Confocal subsurface backscattering microscopy detects and classifies nanoscale threading dislocations in SiC substrates via confocal dark-field filtering and photoelastic scattering from strain-induced index perturbations.
& Murayama, K.Advances in de- fect characterization techniques using polarized light observation in SiC wafers for power devices
2 Pith papers cite this work. Polarity classification is still indexing.
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Pith papers citing it
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UNVERDICTED 2representative citing papers
Phase-contrast microscopy detects threading dislocations with in-plane Burgers vectors in GaN and enables 3D visualization by focal plane adjustment, validated against multiphoton photoluminescence imaging.
citing papers explorer
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High-throughput, Non-Destructive, Three-Dimensional Imaging of GaN Threading Dislocations with in-Plane Burgers Vector Component via Phase-Contrast Microscopy
Phase-contrast microscopy detects threading dislocations with in-plane Burgers vectors in GaN and enables 3D visualization by focal plane adjustment, validated against multiphoton photoluminescence imaging.