanical oscillator's frequency is larger than the electrical circuits' bandwidths. Using two coupled RF circuits allowed one to enhance the interaction between them and the mechanical oscillator which is one of flexural vibrational modes of a free-edge circular silicon wafer. Such a coupled electromechanical system can be used as a high-sensitive capacitive vibration sensor.