Nonlinear measurements at 22 GHz show LiNbO3 filters on sapphire substrates achieve higher IIP3 and better thermal stability than on silicon.
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Measurements of Q in an epitaxial AlN FBAR show monotonic decrease from ~1589 at 6.5 K to 363 at 294 K, matching a model combining intrinsic losses and analytical anchor-radiation loss, validated against prior HBAR data.
Fabricated three- and eight-element ladder filters using A1 XBARs in 128° Y-cut TFLN achieve 1.79 dB IL with 8.58% FBW at 20.5 GHz and 3.80 dB IL with 6.12% FBW at 22 GHz, with >14.9 dB OoB rejection in compact footprints.
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Nonlinear Characterization of Thin-Film LiNbO3 Acoustic Filters
Nonlinear measurements at 22 GHz show LiNbO3 filters on sapphire substrates achieve higher IIP3 and better thermal stability than on silicon.
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Cryogenic Loss Limits in Microwave Epitaxial AlN Acoustic Resonators
Measurements of Q in an epitaxial AlN FBAR show monotonic decrease from ~1589 at 6.5 K to 363 at 294 K, matching a model combining intrinsic losses and analytical anchor-radiation loss, validated against prior HBAR data.
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Practical Demonstrations of FR3-Band Thin-Film Lithium Niobate Acoustic Filter Design
Fabricated three- and eight-element ladder filters using A1 XBARs in 128° Y-cut TFLN achieve 1.79 dB IL with 8.58% FBW at 20.5 GHz and 3.80 dB IL with 6.12% FBW at 22 GHz, with >14.9 dB OoB rejection in compact footprints.