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Paper Citation Record · LEDGER

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach

As of 23 August 2026, this Paper Citation Record lists 34 of 34 outbound references and 1 inbound Pith citation observation for arXiv:2411.08149.

A citation records a reference. It does not transfer a finding from one paper to another.

pith.paper-citation-record.v1
2411.08149 v1

Coverage vector

measured 34 of 34 reference resolution

Typed states for the displayed outbound observations.

Source: paper_references, paper_reference_links, observed 2026-08-12T21:58:40.636973Z

measured 35 of 35 standing notices

One-hop event checks from named stored sources.

Source: scholarly_work_events, retraction_status_cache, observed 2026-08-23T06:30:58.430688+00:00

measured 1 of 1 inbound itemization

Pith citing papers itemized under the disclosed page cap.

Source: paper_references, paper_reference_links, observed 2026-08-15T18:07:37.104297Z

measured 0 of 1 external citation measurements

A source-named dated measurement, never combined with another source.

Source: pith, observed 2026-08-15T18:07:37.961493Z

Reference resolution

34 of 34 outbound references displayed

  • verified exact0
  • verified fuzzy25
  • unresolved9
  • parse uncertain0
  • malformed identifier0
  • metadata mismatch0

External citation measurements

No source-named external measurement is stored.

Outbound references

Observation 99f77766-fa8d-4537-9f55-567dfca69841 · outbound

This paper cites (2023) Gpt-4 technical report.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach (2023) Gpt-4 technical report

Reference 1

Resolution
unresolved
no resolver link, observed 2026-08-12T21:58:40.165091Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=arxiv_source observed=2026-08-12T21:58:40.165091Z digest=sha256:9a7d4405fb24c521a6c4478ea6b4bf013de360142ebd1606e4f2ee9fc0df2795

Observation 945c6e35-2e4e-4ecb-8c77-ef98b5691a56 · outbound

This paper cites Structural and Multidisciplinary Optimization 53:935--952.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Structural and Multidisciplinary Optimization 53:935--952

Reference 2

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.916362Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.169802Z digest=sha256:2a435d53e415b8a5599541b2018221a15f4bb51c1e4c4299c1a2bd33007fef0e

Observation db43d0d6-e455-4b73-9814-068b1c9bd3b4 · outbound

This paper cites Advances in Engineering Software p 102662, doi:https://doi.org/10.1016/j.advengsoft.2019.03.005.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Advances in Engineering Software p 102662, doi:https://doi.org/10.1016/j.advengsoft.2019.03.005

Reference 3

Resolution
unresolved
no resolver link, observed 2026-08-12T21:58:40.174313Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=arxiv_source observed=2026-08-12T21:58:40.174313Z digest=sha256:bacc78f0d002848eacd84bda2681a8420b9e38f9b4da644a7e0dadda02e03821

Observation aa4f38ce-374a-4bbd-92f4-a451b8d82763 · outbound

This paper cites Vacuum 41(7-9):1957--1961.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Vacuum 41(7-9):1957--1961

Reference 4

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.901269Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.179471Z digest=sha256:b1a129cc60f77d1bd9aa7f59246bfed0015583e3b24a6d5a7391e0891d407a2f

Observation cbf6172a-8161-477b-8492-0851cc9f9834 · outbound

This paper cites Acta numerica 9:1--38.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Acta numerica 9:1--38

Reference 5

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.886403Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.184549Z digest=sha256:21d0984539752f1fb9981d4cbbf90b5c4d40c5301353ae9c4d450313fd17aad3

Observation 3490497c-3597-42ee-a0ca-9ce9a7d5f7b4 · outbound

This paper cites European Journal of Industrial Engineering 4 5(3):254--271.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach European Journal of Industrial Engineering 4 5(3):254--271

Reference 6

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.871740Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.189371Z digest=sha256:d7d4da659fffe3fa276585d65b40e43f85c4258dcb44758d2376d89b17f8819b

Observation 568173d2-cf54-4da1-9fa3-a745d172a73f · outbound

This paper cites arXiv preprint arXiv:160907196.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach arXiv preprint arXiv:160907196

