Phase transformation in AlN layers of TiN-AlN multilayers above 3 nm thickness leads to stabilized mechanical properties and improved damage tolerance.
Effects of the substrate on the determination of thin film mechanical properties by nanoindentation
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Laser scanning of induction-melted Al alloys yields SEM/TEM microstructures similar to LPBF but 20% lower hardness, indicating potential as an expedited screening workflow.
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A correlation of structural changes with nanomechanical properties in TiN-AlN multilayer films
Phase transformation in AlN layers of TiN-AlN multilayers above 3 nm thickness leads to stabilized mechanical properties and improved damage tolerance.