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Paper Citation Record · LEDGER

TorchResist: Open-Source Differentiable Resist Simulator

As of 17 August 2026, this Paper Citation Record lists 31 of 31 outbound references and 0 inbound Pith citation observations for arXiv:2502.06838.

A citation records a reference. It does not transfer a finding from one paper to another.

pith.paper-citation-record.v1
2502.06838 v1

Coverage vector

measured 31 of 31 reference resolution

Typed states for the displayed outbound observations.

Source: paper_references, paper_reference_links, observed 2026-08-09T00:46:59.435217Z

measured 31 of 31 standing notices

One-hop event checks from named stored sources.

Source: scholarly_work_events, retraction_status_cache, observed 2026-08-17T06:30:58.91139+00:00

measured 0 of 0 inbound itemization

Pith citing papers itemized under the disclosed page cap.

Source: paper_references, paper_reference_links

measured 0 of 1 external citation measurements

A source-named dated measurement, never combined with another source.

Source: cited_works

Reference resolution

31 of 31 outbound references displayed

  • verified exact2
  • verified fuzzy23
  • unresolved6
  • parse uncertain0
  • malformed identifier0
  • metadata mismatch0

External citation measurements

No source-named external measurement is stored.

Outbound references

Observation ae10fe3c-79cc-4918-87e7-aa4bc051ff88 · outbound

This paper cites DeepSeek-V3 Technical Report.

TorchResist: Open-Source Differentiable Resist Simulator DeepSeek-V3 Technical Report

Reference 1

Resolution
unresolved
no resolver link, observed 2026-08-09T00:46:59.289400Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=pdf_text observed=2026-08-09T00:46:59.289400Z digest=sha256:d507675acb1e1bd412fd61ca7741121bd5f61bf2c982c7f04759635182e2f39d

Observation 07c3b979-67d3-49d6-966c-b903ed16288b · outbound

This paper cites GPT-4 Technical Report.

TorchResist: Open-Source Differentiable Resist Simulator GPT-4 Technical Report

Reference 2

Resolution
unresolved
no resolver link, observed 2026-08-09T00:46:59.295581Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=pdf_text observed=2026-08-09T00:46:59.295581Z digest=sha256:214e711927edac9a5f9380867030d5b54a91b84c14100892530f3b0f9d3f0b33

Observation ac342ff0-26bf-4a98-9307-22d6857405e4 · outbound

This paper cites MoreauPruner: Robust Pruning of Large Language Models against Weight Perturbations.

TorchResist: Open-Source Differentiable Resist Simulator MoreauPruner: Robust Pruning of Large Language Models against Weight Perturbations

Reference 3

Resolution
verified exact
local_arxiv, observed 2026-08-09T00:46:59.520014Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

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Observation 26c147eb-2dd9-4f3c-bd37-b344a4d0072c · outbound

This paper cites High-resolution image synthesis with latent diffusion models,.

TorchResist: Open-Source Differentiable Resist Simulator High-resolution image synthesis with latent diffusion models,

Reference 4

Resolution
unresolved
no resolver link, observed 2026-08-09T00:46:59.306712Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=pdf_text observed=2026-08-09T00:46:59.306712Z digest=sha256:ef3b626a8756f197841e5e20f02f54d857c5d279c23389b8c65bba6996bb6216

Observation 5162cba5-2511-4bdc-8ccd-54d898e7f83f · outbound

This paper cites Consistent Distributed Ranking of Generative Models via Kernel Distances.

TorchResist: Open-Source Differentiable Resist Simulator Consistent Distributed Ranking of Generative Models via Kernel Distances

Reference 5

Resolution
verified exact
local_arxiv, observed 2026-08-09T00:46:59.497302Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.311826Z digest=sha256:83bea89fa2c1f8c7570bfa158e6cbce6dbeb26927f390a42cc0cdfdc70c1a3e6

Observation d8c9c81e-e1b7-4c78-9962-4bc44f9fd97e · outbound

This paper cites an unresolved cited work.