Reference 7

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.855697Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.194624Z digest=sha256:6bf77038c936c41eddfa14ec9a4564ca91bc910435e80291bc341e89742d141a

Observation b0b1ed34-ca1e-45a3-bfbb-85d337a4d945 · outbound

This paper cites Aerospace Science and Technology 75:74--87.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Aerospace Science and Technology 75:74--87

Reference 8

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.721250Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.199150Z digest=sha256:a82332ebb32515cd68ea75fad3be96aa42014a45c52eeead1e7156ccbaf5ab07

Observation fd53144e-0627-45c2-9b45-36873de177a3 · outbound

This paper cites Journal of Intelligent Manufacturing 35(2):925--935.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Journal of Intelligent Manufacturing 35(2):925--935

Reference 9

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.583803Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.203772Z digest=sha256:722048f4269df2fcefb0a94d4d5e5b4db14f62075d647fcc9d450730bbfe17ac

Observation e4c05b84-1b64-441a-a95c-5a22d6a499f7 · outbound

This paper cites Journal of the Royal Statistical Society: Series B (Statistical Methodology) 63(3):425--464.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Journal of the Royal Statistical Society: Series B (Statistical Methodology) 63(3):425--464

Reference 10

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.568384Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.208237Z digest=sha256:a965887e77fa67f961e1fb5b357c77640ef51e8720f7a7fc95a186725933313b

Observation c5405d5a-b8d0-4aed-9a65-54b91b0c85d5 · outbound

This paper cites Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 24(6):2509--2517.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 24(6):2509--2517

Reference 11

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.553579Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.216603Z digest=sha256:e011c30a5dd453e01775885ff116db46ec5cdc9bebc3047343afdd0ef08048e4

Observation aed555e0-6b91-4a6b-89c4-bf69734135b0 · outbound

This paper cites Journal of the Southern African Institute of Mining and Metallurgy 52(6):119--139.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Journal of the Southern African Institute of Mining and Metallurgy 52(6):119--139

Reference 12

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.525412Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.221669Z digest=sha256:849ae28fb416e0fd0a5aa57a8bc474ad03c5b4ca91f1a2f49023a9f1b4e35588

Observation 07ad25e8-e881-42d6-97d4-e42ea2dd0e2f · outbound

This paper cites PhD thesis, Universit \'e Paris-Diderot-Paris VII.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach PhD thesis, Universit \'e Paris-Diderot-Paris VII

Reference 13

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.402572Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.226565Z digest=sha256:650816e73138e3c094c2687e5bedd647ff285043f720e0fdcc1ab6a86a61c18a

Observation c7e65eb7-b400-4d1b-848a-671454fea7cf · outbound

This paper cites AIAA Journal 60(7):4413--4427.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach AIAA Journal 60(7):4413--4427

Reference 14

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.329910Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.280413Z digest=sha256:ba0762990eb12c585b68646cb38735e796f57143911f6572ca6311eb00b98be8

Observation 94322827-ce43-4d78-a911-d08d39b81544 · outbound

This paper cites Heat and Mass Transfer 54:115--123.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Heat and Mass Transfer 54:115--123

Reference 15

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.313293Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.338997Z digest=sha256:0644a5a26cffbba11ea48a2b9aee56f8dcd396d813d9b8374c071c1129947b12

Observation d248bba7-8205-45cd-a1b7-9a6109d31d32 · outbound

This paper cites Economic geology 58(8):1246--1266.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Economic geology 58(8):1246--1266

Reference 16

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.296166Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.437114Z digest=sha256:3e8c9ff7e30bcbaa711cdac7c4fd9220759cf25bb0ec9a9bfc70a27e626de5aa

Observation b8449627-9ae0-473c-b469-79f721c4b855 · outbound

This paper cites John Wiley & Sons.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach John Wiley & Sons

Reference 17

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.281460Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.442587Z digest=sha256:abb792ff7cb3ee4c818a9c5c55a09f547a6fc758de5b3d8b42c09c6c1bd5dc1d

