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ScAlN/GaN High Electron Mobility Transistor Heterostructures Grown by Ammonia Source Molecular Beam Epitaxy on Silicon Substrate,

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The high K anomaly in ScAlN explained

cond-mat.mtrl-sci · 2026-05-05 · unverdicted · novelty 5.0 · 2 refs

The apparent high dielectric permittivity anomaly in ScAlN is resolved by inverting the electromechanical relation ε_eff = ε_33^S + e_33²/C_33 using first-principles piezoelectric and elastic tensors to recover the true clamped value from experimental thin-film data.

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