TorchResist: Open-Source Differentiable Resist Simulator Unresolved cited work

Reference 6

Resolution
unresolved
raw_fallback, observed 2026-08-09T00:46:59.953310Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.317121Z digest=sha256:f4d2439a75193720c31552fa1a4989c26c727698cef037c95cbd0f1d96d09c47

Observation ad4987c7-6bb5-47fb-99af-f08a5e6466d8 · outbound

This paper cites Iccad-2013 cad contest in mask optimization and benchmark suite,.

TorchResist: Open-Source Differentiable Resist Simulator Iccad-2013 cad contest in mask optimization and benchmark suite,

Reference 7

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.937503Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.322377Z digest=sha256:c8379c4df0d9d9f3bfcf6029d3e96c2e75778eb0d17037653ab36a54e452e406

Observation db637207-61b4-4efb-933f-493e6dfc0ae8 · outbound

This paper cites Open-source differentiable lithography imaging framework,.

TorchResist: Open-Source Differentiable Resist Simulator Open-source differentiable lithography imaging framework,

Reference 8

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.921447Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.327029Z digest=sha256:81ea7bc80e844703ce266f9d0fc777770dcce249d40061880ed41f65e7067792

Observation ac6f6377-a4d1-4e93-92db-395aa81ee657 · outbound

This paper cites Fuilt: Full chip ilt system with boundary healing,.

TorchResist: Open-Source Differentiable Resist Simulator Fuilt: Full chip ilt system with boundary healing,

Reference 9

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.905334Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.331512Z digest=sha256:4276c7150468ad2ef63d1d85ae2eb8af624ad203bb2b1714331986e6e8b6539e

Observation b56e06e2-7043-4d13-b463-954cda598e11 · outbound

This paper cites Accurate lithography simulation model based on convolutional neural networks,.

TorchResist: Open-Source Differentiable Resist Simulator Accurate lithography simulation model based on convolutional neural networks,

Reference 10

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.889215Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.336269Z digest=sha256:0206bc7387b9af04cecc7abe2813f88b979ed4a796a16d96351e4a98dd07d581

Observation f903fd15-0cbf-4865-a84b-f856827abefe · outbound

This paper cites an unresolved cited work.

TorchResist: Open-Source Differentiable Resist Simulator Unresolved cited work

Reference 11

Resolution
unresolved
raw_fallback, observed 2026-08-09T00:46:59.873781Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.340803Z digest=sha256:b26f39665d27bfc15ef0564cbb9bc14f278856a83ba7741d9c85602f5960677c

Observation 8ccb1ba9-a9df-43bd-b3a5-270817d3fe31 · outbound

This paper cites True process variation aware optical proximity correction with variational lithography modeling and model calibration,.

TorchResist: Open-Source Differentiable Resist Simulator True process variation aware optical proximity correction with variational lithography modeling and model calibration,

Reference 12

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.857019Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.345500Z digest=sha256:b1a8b31d009c84113416a76711cf95a9e015a4503a8b9c142b89c529c9b379a4

Observation 7a320ea0-c6e6-42e0-b1a6-f2bfee43d5cc · outbound

This paper cites Diffpattern: Layout pattern generation via discrete diffusion,.

TorchResist: Open-Source Differentiable Resist Simulator Diffpattern: Layout pattern generation via discrete diffusion,

Reference 13

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.841353Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.350456Z digest=sha256:dc945a69c4315bb79d3279882bfa8263f8bf977119d7c836ff41649ab17ea6c7

Observation 80dbcc0e-a28e-417d-9a4b-4e3d4061225c · outbound

This paper cites Chatpattern: Layout pattern cus- tomization via natural language,.

TorchResist: Open-Source Differentiable Resist Simulator Chatpattern: Layout pattern cus- tomization via natural language,

Reference 14

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.825031Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.355465Z digest=sha256:27271f45cc93da1cffb804cb630486da7f3fac1da26de0cc9d1ff27f8d684170

Observation 5cb3db03-ef2a-45e7-be11-dfff1cdc22e4 · outbound

This paper cites Ultra-fast source mask optimization via conditional discrete diffusion,.