Observation b0993bc5-9101-4d01-83e6-3cafa9249550 · outbound

This paper cites In: 23rd fluid dynamics, plasmadynamics, and lasers conference, p 2906.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach In: 23rd fluid dynamics, plasmadynamics, and lasers conference, p 2906

Reference 18

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.199910Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.448557Z digest=sha256:e4f028a9b7946504dd9b2d1dbbd9e6a17d97b4b8e0e4e97cd6d27a24cfbd6335

Observation c5d557d3-14df-48df-9341-d5ae5c74270e · outbound

This paper cites Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 10(4):1863--1868.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 10(4):1863--1868

Reference 19

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.058541Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.453612Z digest=sha256:8a8753971ee7ded962c2b5e9b0e52deef4b10fc0d25b5dcedb623488fa34cbd7

Observation 281ade88-6ca5-442f-ac5f-8bebe7ce6e7d · outbound

This paper cites Siam Review 60(3):550--591.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Siam Review 60(3):550--591

Reference 20

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:41.007825Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.459118Z digest=sha256:57b1812c2c676a27727c943a688d69f9161c6612544355a3575302e8f3c1d774

Observation 6cff024c-6c7d-4dca-953f-084f4948d412 · outbound

This paper cites nature 323(6088):533--536.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach nature 323(6088):533--536

Reference 21

Resolution
unresolved
no resolver link, observed 2026-08-12T21:58:40.463480Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=arxiv_source observed=2026-08-12T21:58:40.463480Z digest=sha256:ee9137fcc24df05687bf93a202bfdc58416c4fa0d9c7b19b6c5ee224f00fc4eb

Observation b720f0ec-1d32-4c4f-b17a-77f7de0d342e · outbound

This paper cites In: AIAA SCITECH 2024 Forum, p 0013.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach In: AIAA SCITECH 2024 Forum, p 0013

Reference 22

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:40.983901Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.467719Z digest=sha256:0ba48f9d6465224c56b2e5193d0b4d742cfd9379efbc121c48637e001db3256d

Observation 5601eaab-80dc-4533-a02f-60ab81abba10 · outbound

This paper cites In: Proceedings of the 1968 23rd ACM national conference, pp 517--524.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach In: Proceedings of the 1968 23rd ACM national conference, pp 517--524

Reference 23

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:40.969581Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.471809Z digest=sha256:f1b3990ffac498595da045d9d8bca246a7ffe1c42238bb7c162e84aeef2b4543

Observation 9991be8b-3966-4527-a78a-bf6dc5ba2d3f · outbound

This paper cites Computer Methods in Applied Mechanics and Engineering 361:112732.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Computer Methods in Applied Mechanics and Engineering 361:112732

Reference 24

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:40.953673Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.476398Z digest=sha256:b76ac5bcc760aed69042dadfa041c289cf873ddfb179eb2d6d2087f3f6e2937a

Observation 4ad65a40-c52e-4021-969f-b91c310ca659 · outbound

This paper cites Computational intelligence and neuroscience 2018(1):7068349.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Computational intelligence and neuroscience 2018(1):7068349

Reference 25

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:40.939088Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.481214Z digest=sha256:7d87b25923376f5d772290849d2fa5e970beda10765a3aa7e363f893ce1559d1

Observation 2a997b2a-07e9-427d-af1e-ddd9d96595b4 · outbound

This paper cites Proceedings of the IEEE 108(4):478--482.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Proceedings of the IEEE 108(4):478--482

Reference 26

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:40.924211Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.485382Z digest=sha256:33c3d75951702a7ee5ed730cafe9359439920dc5ea89aa6a19deb2077b9e4fc1

Observation f6389c1e-520e-4834-b90c-dd2492e4c130 · outbound

This paper cites Journal of Vacuum Science & Technology B 41(4).

