Simultaneous measurement of multiple parameters of a subwavelength structure based on the weak value formalism

A mathematical extension of the weak value formalism to the simultaneous measurement of multiple parameters is presented in the context of an optical focused vector beam scatterometry experiment. In this example, preselection and postselection are achieved via spatially-varying polarization control, which can be tailored to optimize the sensitivity to parameter variations. Initial experiments for the two-parameter case demonstrate that this method can be used to measure physical parameters with resolutions at least 1000 times smaller than the wavelength of illumination.