TorchResist: Open-Source Differentiable Resist Simulator Ultra-fast source mask optimization via conditional discrete diffusion,

Reference 15

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.809360Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.360193Z digest=sha256:5d4aabe4e5c0f0b53b81ae30f51d57c9184f2063e0a58d2d9eaf4b2ba001a7ff

Observation 73a893a9-2360-4f2f-ad62-efb124a3ebd9 · outbound

This paper cites Characterization of positive photoresist,.

TorchResist: Open-Source Differentiable Resist Simulator Characterization of positive photoresist,

Reference 16

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.793791Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.364696Z digest=sha256:bd406c245994da1325617520ab22f2df2afe3424a18b6f9e7b65aa3d6166e744

Observation 56d5288b-f42b-4e4b-911d-c819ce7b723a · outbound

This paper cites Development of positive photoresists,.

TorchResist: Open-Source Differentiable Resist Simulator Development of positive photoresists,

Reference 17

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.777583Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.369378Z digest=sha256:fa7a1911185f167659ed72e447737f9732c11c798bda752cbfe1bdbadeb9eb2f

Observation 084e9bb5-2c03-4b12-b2a6-6c9a8d7d16ff · outbound

This paper cites Fast-marching level-set methods for three-dimensional photolithography development,.

TorchResist: Open-Source Differentiable Resist Simulator Fast-marching level-set methods for three-dimensional photolithography development,

Reference 18

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.762252Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.373971Z digest=sha256:51f69a2e083f7564962a501d4b644c5241482682c5ccd6a19e1f465ffcb76872

Observation 7e5416e1-f225-4b28-96af-e406832dffce · outbound

This paper cites Pursuit of lower critical dimensional uniformity in euv resists,.

TorchResist: Open-Source Differentiable Resist Simulator Pursuit of lower critical dimensional uniformity in euv resists,

Reference 19

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.747537Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.378548Z digest=sha256:c2a5e1a5e5f4619525832b623e902220d4aa00d27660b3a2375d8b61637ef864

Observation 759cbd80-d31d-4409-9c1e-ebe3996112f3 · outbound

This paper cites The lithographic impact of resist model parameters,.

TorchResist: Open-Source Differentiable Resist Simulator The lithographic impact of resist model parameters,

Reference 20

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.731860Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.383382Z digest=sha256:65219c4516be6bc34b47a350c1fb6b130c341cc42535f03bafc595f3d50183c6

Observation 3b829df4-742d-42ef-82e8-8babc45b093e · outbound

This paper cites Chemically amplified resists resolving 25 nm 1: 1 line: space features with euv lithography,.

TorchResist: Open-Source Differentiable Resist Simulator Chemically amplified resists resolving 25 nm 1: 1 line: space features with euv lithography,

Reference 21

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.716757Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.388330Z digest=sha256:17b21071d66258636efa26ec279d6049525e1ff928ea28ff327921e6bec0b660

Observation 5a66bb74-953b-4f4b-93f8-890dfc096e00 · outbound

This paper cites Materials challenges for sub-20-nm lithography,.

TorchResist: Open-Source Differentiable Resist Simulator Materials challenges for sub-20-nm lithography,

Reference 22

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.700048Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.393112Z digest=sha256:bbd0088c4ebf7d3b35886ca42eeabf871a9ba61f1e188b6e7a9c1706298d0bf5

Observation 768e2940-c4ba-4839-b606-33865c757a57 · outbound

This paper cites Variable-threshold resist models for lithography simulation,.

TorchResist: Open-Source Differentiable Resist Simulator Variable-threshold resist models for lithography simulation,

Reference 23

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.684060Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.397736Z digest=sha256:d7ab7d195bcf540322b8247117b8a6545f281d385dfc90f4588c45883fb48b56

Observation ffffd9ea-c04c-4d9e-9ec5-4303a42e02e2 · outbound

This paper cites Neural-network-based approach to resist modeling and opc,.