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Journal of Vacuum Science & Technology B 41(4)

Reference 27

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:40.909197Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.490032Z digest=sha256:ba19a34329e814b612c37f3f614993c9df5fa21d48984582039e15ab324d0cfd

Observation bde82f67-7af5-4526-b6d0-2ec8434da850 · outbound

This paper cites Japanese Journal of Applied Physics 63(4):04SP72.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach Japanese Journal of Applied Physics 63(4):04SP72

Reference 28

Resolution
verified fuzzy
raw_fallback, observed 2026-08-12T21:58:40.776940Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.

source=arxiv_source observed=2026-08-12T21:58:40.494171Z digest=sha256:3245a16caccf1626544a092a082c8256b9723f44d45f416b5354aad417709e35

Observation 576b188f-f274-4afd-8434-c613e1158cb4 · outbound

This paper cites , " * write output.state after.block = add.period write newline.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach , " * write output.state after.block = add.period write newline

Reference 29

Resolution
unresolved
no resolver link, observed 2026-08-12T21:58:40.498522Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=arxiv_source observed=2026-08-12T21:58:40.498522Z digest=sha256:e0f4b3af90a1a6620483b0039dec3194700c17ba73f77e1cd50cba900f5adb33

Observation a8fdf109-b8d1-494e-91c6-4ef941aae996 · outbound

This paper cites write newline.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach write newline

Reference 30

Resolution
unresolved
no resolver link, observed 2026-08-12T21:58:40.581831Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=arxiv_source observed=2026-08-12T21:58:40.581831Z digest=sha256:0902c376363677a6595cc3a967116d3ba0da0d8b83f8a0d129cc313c7f009c85

Observation 6aa8da17-f807-43d8-96e3-2f0fe2f6cabc · outbound

This paper cites , " * write output.state after.block = add.period write newline.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach , " * write output.state after.block = add.period write newline

Reference 31

Resolution
unresolved
no resolver link, observed 2026-08-12T21:58:40.620190Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=arxiv_source observed=2026-08-12T21:58:40.620190Z digest=sha256:08e1a51082bf252b8bf20610dbdc04b47f23f5788aedfdb6bf28d5a72d9ab50e

Observation 61d3e495-5cb1-4614-9c59-e84790600f41 · outbound

This paper cites write newline.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach write newline

Reference 32

Resolution
unresolved
no resolver link, observed 2026-08-12T21:58:40.625725Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=arxiv_source observed=2026-08-12T21:58:40.625725Z digest=sha256:4d523360d83ff7f8f07f1270b4537d6036f16c47b7fc84042919fea4588502f7

Observation 97d2255b-8894-49e3-bce5-84ad0e558916 · outbound

This paper cites , " * write output.state after.block = add.period write newline.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach , " * write output.state after.block = add.period write newline

Reference 33

Resolution
unresolved
no resolver link, observed 2026-08-12T21:58:40.631412Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=arxiv_source observed=2026-08-12T21:58:40.631412Z digest=sha256:7926c469434c1b1286d56f34f91778b1ad7ec8a07194b95f2f5fff756da0d91a

Observation 710706ed-aae1-434d-aa96-7055d024fa82 · outbound

This paper cites write newline.

Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach write newline

Reference 34

Resolution
unresolved
no resolver link, observed 2026-08-12T21:58:40.636973Z

Source-reported events for the cited work

Unavailable: canonical work link unavailable.

source=arxiv_source observed=2026-08-12T21:58:40.636973Z digest=sha256:098f9a4d3a977747eb1da4a343597afcc71ebe1aa23762613d2f4403faa3d82f

Pith citing papers

Observation 4a624476-dae0-4b3c-8241-ff76f3b5b4d0 · inbound

Adaptive Learning Systems: Personalized Curriculum Design Using LLM-Powered Analytics cites this paper.

Adaptive Learning Systems: Personalized Curriculum Design Using LLM-Powered Analytics Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach

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local_arxiv, observed 2026-08-15T18:07:37.969235Z

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source=pdf_text observed=2026-08-15T18:07:37.104297Z digest=sha256:3a0024f13a6b9d4280733159a15ca7da79d9c314059262c9515ae672859bda20