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Compact fully monolithic optomechanical accelerometer
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Compact fully monolithic optomechanical accelerometer
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We present a highly compact and fully monolithic optomechanical accelerometer fabricated of a single wafer of fused-silica with a total volume of less than 2cc and a total mass of approximately 4 grams. This sensor demonstrates an unprecedented mQ-product of 50kg, highlighting its unique capabilities for reaching high sensitivity in acceleration sensing. The sensor includes a monolithically co-fabricated Fabry-Perot interferometer that uses the accelerometer test mass as a mirror to measure its displacement in orders of 10-12 m/rtHz, reaching acceleration sensitivities to the order of 100 ng/rtHz - 1 ug/rtHz above 1 Hz.
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Cited by 1 Pith paper
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A 39 kHz optomechanical membrane accelerometer was operated at 4 K to search for ultralight vector dark matter, yielding no signal and upper limits weaker than existing equivalence-principle bounds.
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