TorchResist: Open-Source Differentiable Resist Simulator Neural-network-based approach to resist modeling and opc,

Reference 24

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.668034Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.402585Z digest=sha256:5908951d1919b3feb3a7f2eb4661f4ef14bfe7a508594a35bf2d8e9b00072864

Observation 3f86a116-dde3-43f1-a5e7-25ed33818411 · outbound

This paper cites TensorFlow: Large-scale machine learning on heterogeneous systems,.

TorchResist: Open-Source Differentiable Resist Simulator TensorFlow: Large-scale machine learning on heterogeneous systems,

Reference 25

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.651288Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.407137Z digest=sha256:c719a59169259f564446030a22ac1ca2d70699b72b7afc08b8a7dc5ee90817c5

Observation 9cd2b576-82f2-4d4a-bb71-11f9c64cd89a · outbound

This paper cites Pytorch: An imperative style, high-performance deep learning library,.

TorchResist: Open-Source Differentiable Resist Simulator Pytorch: An imperative style, high-performance deep learning library,

Reference 26

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.633807Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.412063Z digest=sha256:89463a4850464a1c663e2c2ec75355e29ee84a802a624353b4beaea5f74ed0f0

Observation 7fab2a1d-a1b2-4996-866e-1be5673cc91c · outbound

This paper cites JAX: composable transformations of Python+NumPy programs,.

TorchResist: Open-Source Differentiable Resist Simulator JAX: composable transformations of Python+NumPy programs,

Reference 27

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.617696Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.416752Z digest=sha256:770da16dc765710bbeeabe31221e9b7181b7b1d752ffbeb2296af9f6c6f6d0e2

Observation 449ae911-314c-458b-a07b-7c301afc0571 · outbound

This paper cites Level set methods: an overview and some recent results,.

TorchResist: Open-Source Differentiable Resist Simulator Level set methods: an overview and some recent results,

Reference 28

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.601260Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.421394Z digest=sha256:82d2f74e3fa1c90fe759692bef487ae101d8cc20667851cd8e8ef5ff67b30884

Observation 41665f63-6a7e-44c2-aecd-0e4e49375272 · outbound

This paper cites A fast path-based method for 3-d resist development simulation,.

TorchResist: Open-Source Differentiable Resist Simulator A fast path-based method for 3-d resist development simulation,

Reference 29

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.585106Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.425916Z digest=sha256:a32c5c09c7894d4a8d527b9afde2c41cc03a1cb8a4710e88dfd4a58291a876b0

Observation 62838294-3052-49ef-9774-911c65e6e770 · outbound

This paper cites Lithobench: Benchmarking ai computational lithog- raphy for semiconductor manufacturing,.

TorchResist: Open-Source Differentiable Resist Simulator Lithobench: Benchmarking ai computational lithog- raphy for semiconductor manufacturing,

Reference 30

Resolution
verified fuzzy
raw_fallback, observed 2026-08-09T00:46:59.568742Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-17T06:30:58.91139+00:00.

source=pdf_text observed=2026-08-09T00:46:59.430675Z digest=sha256:5dbec3b416dbf9ffe949a7e0237aa3cdcfdc8488901f6fffdc327a6176449040

Observation 36aa35e9-eefb-4e71-b22e-ea95620049c5 · outbound

This paper cites Adam: A Method for Stochastic Optimization.

TorchResist: Open-Source Differentiable Resist Simulator Adam: A Method for Stochastic Optimization

Reference 31

Resolution
unresolved
no resolver link, observed 2026-08-09T00:46:59.435217Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=pdf_text observed=2026-08-09T00:46:59.435217Z digest=sha256:57a2b71394f7a85c61326fe999f5836ccff86b0871256dfaf17d3bdab1844489

Pith citing papers

No inbound Pith citation observations are available.