Nonlinear measurements at 22 GHz show LiNbO3 filters on sapphire substrates achieve higher IIP3 and better thermal stability than on silicon.
Periodically poled aluminum scandium nitride bulk acoustic wave resonators and filters for communications in the 6G era
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Measurements of Q in an epitaxial AlN FBAR show monotonic decrease from ~1589 at 6.5 K to 363 at 294 K, matching a model combining intrinsic losses and analytical anchor-radiation loss, validated against prior HBAR data.
Fabricated three- and eight-element ladder filters using A1 XBARs in 128° Y-cut TFLN achieve 1.79 dB IL with 8.58% FBW at 20.5 GHz and 3.80 dB IL with 6.12% FBW at 22 GHz, with >14.9 dB OoB rejection in compact footprints.
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Cryogenic Loss Limits in Microwave Epitaxial AlN Acoustic Resonators
Measurements of Q in an epitaxial AlN FBAR show monotonic decrease from ~1589 at 6.5 K to 363 at 294 K, matching a model combining intrinsic losses and analytical anchor-radiation loss, validated against prior HBAR data.