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Integrity report for Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2

A machine-verified record of the checks Pith has run against this paper: detector runs, findings, signed bundle events, and canonical identifiers.

arXiv:1408.1252 · pith:2014:DRLL4JBHPGYPP5EHQ4VK3OL4W6

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Paper page arXiv integrity.json bundle.json

Detector runs

Findings

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Signed record

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